In Cov txheej txheem nqus tsev txheej txheem siab heev, kev tswj hwm qhov tseeb ntawm cov zaj duab xis nyias nyias yog qhov tseem ceeb rau kev ua tiav cov khoom siv kho qhov muag, kho tshuab, thiab ua haujlwm. Kev hloov pauv ntau lub hom phiaj, ib txoj kev siv dav hauv PVD, magnetron sputtering, thiab ion-assisted deposition systems, ua lub luag haujlwm tseem ceeb hauv qhov no los ntawm kev ua kom muaj kev hloov kho dynamic ntawm cov khoom siv flux thiab cov khoom sib xyaw thaum lub sijhawm deposition. Lub peev xwm no yog qhov tseem ceeb tshwj xeeb rau cov txheej txheem ntau txheej, cov yeeb yaj kiab qib siab, lossis cov qauv alloyed qhov twg stoichiometry thiab uniformity ncaj qha cuam tshuam rau kev ua tau zoo ntawm zaj duab xis.
Kev hloov ntau lub hom phiaj tso cai rau kev siv sib law liag lossis tib lub sijhawm ntawm cov hom phiaj sib txawv yam tsis cuam tshuam cov txheej txheem tso dej, tswj cov xwm txheej plasma tas mus li thaum ua kom muaj kev tswj hwm qhov sib piv ntawm cov ntsiab lus. Los ntawm kev kho cov qib fais fab, lub sijhawm sputtering, thiab lub hom phiaj raug, cov neeg teb xov tooj tuaj yeem kho qhov sib xyaw ntawm txhua txheej tso dej, xyuas kom meej tias cov ntsuas refractive, cov coefficients extinction, lossis kev ua hluav taws xob ua tau raws li cov qauv tsim. Hauv cov txheej txheem reactive sputtering, ntau lub hom phiaj teeb tsa pab txhawb kev sib xyaw ua ke ntawm cov hlau thiab oxide Cheebtsam tib lub sijhawm thaum tswj cov pa oxygen lossis nitrogen ib feem siab, txo qhov kev pheej hmoo ntawm lub hom phiaj lom lossis kev tsim theem tsis xav tau.
Tsis tas li ntawd xwb, kev hloov pauv ntau lub hom phiaj ua rau cov txheej txheem yooj ywm thiab rov ua dua. Nws txo qhov xav tau rau kev tso pa tawm ntau zaus lossis hloov pauv tes, yog li tswj hwm cov xwm txheej nqus tsev ruaj khov thiab cov txheej txheem plasma sib xws. Qhov kev ruaj khov no yog qhov tseem ceeb rau kev ua tiav cov nqi tso tawm sib xws, cov yeeb yaj kiab ntom ntom, thiab txo qis qhov tsis zoo, txhua yam uas tseem ceeb rau cov txheej txheem kho qhov muag ua tau zoo, cov khoom sib xyaw tiv thaiv kev cuam tshuam lossis cov khoom sib xyaw ua ke siab, thiab cov yeeb yaj kiab nyias ua haujlwm hauv photonics lossis cov khoom siv zog.
Ntxiv mus, kev koom ua ke ntawm cov cuab yeej saib xyuas hauv qhov chaw xws li optical emission spectroscopy, quartz crystal microbalances (QCM), lossis plasma diagnostics nrog ntau lub hom phiaj hloov pauv ua rau muaj kev tswj hwm cov lus teb rov qab tiag tiag ntawm cov khoom sib xyaw. Kev hloov kho tuaj yeem ua tau dynamically los them rau lub hom phiaj erosion, kev hloov pauv hauv sputtering yield, lossis kev hloov pauv me me hauv chamber siab thiab cov roj seem, xyuas kom meej stoichiometry sib xws thoob plaws cov substrates loj lossis kev khiav ntau lawm ntev.
Hauv kev xaus lus, kev hloov pauv ntau lub hom phiaj yog qhov tseem ceeb ntawm kev tswj cov yeeb yaj kiab nyias nyias hauv cov thev naus laus zis niaj hnub no. Los ntawm kev muab kev tswj hwm dynamic ntawm cov khoom siv flux, tswj cov xwm txheej plasma tas mus li, thiab kev koom ua ke nrog kev kuaj mob hauv qhov chaw siab heev, nws ua kom ntseeg tau tias cov yeeb yaj kiab multilayer, alloyed, lossis graded ua tiav lawv cov khoom siv optical, hluav taws xob, thiab mechanical. Lub peev xwm no yog qhov tseem ceeb rau cov txheej txheem siab siv hauv optics, photonics, cov khoom siv hluav taws xob, thiab lwm yam kev siv hauv kev lag luam siab heev.
- Tsab xov xwm no tau luam tawm los ntawmChaw tsim khoom siv nqus tsev txheej Zhenhua Nqus Tsev
Lub sijhawm tshaj tawm: Lub Peb Hlis-19-2026