I roto i te ngaru o te mātauranga motuka, kua noho te kokopiti atamai hei tohu matua mō ngā waka papai. Hei pokapū taunekeneke, kua whanake te whakaaturanga i tua atu i te "matapihi tirohanga" ki tētahi pūnaha matatau e whakauru ana i te mana pā, te whakaiti i te kanapa, me ngā mahi ārai-kanapa.
Ko te nuinga o ēnei mahi e whakawhirinaki ana ki ngā hangarau paninga kiriata angiangi matatau e whakamahia ana ki ngā mata karāhe—mai i ngā kiriata ārai-whakaata (AR) ki ngā paparanga kawe hiko. Ko ia kiriata angiangi, pērā i te "pito io," ka pā tika ki te wheako kaiwhakamahi.
Heoi, i te whanaketanga o ngā whakaaturanga ki ngā rahi nui ake, ki ngā momo āhua rerekē ake, me te whakaurunga mahi teitei ake, ehara te hangarau paninga i te tukanga whakawhanui noa iho. Kua waiho hei wero taumata-pūnaha e horapa ana puta noa i te hoahoa taputapu me te whakahaere tukanga.
1. Whakaurunga Mahi: Mai i te Papa Kotahi ki ngā Puranga Uaua
I roto i ngā whakaaturanga waka iti tuku iho, kotahi te kiriata AR i ranea. Heoi, i roto i ngā kokopiti atamai, me whakatutuki ngā whakaaturanga i te tuku tere, te whakaata iti, te aro pā tika, te ātete ki te pakū, tae atu ki te tiaki tūmataiti. Nō reira, kua whanake te pūnaha kiriata angiangi ki ngā hoahoanga hiato maha-paparanga, ka nui haere te uaua.
Hei tauira, tangohia te whakaurunga "pā + whakaaturanga". Ko te rauemi matua ko te kiriata kawe hiko indium tin oxide (ITO). Me pai te kawe hiko kia pai ai te aro o te pā, engari he rerekē te kawe hiko me te tuku whatu. Ka pai ake te kawe hiko i te kiriata ITO matotoru engari ka whakaiti i te tuku hiko, ka āhua pōuri te whakaaturanga. Ka pai ake te mārama o te whatu i te kiriata angiangi engari ka ngoikore te kawe hiko, ka puta te whakaroa o te pā.
Kua piki ake te maha o ngā mahi paninga mai i te 2–3 paparanga ki te 6–8 paparanga. Ko ngā hapa tauine-nanomata katoa—pērā i ngā kōhao iti, i te poke rānei—i roto i ngā paparanga tuatahi ka rere pēnei i te "pānga domino", ka pā kino ki ngā paparanga e whai ake nei, ā, ka hē te panera katoa. Ehara i te mea ko te whakahaere paparanga-ki-te-paparanga anake te mea e hiahiatia ana, engari ko te horoi katoa o te tukanga me te mahi tahi o ngā tawhā.
2. Te Whakawhānui Ake: Ngā Wero ā-Tino e Toru o te Karāhe Rohe-Nui
Hei waihanga i tētahi wheako rumaki i roto i te rūma whakahaere, kua whānui ake ngā rahi o te whakaaturanga mai i te 10-inihi ki te 27-inihi ngā panera whānui rawa atu, tae atu ki te karāhe porowhita piko. Heoi, ka puta he arai ā-tinana motuhake i ngā papa whānui:
1. Te Kore-Whakaōrite o te Taumahatanga Wera
I te wā e pupuhi ana te magnetron, ka wera te karāhe i te rohe mā te pupuhi matūriki kaha ki te 80–150 °C. Ka horapa ōrite te wera o ngā papa iti, engari ko te karāhe nui ake i te 1.5 m ka pāngia e ngā pikinga pāmahana mai i waenganui ki te taha. Ka tere te wera o te pokapū, ka pōturi te whakamatao, engari he rerekē te whanonga o ngā taha. Ka puta he piko 0.1–0.3 mm i tēnei rerekētanga, ka whakaiti i te ōritetanga o te kiriata, ā, i ngā wā kino ka pakaru te papa.
2. Pānga Tapa i roto i te Whakatakotoranga Kiriata
He aronga te rere o te matūriki e pupuhi ana, ā, ko te tere o te whakatakotoranga ki ngā taha he 10–15% te iti iho i te pokapū. Mō te panera 18-inihi, ka hua ake he angiangi o ngā kiriata taha, ka whakaiti i te kanapa, ka puta he whakapōturi tae. Ahakoa kei reira ngā whakaitiitinga pēnei i te taunga maha-katode me te arotautanga o te papa aukume, ka nui ake te uaua o ngā taputapu me te uaua o te tukanga.
3. Tautoko Papa me te Tika Whakawhiti
Me whakawhiti pūmau ngā papa karāhe nui ki roto i ngā rūma korehau, me te kore e rerekē te āhua, e rakuraku rānei. Mō te karāhe piko, me tatau tika te tohatoha o ngā pūwāhi tautoko—ki te iti rawa ngā pūwāhi ka heke; ki te maha rawa ka hangaia he "rohe atarangi." I taua wā, me whakahaere te tika o te whakawhiti papa i roto i te ±0.05 mm. Ahakoa ngā rerekētanga iti ka kino te karāhe, ka whakararu rānei i te taiao korehau, ka arahi ki te panga katoa.
3. Ngā Hiahia Kounga: Te Paepae Taurite Taumata-Nanometer
Hei wāhanga e kitea nuitia ana, ka whakatinanahia e ngā whakaaturanga kokopiti atamai ngā whakaritenga ōrite o mua mō te matotoru o te paninga.
I roto i ngā whakaaturanga motuka tuku iho, he pai te ōritetanga o te matotoru i roto i te ±5%. I roto i ngā kokopiti utu nui, kua whakawhāitihia tēnei manawanui ki te ±1.5%. Mēnā he rerekētanga, ka hua ake te kore ōritetanga o te kanapa, te panoni tae rānei, ka heke tika te wheako kaiwhakamahi.
4. Te Otinga Paninga Whatu Whānui a Zhenhua Vacuum
Hei whakatika i ēnei wero paninga, ka whakaratohia e te raina whakaputa paninga whatu whānui a Zhenhua Vacuum tētahi otinga whakauru:
Pūmautanga Hōputu-Nui
Ka taea te whakaputa papatipu i ngā panera karāhe 1600 mm × 630 mm, he mea whakarite ki te whakahaere pāmahana kua wehea me ngā papa whakawhiti tino tika. Mā tēnei ka ārai i te piko me te ngatata, ka whakakore i ngā aukati ā-tinana whānui.
Teitei o te Putanga
Ka tutuki i ngā huringa paninga tonu o te 50 hēkona mō ia papa, e tautokona ana e ngā pūnaha uta/tango aunoa. Ka whakarite i te pumau me te whai huatanga, ka taea ai e ngā OEM motuka te whakanui ake i te hanga kokopiti maha-whakaaturanga.
Te Āheinga Maha-Papa
Ka tautoko i te 14 ngā paparanga whatu me te kaha ki te tukurua. Ka taea te whakaoti i ngā puranga kiriata angiangi matatini i roto i te huringa tukanga kotahi, kia rite ai te hanganga puta noa i te papa katoa.
Whānuitanga Taupānga: Ngā whakaata tirohanga whakamuri atamai, ngā papa whakahaere pokapū motuka, me te karāhe uhi mata pa.
5. Whakamutunga
Ko te pikinga ake o te uaua o ngā paninga kokopiti atamai e whakaata ana i te taupatupatu i waenga i ngā whakaritenga mahi me ngā herenga tukanga. Mai i te whakaurunga paparanga maha, ki ngā here ā-tinana whānui, ki te whakahaere ōritetanga tauine nanometer, ka panaia e ia taahiraa ngā rohe o te hangarau kiriata angiangi.
Hei whakamutunga, me whai hononga hohonu puta noa i ngā rauemi, te hangarau tukanga, me te hoahoa taputapu kia puta ai ngā putanga hou. Ko te raina whakaputa paninga whatu whānui a Zhenhua Vacuum e whakaatu ana i tēnei whakaurunga—e aro ana ki ngā arai whakaputa papatipu me te neke i te paninga mai i te tukanga e whakahaerehia ana e te wheako ki te kaupapa e whakahaerehia ana e te pūtaiao.
I te mea ka rongonui haere ngā tono pēnei i te whakaurunga mata-maha me ngā whakaaturanga mārama, ka kaha ake te tono mō te paninga. I tēnei whakataetae, ko te kaha ki te tuku paninga whānui pumau, rite tonu ka whakatau ko wai ka toa i te whakataetae motuka o te whakatupuranga e whai ake nei.
—I whakaputaina tēnei tuhinga etaputapu paninga korehau kaihanga Zhenhua Vacuum
Wā tuku: Hepetema-18-2025