In ngā hangarau whakatakotoranga korehau pērā i te Whakatakotoranga Kohu Tinana (PVD) me te Whakatakotoranga Kohu Matū (CVD), he nui atu te rūma korehau i te mea he āpiti miihini noa iho — ko tōna hoahoa hanganga ka pā tika ki ngā āhuatanga kiriata nui, tae atu ki te ōritetanga matotoru, te kaha piri, te whakahaere poke matūriki, me te tere whakatakotoranga. Ko te whakaaro nui o te hoahoa rūma tētahi o ngā mea matua e whakatau ana i te mahi a ngā taputapu me te hua paninga.
Nama 1. Ko te Āhua o te Rūma e Whakahau ana i te Rere o te Hau me te Tohatoha o te Plasma
I roto i ngā tukanga pēnei i te Magnetron Sputtering me te Electron Beam Evaporation, ka pā tika te rere o te hau ā-roto me te tohatoha plasma i roto i te ruma ki te ara me te āhua pūngao o te momo e whakatakoto ana. Me āhei te ruma kua whakapaitia ki te whakauru hau ōrite me te putanga pai, me te whakakore i ngā rohe mate ka arahi ki ngā rohe pēhanga teitei ā-rohe, ki te noho pūmau rānei o te hau — e rua ēnei e pā kino ana ki te ōritetanga o te paninga.
Hei tāpiri atu, ko te whirihoranga āhuahanga o te rūma (hei tauira, he porotaka, he tapawhā rānei) me te whanaungatanga ā-wāhi i waenga i te ūnga me ngā papa ka pā ki te tohatoha kiato plasma, ā, ka pā ki te kiato kiriata me te kaha piri. Mō ngā pūnaha i hangaia mō te paninga puranga o ngā papa maha, he tino whai hua te rūma hangarite radial me te hurihanga aorangi ki te whakarei ake i te ōritetanga o te whakatakotoranga.
Nama 2 Te Whakahaere Wera e Pā Ana ki te Pūmautanga Kiriata
Ko te pupuhi matūriki kaha-teitei, te tukunga plasma, me te whakamahana ūnga he mea taketake ki ngā tukanga whakatakotoranga korehau. Ki te kore he whakahaere wera whai hua, ka taea e ēnei pūtake wera te arahi ki te ahotea rerekē i roto i te hanganga kiriata, te wera nui rānei o te papa, ā, ka heke te mahi kiriata me te piri.
Ko ngā rūma korehau hou he mea hanga ki ngā pakitara whakamatao-wai, he parenga wera, he paparanga whakamarumaru rānei hei pupuri i te pumau o te wera me ngā āhuatanga tukanga ōrite. Mō ngā papa e tairongo ana ki te wera — pērā i te kirihou, te PC, te PET rānei — me whakaiti hoki te hoahoa o te rūma i ngā ara wera hihi hei ārai i te whakarerekētanga, te korenga rānei o te paninga nā ngā wera wera ā-rohe.
Ka pā tika te ma o te rūma nama 3 ki te kounga o te paninga
He mea nui te whakahaere i te poke o ngā matūriki i roto i te hoahoa taputapu paninga korehau kounga teitei. Ko ngā mata o roto o te rūma he koki mate, he tauhiuhi whakarewa, he āhua mata ngoikore rānei ka kohikohi i ngā poke, ka noho hei pūtake o ngā hapa pēnei i ngā kōhao iti, ngā whakaurunga matūriki, te wehewehe rānei.
Hei whakatika i tēnei, ko ngā rūma korehau hou he mea hanga ki ngā mata kua orohia hiko, kua orohia rānei e te mīhini, he kokonga porowhita, me ngā pūwero whakarewa iti. Tērā pea ka whakauruhia e ngā pūnaha tino-tauine ngā pūnaha horoi plasma in-situ, ngā pūnaha tunu wera rānei hei whakahohe i te whakatikatika rūma i waenga i ngā puranga.
Ko ngā Ahu o te Rūma Nama 4 e Herea ana ki te Putanga me te Hua
I te pikinga ake o te hiahia mō ngā papa whenua whānui — pērā i ngā whakaaturanga HUD, ngā wāhanga whakaata CMS rānei — me ngā pūnaha maha-rūma-roto, kei te whanake haere te hoahoa rūma korehau ki ngā rahinga nui ake, te pumau nui o te korehau, me te whirihoranga maha-teihana. Mā te rōrahi rūma taurite me te tahora putanga papu kua arotauhia ka taea te whakapai ake i te tere me te pumau o te papu korehau, ā, ka whakarei ake i te putanga puranga me te ōritetanga o te kiriata.
Ehara i te mea he "ipu" noa iho te rūma korehau — he mea nui ki te pumau o te korehau, te kaha o te whakatakotoranga, te whakahaere pāmahana, te whakahaere i te horoi, me te hua o ngā taputapu. Me hanga tika, me whakamanahia hoki ngā hoahoa rūma kua whakaritea puta noa i ngā momo putanga maha kia tutuki ai ngā whakaritenga motuhake o ngā tukanga paninga me ngā tono hua rerekē.
Mō ngā kaihanga taputapu paninga korehau, ko te taumata o te tohungatanga ki te hoahoa rūma he whakaata tika i tō rātou kaha tukanga me te kounga o ngā taputapu.
Wā tuku: Hurae-16-2025