In ubuchwepheshe bokufaka i-vacuum njenge-Physical Vapor Deposition (PVD) kanye ne-Chemical Vapor Deposition (CVD), igumbi le-vacuum lingaphezu kakhulu kwendawo ebiyelwe ngomshini — ukwakheka kwalo kuthinta ngqo izakhiwo ezibalulekile zefilimu, okuhlanganisa ukufana kobukhulu, amandla okunamathela, ukulawulwa kokungcola kwezinhlayiya, kanye nesilinganiso sokufakwa. Ukuqonda komklamo wegumbi kungenye yezinto eziyinhloko ezinquma ukusebenza kwemishini kanye nokukhiqiza kwengubo.
Cha.1. I-Chamber Geometry Ilawula Ukugeleza Kwegesi Nokusatshalaliswa Kwe-Plasma
Ezinqubweni ezifana neMagnetron Sputtering kanye ne-Electron Beam Evaporation, insimu yokugeleza kwegesi yangaphakathi kanye nokusatshalaliswa kwe-plasma ngaphakathi kwegumbi kunomthelela oqondile endleleni kanye nesimo samandla sezinhlobo ezifakayo. Igumbi elilungiselelwe kufanele livumele ukungena kwegesi okufanayo kanye nokukhipha okusebenzayo, kususe izindawo ezifile ezingaholela ezindaweni ezinomfutho ophezulu wendawo noma ukumiswa kwegesi - zombili ezithinta kabi ukufana kokumboza.
Ngaphezu kwalokho, ukwakheka kwejometri kwegumbi (isb., eliyisilinda noma elingunxande) kanye nobudlelwano bendawo phakathi kwethagethi kanye nezingxenye ezingaphansi komhlaba kuthinta ukusatshalaliswa kobuningi be-plasma, ngaleyo ndlela kuthonye ubuningi befilimu kanye namandla okunamathela. Ezinhlelweni ezenzelwe ukumbozwa kweqoqo lezingxenye ezingaphansi komhlaba eziningi, igumbi elihambisana ne-radially elihlanganiswe nokujikeleza kweplanethi lisebenza kahle kakhulu ekuthuthukiseni ukufana kokubekwa.
Ukuphathwa Kokushisa Kwesi-2 Kuthinta Ukuqina Kwefilimu
Ukuqhuma kwezinhlayiya ezinamandla aphezulu, ukukhishwa kwe-plasma, kanye nokushisa okuqondiwe kuyingxenye ebalulekile yezinqubo zokufaka i-vacuum. Ngaphandle kokulawula ukushisa okusebenzayo, le mithombo yokushisa ingaholela ekucindezelekeni okungavamile ngaphakathi kwesakhiwo sefilimu noma ibangele ukushisa ngokweqile kwe-substrate, ekugcineni kwehlise ukusebenza kwefilimu kanye nokunamathela.
Amakamelo okuhlanza anamuhla avame ukuhlonyiswa ngezindonga ezipholiswe ngamanzi, ukuvikela ukushisa, noma izendlalelo zokushisa ukuze kulondolozwe ukuzinza kokushisa kanye nezimo zenqubo ezihambisanayo. Kuma-substrate azwela ukushisa — njengepulasitiki, i-PC, noma i-PET — ukwakheka kwekamelo kumele futhi kunciphise izindlela zokushisa ezikhipha imisebe ukuze kuvinjelwe ukuguquguquka noma ukwehluleka kokugqoka ngenxa yezindawo ezishisayo zasendaweni.
Ukuhlanzeka Kwegumbi Lenombolo 3 Kuthinta Ngokuqondile Ikhwalithi Yokumboza
Ukulawulwa kokungcola kwezinhlayiya kuyisici esibalulekile sokuklama imishini yokumboza nge-vacuum ephezulu. Izindawo zangaphakathi zegumbi ezinamakhona afile, i-welding spatter, noma ukuqeda okungekuhle kobuso kuvame ukuqongelela ukungcola, kube yimithombo yeziphambeko ezifana nemigodi, ukufakwa kwezinhlayiya, noma ukuhlukanisa.
Ukuze kulungiswe lokhu, amakamelo okuhlanza anamuhla avame ukwakhiwa ngezindawo ezipholishwe ngogesi noma ngomshini, amakhona ayindilinga, kanye nama-weld protrusions ancishisiwe. Izinhlelo ezisezingeni eliphezulu zingase zihlanganise nokuhlanza i-plasma noma izinhlelo zokubhaka ezishisayo ukuze kuvunyelwe ukulungiswa kwegumbi ngokushesha phakathi kwamaqoqo.
Ubukhulu Begumbi Lenombolo 4 Buhlobene Nokusebenza Kahle Nokukhiqiza
Njengoba isidingo esikhulu sezindawo ezinkulu — njengezibonisi ze-HUD noma izingxenye zesibuko se-CMS — kanye nezinhlelo zangaphakathi zamakamelo amaningi, ukwakheka kwegumbi le-vacuum kuyashintsha kuye ngobukhulu obukhulu, ukuzinza okuphezulu kwe-vacuum, kanye nokucushwa kweziteshi eziningi. Umthamo wegumbi olinganiselayo kahle kanye nokuhlelwa kwephothi yephampu elungiselelwe kahle kungathuthukisa kakhulu isivinini sokupompa kwe-vacuum kanye nokuqina, ngaleyo ndlela kuthuthukiswe ukugeleza kwe-batch kanye nokufana kwefilimu.
Ikamelo lokuhlanza lingaphezu nje kokuba “isitsha” — lidlala indima ebalulekile ekuqineni kwe-vacuum, amandla okubeka, ukulawulwa kokushisa, ukulawula ukuhlanzeka, kanye nokukhiqiza imishini. Imiklamo yegumbi elungiselelwe kumele iklanywe kahle futhi iqinisekiswe kuzo zonke izikhathi eziningi ukuze kuhlangatshezwane nezidingo ezithile zezinqubo ezahlukene zokumboza kanye nezicelo zomkhiqizo.
Kubakhiqizi bemishini yokumboza nge-vacuum, izinga lobuchwepheshe ekuklanyweni kwegumbi liwukubonakaliswa okuqondile kwekhono labo lenqubo kanye nekhwalithi yemishini.
Isikhathi sokuthunyelwe: Julayi-16-2025