In ukadaulo woyika vacuum monga Physical Nthunzi Yochokera Kumadzi (PVD) ndi Chemical Nthunzi Yochokera Kumadzi (CVD), chipinda chotsukira mpweya sichili ngati chotchinga cha makina okha — kapangidwe kake kamakhudza mwachindunji zinthu zofunika kwambiri pa filimu, kuphatikizapo kufanana kwa makulidwe, mphamvu yomatirira, kuwongolera kuipitsidwa kwa tinthu, ndi kuchuluka kwa malo oikidwa. Kuganiza bwino kwa kapangidwe ka chipinda ndi chimodzi mwa zinthu zofunika kwambiri pakugwira ntchito kwa zida ndi kuchuluka kwa zokutira.
Nambala 1. Geometry ya Chamber Ikulamulira Kuyenda kwa Mpweya ndi Kufalikira kwa Plasma
Mu njira monga Magnetron Sputtering ndi Electron Beam Evaporation, mpweya wamkati ndi kufalikira kwa plasma mkati mwa chipinda zimakhudza mwachindunji njira ndi momwe mphamvu zimakhalira zamoyo zomwe zimayikidwa. Chipinda chokonzedwa bwino chiyenera kulola mpweya kulowa wofanana komanso kutulutsa mpweya bwino, kuchotsa madera akufa omwe angayambitse madera omwe ali ndi mphamvu zambiri kapena mpweya woyima - zonsezi zimasokoneza kufanana kwa utoto.
Kuphatikiza apo, mawonekedwe a chipinda (monga cylindrical kapena rectangular) ndi ubale wa malo pakati pa cholinga ndi magawo zimakhudza kufalikira kwa kuchuluka kwa plasma, motero zimakhudza kuchuluka kwa filimu ndi mphamvu yomatira. Pa machitidwe opangidwira kuphimba gulu la magawo angapo, chipinda chofanana ndi radially pamodzi ndi kuzungulira kwa mapulaneti ndi chothandiza kwambiri pakukweza kufanana kwa malo.
Nambala 2 Kusamalira Kutentha Kumakhudza Kukhazikika kwa Mafilimu
Kuphulika kwa tinthu tating'onoting'ono tokhala ndi mphamvu zambiri, kutuluka kwa plasma, ndi kutentha kwa zinthu zomwe zili mkati mwake ndizofunikira kwambiri pa njira zotulutsira mpweya m'malo otayira mpweya. Popanda kulamulira bwino kutentha, magwero otentha amenewa angayambitse kupsinjika kosazolowereka mkati mwa kapangidwe ka filimu kapena kuyambitsa kutentha kwambiri kwa substrate, zomwe pamapeto pake zimawononga magwiridwe antchito ndi kumatirira kwa filimuyo.
Zipinda zamakono zopumira mpweya nthawi zambiri zimakhala ndi makoma ozizira ndi madzi, zotchingira kutentha, kapena zigawo zotetezera kutentha kuti zisunge bata la kutentha komanso kuti zinthu zizikhala bwino nthawi zonse. Pazinthu zomwe zimakhudzidwa ndi kutentha — monga mapulasitiki, PC, kapena PET — kapangidwe ka chipindacho kayeneranso kuchepetsa njira zotenthetsera kuti zisawonongeke kapena kulephera kwa utoto chifukwa cha malo otentha omwe ali m'deralo.
Ukhondo wa Chipinda Cha Nambala 3 Umakhudza Mwachindunji Ubwino wa Zophimba
Kuletsa kuipitsidwa kwa tinthu tating'onoting'ono ndi gawo lofunika kwambiri pakupanga zida zapamwamba zophikira vacuum. Malo amkati mwa chipinda okhala ndi ngodya zofewa, malo olumikizirana, kapena malo osakwanira bwino nthawi zambiri amasonkhanitsa zinthu zodetsa, zomwe zimapangitsa kuti pakhale zolakwika monga ma pinholes, tinthu tating'onoting'ono, kapena delamination.
Pofuna kuthana ndi izi, zipinda zamakono zotsukira mpweya nthawi zambiri zimamangidwa ndi malo opukutidwa ndi magetsi kapena makina, ngodya zozungulira, komanso zotchingira zochepetsedwa. Makina apamwamba kwambiri amathanso kuphatikiza makina oyeretsera plasma kapena makina ophikira kutentha kuti athandize chipinda kukhala chozizira mwachangu pakati pa magulu.
Miyeso ya Chamber No.4 Imagwirizana ndi Kuchuluka kwa Ntchito ndi Kubereka
Popeza kufunikira kwakukulu kwa zinthu zazikulu — monga ma HUD displays kapena CMS mirror components — ndi ma multi-chamber inline systems, kapangidwe ka vacuum chamber kakusintha kukhala kokulirapo, kukhazikika kwa vacuum, komanso kasinthidwe ka multi-station. Voliyumu ya chipinda yolinganizidwa bwino komanso kapangidwe kabwino ka pampu zitha kusintha kwambiri liwiro la vacuum pumping ndi kukhazikika, motero zimawonjezera kuchuluka kwa ma batch throughput ndi kufanana kwa filimu.
Chipinda chotsukira mpweya si chinthu chongofunika kwambiri kuposa “chidebe” chokha — chimagwira ntchito yofunika kwambiri pa ukhondo wa vacuum, mphamvu zoyikamo mpweya, malamulo a kutentha, kuwongolera ukhondo, ndi kupanga bwino zida. Mapangidwe a chipinda chotsukira mpweya ayenera kukonzedwa bwino ndikutsimikiziridwa m'njira zosiyanasiyana kuti akwaniritse zofunikira za njira zosiyanasiyana zokutira ndi kugwiritsa ntchito zinthu.
Kwa opanga zida zophikira vacuum, luso lawo pakupanga zipinda limadalira mwachindunji luso lawo pa ntchito ndi ubwino wa zida zawo.
Nthawi yotumizira: Julayi-16-2025