Dongosolo lophimba vacuum la eyeam la AR AF ndilosintha kwambiri kwa opanga ndi ogula omwe. Pogwiritsa ntchito mphamvu ya evaporation ya electron beam m'malo osungira vacuum, dongosolo lamakonoli lingagwiritse ntchito bwino komanso mofanana zophimba za AR ndi AF ku mitundu yosiyanasiyana ya zophimba...
Kugwiritsa ntchito makina ophimba zitsulo oletsa kusindikiza zala kumayimira kupita patsogolo kwakukulu paukadaulo woteteza pamwamba. Mwa kuphatikiza ukadaulo wa vacuum ndi zokutira zapadera, makina awa amapanga gawo lopyapyala, losawonongeka pamwamba pa zitsulo lomwe limateteza ku zala ndi zinthu zina zosokoneza...
Ndi kukula kwa ukadaulo wopaka utoto, makamaka ukadaulo wopaka utoto wa magnetron, pakadali pano, chifukwa cha zinthu zilizonse zitha kukonzedwa ndi filimu ya ion bombardment, chifukwa chandamale chimapukutidwa munjira yopaka utoto ku mtundu wina wa substrate, khalidwe la ...
A. Kuchuluka kwa kupopera madzi. Mwachitsanzo, mukapopera madzi a SiO2, kuchuluka kwa kupopera madzi kumatha kufika 200nm/min, nthawi zambiri kufika 10 ~ 100nm/min. Ndipo kuchuluka kwa kupangidwa kwa filimu kumakhala kofanana ndi mphamvu ya ma frequency ambiri. B. Kugwirizana pakati pa filimu ndi substrate ndi kwakukulu kuposa vacuum vacuum vacuum...
Kupopera kwa Magnetron kumaphatikizapo makamaka kunyamula kwa plasma, kupukuta kwa chandamale, kuyika filimu yopyapyala ndi njira zina, mphamvu ya maginito pa njira yopopera ya magnetron idzakhala ndi mphamvu. Mu dongosolo la magnetron sputtering kuphatikiza mphamvu ya maginito ya orthogonal, ma elekitironi amakhudzidwa ndi...
Makina opopera vacuum pamakina opopera ali ndi zofunikira izi: (1) Makina opopera vacuum ayenera kukhala ndi liwiro lalikulu lopopera, lomwe siliyenera kungotulutsa mpweya wotulutsidwa kuchokera ku substrate ndi zinthu zomwe zasanduka nthunzi komanso zigawo zomwe zili mu makina opopera vacuum ...