Kufunika kwa Kusintha kwa Multi-Target mu Kulamulira Kupanga Mafilimu Ochepa

In njira zapamwamba zopangira vacuum, kuwongolera molondola kapangidwe ka filimu yopyapyala ndikofunikira kuti pakhale mawonekedwe owoneka bwino, amakaniko, komanso magwiridwe antchito omwe amafunidwa. Kusinthasintha kwa multi-target, njira yomwe imagwiritsidwa ntchito kwambiri mu PVD, magnetron sputtering, ndi ion-assisted deposition systems, kumachita gawo lofunikira kwambiri pankhaniyi mwa kulola kusintha kwa dynamic kwa material flux ndi kapangidwe kake panthawi yoyika. Mphamvu imeneyi ndi yofunika kwambiri pa zophimba zovuta za multilayer, mafilimu olembedwa m'ma graded, kapena kapangidwe kosakanikirana komwe stoichiometry ndi kufanana zimakhudza mwachindunji magwiridwe antchito a filimu.

Kusinthana kwa ma target ambiri kumalola kugwiritsa ntchito ma target osiyanasiyana motsatizana kapena nthawi imodzi popanda kusokoneza njira yoyika, kusunga mikhalidwe yopitilira ya plasma pomwe kumalola kuwongolera kolondola kwa ma elemental ratios. Mwa kusintha milingo yamagetsi, nthawi yoyika ma sputter, ndi kuwonekera kwa ma target, ogwiritsa ntchito amatha kusintha bwino kapangidwe ka gawo lililonse loyikidwa, kuonetsetsa kuti ma refractive indices, ma termination coefficients, kapena ma electrical conductivity akukwaniritsa zofunikira za kapangidwe. Mu njira zoyika ma sputtering, ma multi-target configurations amathandizira kuphatikiza nthawi imodzi kwa zigawo zachitsulo ndi oxide pomwe akulamulira kupsinjika pang'ono kwa okosijeni kapena nayitrogeni, kuchepetsa chiopsezo cha poizoni wa ma target kapena mapangidwe osafunikira a gawo.

Kuphatikiza apo, kusinthana kwa zinthu zambiri kumawonjezera kusinthasintha kwa njira ndi kuberekana. Kumachepetsa kufunikira kotsegula mpweya pafupipafupi m'chipinda kapena kusintha zinthu ndi dzanja, motero kusunga mikhalidwe yokhazikika ya vacuum ndi magawo a plasma okhazikika. Kukhazikika kumeneku ndikofunikira kuti pakhale kuchuluka kofanana kwa malo osungira, kapangidwe kakang'ono ka filimu yokhuthala, komanso kupangika kwa zolakwika zochepa, zonse zomwe ndizofunikira kwambiri pakuphimba kwa kuwala kwapamwamba, ma stack otsutsana ndi kuwunikira kapena kuwunikira kwakukulu, komanso mafilimu opyapyala ogwira ntchito muzipangizo zamagetsi kapena zamagetsi.

Kuphatikiza apo, kuphatikiza zida zowunikira zomwe zili mkati mwa malo monga optical emission spectroscopy, quartz crystal microbalances (QCM), kapena plasma diagnostics ndi multi-target switching zimathandiza kuwongolera momwe zinthu zilili nthawi yeniyeni. Kusintha kumatha kupangidwa mosinthasintha kuti kulimbitse kukokoloka kwa malo, kusinthasintha kwa kuchuluka kwa ma sputtering, kapena kusinthasintha pang'ono kwa kuthamanga kwa mpweya m'chipinda ndi mpweya wotsalira, kuonetsetsa kuti stoichiometry ikugwirizana m'malo akuluakulu kapena kupanga kwa nthawi yayitali.

Mwachidule, kusinthana kwa multi-target ndi njira yofunika kwambiri yowongolera kapangidwe ka filimu yopyapyala muukadaulo wamakono wa vacuum covering. Mwa kupereka ulamuliro wamphamvu pa flux ya zinthu, kusunga mikhalidwe yopitilira ya plasma, komanso kuphatikiza ndi njira zapamwamba zodziwira mkati, zimawonetsetsa kuti mafilimu ambiri, opangidwa ndi alloy, kapena okonzedwa bwino amakwaniritsa mawonekedwe awo opangidwa ndi kuwala, magetsi, ndi makina. Mphamvu imeneyi ndi yofunika kwambiri pa zophimba zolondola kwambiri zomwe zimagwiritsidwa ntchito mu optics, photonics, zida zamagetsi, ndi ntchito zina zapamwamba zamafakitale.

-Nkhaniyi yasindikizidwa ndiwopanga zida zophikira vacuum Zhenhua Vacuum