In cov txheej txheem nqus tsev deposition xws li Physical Vapor Deposition (PVD) thiab Chemical Vapor Deposition (CVD), lub tshuab nqus tsev tsis yog tsuas yog lub tshuab kaw xwb - nws cov qauv tsim muaj feem cuam tshuam rau cov yam ntxwv tseem ceeb ntawm zaj duab xis, suav nrog kev sib npaug ntawm cov tuab, lub zog lo, kev tswj cov khoom me me, thiab tus nqi tso tawm. Qhov laj thawj ntawm kev tsim lub tshuab yog ib qho ntawm cov ntsiab lus tseem ceeb ntawm kev ua haujlwm ntawm cov khoom siv thiab cov txheej txheem.
No.1. Chamber Geometry tswj cov roj ntws thiab cov plasma faib tawm
Hauv cov txheej txheem zoo li Magnetron Sputtering thiab Electron Beam Evaporation, lub tshav pob roj sab hauv thiab kev faib tawm plasma hauv lub chamber muaj kev cuam tshuam ncaj qha rau txoj kev mus los thiab lub zog ntawm cov hom tso. Lub chamber zoo tshaj plaws yuav tsum ua kom muaj kev nkag mus rau cov roj sib npaug thiab cov pa tawm zoo, tshem tawm cov cheeb tsam tuag uas tuaj yeem ua rau thaj chaw siab lossis cov roj tsis txav - ob qho tib si cuam tshuam tsis zoo rau kev sib npaug ntawm cov txheej txheem.
Ntxiv mus, qhov kev teeb tsa geometric ntawm lub chamber (piv txwv li, cylindrical lossis rectangular) thiab qhov kev sib raug zoo ntawm lub hom phiaj thiab cov substrates cuam tshuam rau kev faib tawm ntawm cov plasma density, yog li cuam tshuam rau cov zaj duab xis density thiab lub zog lo. Rau cov kab ke tsim rau kev txheej txheej ntawm ntau lub substrates, lub chamber radially symmetric ua ke nrog planetary rotation yog qhov zoo heev hauv kev txhim kho kev sib npaug ntawm cov deposition.
No.2 Kev Tswj Xyuas Kub Cuam Tshuam Rau Kev Ruaj Ntseg Zaj Duab Xis
Kev siv zog ntau ntawm cov khoom me me, kev tso tawm plasma, thiab kev cua sov rau lub hom phiaj yog qhov tseem ceeb hauv cov txheej txheem tso dej hauv lub tshuab nqus tsev. Yog tsis muaj kev tswj cua sov zoo, cov cua sov no tuaj yeem ua rau muaj kev ntxhov siab tsis zoo hauv cov qauv zaj duab xis lossis ua rau lub substrate kub dhau, thaum kawg ua rau zaj duab xis tsis zoo thiab kev nplaum.
Cov chav nqus tsev niaj hnub no feem ntau muaj phab ntsa uas txias los ntawm dej, tiv thaiv cua sov, lossis cov txheej rwb thaiv tsev kom tswj tau qhov kub thiab txias thiab cov txheej txheem ua haujlwm tas li. Rau cov khoom siv uas rhiab heev rau cua sov - xws li yas, PC, lossis PET - tus qauv tsim chav yuav tsum txo cov cua sov kom tsawg dua kom tiv thaiv kev hloov pauv lossis kev ua tsis tiav ntawm cov txheej txheem vim muaj cov cua sov kub hauv zos.
Kev Huv Si ntawm Chav No.3 Ncaj Qha Cuam Tshuam rau Qhov Zoo ntawm Cov Txheej Txheem
Kev tswj cov khoom me me uas ua rau muaj kuab paug yog ib qho tseem ceeb ntawm kev tsim cov khoom siv nqus tsev siab heev. Cov nplaim sab hauv ntawm chav uas muaj cov ces kaum tuag, cov vuam tawg, lossis qhov chaw tsis zoo feem ntau yuav sib sau ua ke cov kuab paug, ua rau muaj qhov tsis zoo xws li cov qhov me me, cov khoom me me uas muaj, lossis cov khoom tawg.
Yuav kom daws tau qhov teeb meem no, cov chaw nqus tsev niaj hnub no feem ntau yog tsim los ntawm cov nplaim electropolished lossis mechanically polished, cov ces kaum puag ncig, thiab txo qhov weld protrusions. Cov txheej txheem siab kuj tseem tuaj yeem koom ua ke hauv-situ plasma cleaning lossis thermal baking systems kom ua rau lub chamber conditioning sai ntawm cov pawg.
Qhov Loj ntawm Chav No.4 Muaj Feem Cuam Tshuam rau Kev Ua Haujlwm thiab Kev Tsim Khoom
Nrog rau qhov xav tau ntau ntxiv rau cov khoom siv loj hauv thaj chaw - xws li HUD cov zaub lossis CMS daim iav Cheebtsam - thiab ntau lub chamber inline systems, kev tsim lub tshuab nqus tsev vacuum tab tom hloov mus rau qhov loj dua, kev ruaj khov ntawm lub tshuab nqus tsev, thiab kev teeb tsa ntau lub chaw nres tsheb. Lub ntim chamber zoo sib npaug thiab qhov chaw nres tsheb twj tso kua mis zoo tshaj plaws tuaj yeem txhim kho qhov ceev thiab kev ruaj khov ntawm lub tshuab nqus tsev, yog li ua kom muaj kev sib xyaw ua ke thiab kev sib xws ntawm zaj duab xis.
Lub tshuab nqus tsev tsis yog tsuas yog ib lub "thawv" xwb - nws ua lub luag haujlwm tseem ceeb hauv kev ua haujlwm ntawm lub tshuab nqus tsev, kev sib sau ua ke ntawm cov khoom, kev tswj cua sov, kev tswj kev huv, thiab kev tsim khoom ntawm cov khoom siv. Cov qauv tsim ntawm lub tshuab nqus tsev yuav tsum tau tsim thiab lees paub meej thoob plaws ntau qhov kev ua dua kom ua tau raws li cov kev xav tau tshwj xeeb ntawm cov txheej txheem txheej thiab cov ntawv thov khoom sib txawv.
Rau cov chaw tsim khoom siv nqus tsev, qib kev txawj ntse hauv kev tsim chav yog qhov cuam tshuam ncaj qha ntawm lawv lub peev xwm ua haujlwm thiab qhov zoo ntawm cov khoom siv.
Lub sijhawm tshaj tawm: Lub Xya Hli-16-2025