In maitiro epamusoro ekuputira vacuum, kudzora kwakarurama kwekugadzirwa kwefirimu rakatetepa kwakakosha kuti uwane hunhu hunodiwa hwe optical, mechanical, uye functional. Multi-target switching, nzira inoshandiswa zvakanyanya muPVD, magnetron sputtering, uye ion-assisted deposition systems, inoita basa rakakosha mune izvi nekugonesa kugadzirisa dynamic flux yezvinhu uye composition panguva yekuisa. Kugona uku kwakakosha zvakanyanya kune complex multilayer coatings, graded-index films, kana alloyed structures uko stoichiometry uye uniformity zvinokanganisa zvakananga mashandiro efirimu.
Kuchinjana kwezvibodzwa zvakawanda kunobvumira kushandiswa kwezvibodzwa zvakasiyana-siyana panguva imwe chete kana panguva imwe chete pasina kukanganisa maitiro ekuisa zvinhu, kuchengetedza mamiriro eplasma anoenderera mberi ukuwo zvichigonesa kudzora kwakaringana kwezvikamu zve elemental. Nekugadzirisa mazinga esimba, nguva yekusputter, uye kuratidzwa kwezvibodzwa, vashandisi vanogona kugadzirisa zvakanaka chimiro chechikamu chimwe nechimwe chakaiswa, vachiona kuti ma refractive indices, extinction coefficients, kana electrical conductivity zvinosangana nezvinodiwa zvedhizaini. Mumaitiro e reactive sputtering, multi-target configurations inobatsira kuiswa panguva imwe chete kwezvikamu zvesimbi ne oxide ukuwo uchidzora oxygen kana nitrogen partial pressures, zvichideredza njodzi yechepfu yechinangwa kana kuumbwa kwechikamu chisingadiwe.
Uyezve, kuchinjana kwezvibodzwa zvakawanda kunovandudza kuchinjika kwemaitiro uye kuberekana. Kunoderedza kudiwa kwekubuda kwemhepo kakawanda mukamuri kana kutsiva chinangwa nemaoko, nokudaro kuchengetedza mamiriro evacuum akagadzikana uye maparamita eplasma akafanana. Kugadzikana uku kwakakosha kuti pave nemazinga akafanana ekuisa zvinhu, dense film microstructure, uye kuderedzwa kwedenda pakuumbwa, zvese izvi zvakakosha pakuputira optical inoshanda zvakanyanya, anti-reflective kana high-reflective multilayer stacks, uye functional thin films mu photonics kana energy devices.
Pamusoro pezvo, kubatanidza maturusi ekutarisa ari mukati mechinhu akadai se optical emission spectroscopy, quartz crystal microbalances (QCM), kana plasma diagnostics ne multi-target switching zvinogonesa kudzora mhinduro yenguva chaiyo yekugadzirwa. Kugadziriswa kunogona kuitwa nenzira inochinja-chinja kuti kudzorere kukanganiswa kwechinangwa, kusiyana kwehuwandu hwemasputtering, kana kuchinja kudiki mukumanikidzwa kwekamuri uye gasi rinosara, zvichiita kuti stoichiometry igare yakafanana munzvimbo dzakakura kana kuti kugadzirwa kwakawedzerwa.
Muchidimbu, kuchinjana kwezvibodzwa zvakawanda inzira huru yekudzora kuumbwa kwemafirimu matete mumatekinoroji emazuva ano ekuputira vacuum. Nekupa simba rekutonga pamusoro pemvura inoyerera, kuchengetedza mamiriro eplasma anoramba aripo, uye kubatanidzwa nekuongorora kwepamusoro-soro, zvinoita kuti mafirimu akawanda, alloyed, kana graded awane hunhu hwawo hwe optical, electrical, uye mechanical. Kugona uku kunokosha zvikuru pakuisa ma coatings anoshandiswa mu optics, photonics, energy devices, uye mamwe mashandisirwo epamusoro emaindasitiri.
-Chinyorwa ichi chakabudiswa namugadziri wemidziyo yekuputira vacuum Zhenhua Vacuum
Nguva yekutumira: Kurume-19-2026