I roto i ngā pūnaha hanga hou, ko te tika o te hua, te whai huatanga o ngā taputapu, me te roa o te ratonga o ngā wāhanga e whakawhirinaki ana ki ngā whanaketanga o te hangarau mata. Hei tikanga nui mō te maimoatanga mata, kua whānuitia te whakamahi i te hangarau paninga mārō puta noa i ngā ahumahi pēnei i ngā taputapu tapahi, ngā pokepokea ai, ngā wāhanga matua o te motuka, me ngā hua 3C. He mea matua tēnei hei whakarei ake i te roa, te pono, me te mahi whānui.
Nama 1 Whakamāramatanga Hangarau me te Tūnga Mahi
Ko ngā "paninga mārō" e pā ana ki ngā kiriata angiangi mahi kua whakatakotoria ki runga i tētahi papa mā te tikanga Whakatakotoranga Vapor Tinana (PVD) me te tikanga Whakatakotoranga Vapor Matū (CVD). Ko te matotoru o ēnei paninga he 1 ki te 5 μm te nuinga, he pakeke moroiti teitei (>2000 HV), he iti te tauwehenga waku (<0.3), he tino pai te pumau wera, me te piri kaha ki te mata - he roa ake te roa o te mahi me ngā rohe mahi o ngā rauemi papa.
Engari ehara i te mea he "taupoki" mata anake, he mea hanga ngā paninga mārō ki ngā hanganga paparanga kua arotauhia, ngā rauemi kua tīpakohia, me ngā tikanga piri paninga papa kua whakaritea. Mā tēnei ka taea e ngā paninga te tu atu i ngā āhuatanga mahi uaua, me te whakarato i te ātete kakahu, te pumau wera, me te tiaki i te waikura.
Nama 2 Ngā Mātāpono Mahi o te Paninga Mārō
E rua ngā tikanga matua mō te whakatakoto i ngā paninga mārō: Te Whakatakotoranga Kohu Ā-tinana (PVD) me te Whakatakotoranga Kohu Matū (CVD).
1. Te Whakatakotoranga Kohu Tūturu (PVD)
He tukanga korehau te PVD, ka mimitia, ka pūhia, ka ionize rānei te rauemi paninga, ā, ka whakatakotoria he kiriata angiangi ki runga i te mata o te papa. Ko te tikanga o te tukanga ko:
Te mimiti, te pupuhi rānei o te rauemi
Te kawe i te āhua-kohu: Ka heke ngā ngota/ngota i roto i te taiao korehau
Te hanganga kiriata: Te whakapūpū me te tipu o te paninga matotoru i runga i te papa
Ko ngā tikanga PVD noa ko:
Te Whakamātao Wera
Te Pupuhitanga o te Magnetron
Paninga Āniora Āwhata
2. Te Whakatakotoranga Kohu Matū (CVD)
Ko te CVD he whakauru i ngā matū hau i ngā pāmahana teitei hei tauhohe matū ki te mata o te papa, ka hanga he paninga totoka. He pai tēnei tikanga mō ngā paninga pumau wera pērā i te TiC, TiN, me te SiC.
Ngā āhuatanga matua:
Te piri kaha ki te papa
Te kaha ki te hanga i ngā paninga matotoru
Ngā pāmahana tukatuka teitei e hiahia ana ki ngā papa ātete wera
Ngā Horopaki Taupānga Nama 3
I roto i ngā taiao ahumahi e whakamahi ana i ngā kawenga teitei me te mahi auau teitei, ka pāngia ngā wāhanga e te waku, te waikura, me te ru wera. Ka hangaia e ngā paninga mārō he paparanga tiaki pakari teitei, iti te waku, me te pumau i te wera e whakarei ake ana i te mahi me te roa o te wā o te wāhanga:
Ngā Utauta Tapahi: Ka tino whakapai ake ngā paninga pēnei i te TiAlN me te AlCrN i te ātete ki te wera me te mahi kakahu, ka roa ake te ora o te taputapu mā te 2 ki te 5 ngā wā, ka whakaiti i te whakawhiti taputapu, ka whakapai ake i te ōritetanga o te miihini.
Ngā Pokepoke me ngā Tā: Ka whakaitihia e ngā paninga TiCrAlN me AlCrN te kakahu, te whakapataritari, me te pakaru o te ngenge wera—ka whakapai ake i te roa o te mahi a te pokepoke, te kounga o ngā wāhanga, me te whakaiti i te wā kore mahi.
Ngā Wāhanga Aunoa: Mā te paninga DLC (Taimana-Rite Waro) i runga i ngā wāhanga pēnei i ngā tappet, ngā pine piston, me ngā pū hiki takirere ka whakaiti i te tere o te waku me te pakaru, ka roa ake te wā whakakapinga, ā, ka whakapai ake i te pai o te whakamahinga wahie.
3C Hikohiko Kaihoko: Mā te TiN, CrN, me ētahi atu paninga mārō whakapaipai i runga i ngā whare waea atamai me ngā anga kāmera ka ārai i te rakuraku me te waikura, me te pupuri tonu i te āhua whakarewa hei whakapai ake i te wheako kaiwhakamahi.
Tirohanga Whānui mō te Taupānga mā te Ahumahi
| Ahumahi | Ngā tono | Momo Paninga Noa | Ngā Whakapai Ake i te Mahi |
| Ngā Utauta Tapahi | Ngā taputapu hurihuri, ngā taputapu mira, ngā wiri, ngā taputapu | TiAlN, AlCrN, TiSiN | Kua pai ake te ātete ki te kakahu me te pakeketanga wera; 2–5 te roa o te ora o te taputapu |
| Ahumahi Whakairo | Te tā, te werohanga, me te tuhi i ngā pokepokea | TiCrAlN, AlCrN, CrN | Ārai i te mamae, te ātete ki te ngenge wera, te tika ake |
| Ngā Wāhanga Motuka | Ngā pine piston, ngā tappet, ngā aratohu takirere | DLC, CrN, Ta-C | He iti ake te waku me te kakahu, he pakari ake, he penapena wahie |
| Ahumahi Whakairo | Te tā, te werohanga, me te tuhi i ngā pokepokea | TiCrAlN, AlCrN, CrN | Ārai i te mamae, te ātete ki te ngenge wera, te tika ake |
| Ngā Wāhanga Motuka | Ngā pine piston, ngā tappet, ngā aratohu takirere | DLC, CrN, Ta-C | He iti ake te waku me te kakahu, he pakari ake, he penapena wahie |
| Ngā Utauta Hanga Matao | Ka mate te pane makariri, ka patu | AlSiN, AlCrN, CrN | Te pumau o te wera me te kaha o te mata kua whakarei ake |
Ngā Otinga Whakatakotoranga Paninga Mārō a Zhenhua Vacuum Nama 5: Te Whakahohe
Te Hanganga Mahi-Tiketike
Hei whakatutuki i te pikinga o te hiahia mō ngā paninga mahi-teitei puta noa i ngā ahumahi, ka whakarato a Zhenhua Vacuum i ngā otinga whakatakoto paninga mārō matatau e whakaatu ana i te pai o te whakatakoto me te hototahi ki ngā tukanga maha—he mea tino pai mō te hanga tika i roto i ngā pokepokea ai, ngā taputapu tapahi, me ngā wāhanga motuka.
Ngā Painga Matua:
He tātari plasma arc whai hua mō te whakaiti i ngā matūriki nui
Ngā paninga Ta-C mahi-teitei e whakakotahi ana i te whai huatanga me te pakari
He tino pakari (tae atu ki te 63 GPa), he iti te tauwehenga waku, ā, he tino ātete ki te waikura
Ngā Momo Paninga e Pā Ana:
Ka tautoko te pūnaha i te whakatakotoranga o ngā paninga pāmahana teitei, tino mārō tae atu ki te AlTiN, AlCrN, TiCrAlN, TiAlSiN, CrN, me ētahi atu—e whakamahia whānuitia ana i roto i ngā pokepokea ai, ngā taputapu tapahi, ngā poka, ngā wāhanga motuka, me ngā piston.
Ngā Taunakitanga mō ngā Taputapu:
(Kei te wātea ngā rahi pūnaha ritenga ina tonoa.)
1.MA0605 Mīhini Paninga PVD Paninga Kiriata Mārō
2.Mīhini Paninga Kiriata Mārō HDA1200
3.HDA1112 Mīhini paninga ātete-mau taputapu tapahi
–Nā te mīhini paninga korehaukaihanga Zhenhua Vacuum.
Wā tuku: Mei-26-2025