Raws li kev tsim khoom siab heev txuas ntxiv mus rau qhov me me, tsim qauv sib dua, thiab kev sib koom ua ke, cov khoom sib piv siab tau siv ntau dua hauv cov khoom siv semiconductor, khoom siv hluav taws xob, khoom siv precision, tsheb, kev kho mob, thiab kev siv kho qhov muag. Txawm li cas los xij, qhov geometry nyuaj ntawm cov grooves tob, cov qhov nqaim, cov qhov dig muag, thiab cov qauv nyias nyias ua rau muaj kev cov nyom loj rau kev txheej tshuab nqus tsev. Cov txheej txheem PVD ib txwm muaj uas ua tau zoo ntawm cov chaw tiaj tus lossis cov chaw contoured nruab nrab yuav raug kev txom nyem los ntawm kev npog tsis txaus, cov tuab tsis sib xws, cov teebmeem ntxoov ntxoo, thiab kev nplaum tsis zoo thaum siv rau cov qauv sib piv siab.
Vim li no, cov khoom siv txheej yuav tsum tsis yog tsim los ntawm qhov loj me ntawm chav lossis qhov nrawm ntawm kev tso cov khoom xwb, tab sis kuj nyob ib puag ncig kev sib cuam tshuam ntawm cov qauv geometry ntawm cov khoom, kev thauj mus los ntawm txoj kab pom, cov yam ntxwv ntawm plasma, kev txav ntawm cov substrate, kev teeb tsa lub hom phiaj, thiab kev siab ntawm cov txheej txheem. Lub tswv yim hloov kho cov khoom siv tsim nyog yuav tsum tsim kom muaj kev sib raug zoo ruaj khov ntawm qhov sib piv ntawm cov khoom thiab cov xwm txheej lub cev uas xav tau rau kev loj hlob ntawm cov zaj duab xis sib xws.
1. Qhov Kev Sib Tw Tseem Ceeb: Kev Tso Tawm Kab Pom Txwv
Qhov nyuaj tseem ceeb hauv kev txheej cov qauv siab-piv txwv yog nyob rau hauv lawv qhov kev nkag mus tsis tau geometric. Hauv kev siv magnetron sputtering thiab cathodic arc deposition, kev thauj mus los ntawm cov atoms sputtered lossis cov hlau ionized raug cuam tshuam los ntawm kev coj ntawm kev txav mus los ntawm cov khoom me me. Thaum qhov qhib ntawm lub qhov me dua li nws qhov tob, cov txheej txheem txheej tsis tuaj yeem ncav cuag hauv qab thiab phab ntsa.
Qhov no ua rau muaj qhov cuam tshuam zoo li duab ntxoov ntxoo: ntug sab saud thiab cov chaw uas raug tshav ntuj tau txais cov dej ntws ntau dua, thaum cov chaw tob dua muaj cov dej ntws tsawg dua. Yog li ntawd, cov zaj duab xis tuab maj mam txo qis raws qhov tob, thiab thaum muaj mob hnyav, hauv qab ntawm qhov chaw yuav tseem tsis tau pleev ib nrab lossis tag nrho.
Yog li ntawd, rau cov khoom sib xyaw ua ke uas muaj qhov sib piv siab, tsuas yog ua kom lub sijhawm tso cov khoom lossis lub zog tso tawm ntau dua tsis yog qhov kev daws teeb meem zoo. Kev ua kom cov dej ntws tawm ntau dua tuaj yeem txhim kho qhov nrawm ntawm cov xim pleev rau ntawm cov chaw uas raug tshav ntuj thaum tib lub sijhawm ua rau muaj kev pheej hmoo ntawm cov zaj duab xis tuab dhau, kub dhau, arc, lossis cov teeb meem ntawm cov xim pleev. Cov khoom siv yuav tsum txhim kho kev nkag mus rau cov xim pleev rau cov chaw uas nyob hauv qab.
2. Kev Hloov Kho Cov Khoom Siv Yuav Tsum Pib Los Ntawm Cov Qauv Geometry
Ua ntej txiav txim siab qhov kev teeb tsa txheej nqus tsev, qhov geometry ntawm qhov workpiece yuav tsum tau soj ntsuam kom meej, suav nrog qhov sib piv ntawm qhov, qhov loj me, qhov tob ntawm qhov, lub kaum sab xis ntawm phab ntsa, qhov qauv ntawm qhov dig muag, qhov kev taw qhia ntawm qhov chaw, thiab thaj chaw tseem ceeb ntawm txheej.
Qhov piv ntawm cov ces kaum yog qhov tseem ceeb heev vim nws cuam tshuam ncaj qha rau txoj kev thauj mus los ntawm cov hom kev tso dej. Thaum qhov sib piv ntawm qhov tob rau qhov dav qhib nce ntxiv, kev tso dej pom kev ib txwm ua rau nyuaj zuj zus.
Rau cov khoom uas muaj cov qhov tob lossis cov qhov nqaim, cov khoom siv yuav tsum muaj kev ywj pheej txaus rau kev taw qhia ntawm cov khoom siv thiab kev tig ntawm lub ntiaj teb. Lub thawv ntim khoom ntau-axis tuaj yeem hloov pauv lub kaum sab xis ntawm qhov chaw ntawm cov khoom siv thiab qhov chaw txheej, ua rau ntau qhov chaw nkag mus rau qhov chaw tso khoom zoo dua. Piv nrog rau lub cuab yeej ua haujlwm ruaj khov, kev tig ntawm lub ntiaj teb tuaj yeem txhim kho qhov sib npaug ntawm cov txheej txheem ncig thiab peb-seem.
Rau cov khoom sib xyaw ua ke, lub cuab yeej nws tus kheej yuav tsum tau kho raws li ib feem ntawm lub txheej txheem txheej. Kev tsim kho tsis zoo tuaj yeem thaiv cov dej ntws thiab tsim kom muaj duab ntxoov ntxoo ntxiv. Lub cuab yeej tsim zoo yuav tsum ua kom pom qhov chaw tseem ceeb tshaj plaws thaum tswj kev sib cuag hluav taws xob txhim khu kev qha, kev ruaj khov ntawm lub tshuab, thiab qhov sib nrug tsim nyog ntawm cov khoom sib ze.
3. Txhim Kho Cov Kauj Ruam Los Ntawm Kev Tswj Xyuas Plasma thiab Deposition-Flux
Rau cov qauv uas muaj qhov sib piv siab, kev npog kauj ruam yog ib qho ntawm cov cim qhia tseem ceeb uas siv los ntsuas kev ua haujlwm ntawm txheej. Kev ua tiav kev npog kauj ruam zoo xav tau ntau dua li qhov nrawm siab; nws xav tau kev tswj hwm zoo ntawm kev faib tawm lub kaum sab xis thiab lub zog ntawm cov tsiaj tuaj txog.
Cov txheej txheem Magnetron sputtering tuaj yeem hloov kho tau los ntawm kev ua kom zoo dua ntawm kev ua haujlwm siab, lub zog tso tawm, kev teeb tsa lub zog sib nqus, qhov deb ntawm lub hom phiaj mus rau substrate, thiab kev cuam tshuam ntawm substrate. Kev nce lub zog ua haujlwm tuaj yeem ua rau muaj kev sib tsoo ntawm cov pa roj thiab txhawb kev tawg ntawm cov atoms sputtered, ua rau cov dej ntws tsis muaj kev taw qhia. Qhov no tuaj yeem txhim kho qhov muaj feem ntawm kev pleev xim rau cov chaw recessed, txawm hais tias kev siab dhau heev tuaj yeem txo qhov ua tau zoo ntawm kev tso dej thiab cuam tshuam rau qhov ceev ntawm zaj duab xis thiab cov qauv ntawm qhov chaw.
Rau cov ntawv thov uas xav tau ionization siab dua, cov thev naus laus zis ionized PVD, xws li cathodic arc deposition lossis high-ionization magnetron sputtering, tuaj yeem tswj tau ntau dua ntawm ion flux thiab substrate bombardment. Los ntawm kev siv qhov tsis zoo substrate bias, cov hlau ions them zoo tuaj yeem ua kom nrawm dua mus rau qhov workpiece, txhim kho kev ua haujlwm ntawm qhov chaw thiab txhawb kev loj hlob ntawm zaj duab xis denser.
Txawm li cas los xij, qhov kev cuam tshuam ntawm cov substrate yuav tsum tsis txhob nce ntxiv yam tsis muaj kev txwv. Kev siv ion ntau dhau tuaj yeem ua rau resputtering, cua sov hauv zos, kev ntxhov siab seem, lossis kev puas tsuaj rau cov substrates rhiab heev. Yog li ntawd, qhov hluav taws xob zoo tshaj plaws yuav tsum tau txiav txim siab raws li cov khoom siv substrate, cov qauv geometry, cov khoom siv txheej, thiab cov khoom siv zaj duab xis xav tau.
4. Kev Ntsuas Qhov Sib Txawv ntawm Cov Khoom Siv thiab Qhov Ceev ntawm Cov Plasma yog Cov Kev Hloov Pauv Tseem Ceeb
Rau cov qauv peb-seem uas nyuaj, kev sib raug zoo ntawm cov plasma density thiab substrate bias ua qhov tseem ceeb heev.
Ib lub plasma ruaj khov thiab txaus ntom muab cov ion flux uas xav tau rau kev ua kom nto thiab zaj duab xis ntom. Tib lub sijhawm, substrate bias tswj lub zog uas cov ions bombard lub workpiece. Los ntawm kev sib koom tes zoo ntawm cov kev ntsuas no, cov txheej txheem txheej txheem tuaj yeem ua tiav kev sib txuas zoo dua, zaj duab xis ntom dua, thiab kev npog zoo dua ntawm cov chaw recessed.
Txawm li cas los xij, rau cov khoom sib xyaw ua ke uas muaj qhov sib piv siab, kev faib hluav taws xob hauv cov qhov tob yuav txawv ntawm qhov ntawm cov chaw uas raug nthuav tawm. Yog li ntawd, qhov muaj zog ntawm kev foob pob ion tiag tiag tuaj yeem sib txawv nrog qhov chaw. Cov khoom siv uas muaj peev xwm tswj tau qhov tseeb ntawm kev tsim cov plasma thiab cov kev ntsuas bias muab kev ywj pheej ntau dua rau kev them nyiaj rau cov teebmeem geometric no.
Hauv kev tsim khoom siv tiag tiag, cov yam ntxwv xws li bias voltage, bias current, pulse frequency, duty cycle, process pressure, gas flow, thiab discharge power yuav tsum tau ua kom zoo tshaj plaws raws li lub qhov rais txheej txheem sib xyaw ua ke es tsis yog kho nws tus kheej.
5. Kev Teeb tsa Ntau Qhov Chaw rau Cov Cheebtsam Peb-Seem Sib Txawv
Thaum cov qauv ntawm cov khoom sib xyaw ua ke nyuaj heev, ib qho chaw tso dej yuav tsis muab kev pab txaus. Hauv cov xwm txheej zoo li no, cov khoom siv tuaj yeem tsim nrog ntau lub hom phiaj sputtering, arc cathodes, lossis cov chaw evaporation nyob rau ntau qhov kev taw qhia sib txawv.
Lub hom phiaj ntawm kev teeb tsa ntau qhov chaw tsis yog tsuas yog ua kom cov dej tso tawm ntau ntxiv xwb. Qhov tseem ceeb tshaj, nws tso cai rau cov txheej txheej nkag mus rau hauv cov khoom ua haujlwm los ntawm ntau qhov kev taw qhia, txo qhov cuam tshuam ntawm cov duab ntxoov ntxoo geometric.
Ua ke nrog kev tig ntawm lub ntiaj teb, kev tso cov khoom ntau qhov chaw tuaj yeem tsim kom muaj ib puag ncig tso cov khoom peb-seem sib xws. Piv txwv li, ntau qhov chaw tuaj yeem muab faib rau ntau qhov kev taw qhia ntawm qhov chaw, thaum lub workpiece tig tas li thiab tig ib ncig ntawm lub chamber axis. Txoj hauv kev no yog qhov tsim nyog rau cov khoom uas muaj cov grooves tob, cov qauv stepped, cov duab tsis sib xws, thiab ntau qhov chaw txheej.
Rau cov khoom muaj nqis siab, qhov kev teeb tsa qhov chaw yuav tsum tau txiav txim siab los ntawm kev sim geometric thiab kev txheeb xyuas cov txheej txheem, es tsis txhob cia siab rau qhov chaw empirical xwb.
6. Kev Kho Mob Ua Ntej thiab Kev Ua Kom Nto Nto Tsis Tuaj Yeem Tsis quav ntsej
Txawm tias muaj qhov geometry deposition zoo tshaj plaws los xij, qhov zoo ntawm cov txheej txheem tseem tuaj yeem ua rau muaj kev puas tsuaj yog tias qhov chaw ntawm lub substrate tsis tau npaj txaus.
Cov qauv uas muaj qhov sib piv siab feem ntau muaj cov seem seem ntawm kev ua haujlwm, cov kua txiav, cov oxides, thiab cov kuab paug uas nyuaj rau tshem tawm ntawm cov qhov tob. Cov kuab paug no tuaj yeem ua rau muaj kev sib txuas tsis zoo, cov qhov me me, cov pa tawm, thiab cov teeb meem ntawm cov txheej txheem.
Yog li ntawd, cov txheej txheem ntxuav plasma nqus tsev tuaj yeem koom ua ke rau hauv cov khoom siv ua ntej tso dej. Nyob ntawm lub substrate thiab txheej txheem, Ar plasma ntxuav, ion etching, lossis lwm yam plasma-pab txhawb nqa cov txheej txheem ua kom muaj zog tuaj yeem siv los tshem tawm cov pa phem ntawm qhov chaw thiab ua kom muaj kev ua haujlwm ntawm qhov chaw.
Rau cov ntawv thov tseem ceeb, cov chav ntxuav thiab cov chaw tso dej kuj tseem tuaj yeem sib cais lossis teeb tsa ua ntau lub tshuab kom txo qis kev sib kis ntawm cov txheej txheem. Qhov no muaj txiaj ntsig zoo rau cov txheej txheem ua haujlwm siab uas qhov kev huv ntawm qhov sib txuas ncaj qha cuam tshuam rau kev nplaum thiab kev ntseeg siab mus sij hawm ntev.
7. Kev Tsim Lub Tshuab Nqus Tsev Txheeb Xyuas Kev Ruaj Ntseg ntawm Cov Txheej Txheem
Cov ntawv thov txheej txheem siab kuj ua rau muaj kev xav tau ntau dua rau lub tshuab nqus tsev. Lub zog ruaj khov, qhov ceev ntawm lub twj tso kua mis txaus, thiab kev tswj cov roj ntws zoo yog qhov tseem ceeb rau kev tswj hwm ib puag ncig plasma uas rov ua dua tau.
Ib lub tshuab nqus tsev zoo yuav tsum ua tiav qhov siab qis txaus ua ntej pib ua haujlwm, txo cov pa dej seem, oxygen, hydrocarbons, thiab lwm yam khoom tsis huv. Thaum lub sijhawm tso pa tawm, lub kaw lus roj nkag thiab lub twj tso kua mis yuav tsum tswj hwm qhov siab ua haujlwm ruaj khov txawm tias muaj kev hloov pauv ntawm cov roj ntws thiab cov plasma load.
Rau cov khoom siv tsim khoom, lub chamber yuav tsum txo cov qauv sab hauv tsis tsim nyog uas yuav cuam tshuam rau kev coj pa roj lossis ua rau muaj kuab paug. Kev tsim lub chamber kom zoo, kev teeb tsa twj tso kua mis, kev ntsuas lub tshuab nqus tsev, thiab kev siv tshuab kaw ua ke txiav txim siab qhov ruaj khov mus sij hawm ntev ntawm cov txheej txheem txheej.
8. Kev Xaiv Khoom Siv Yuav Tsum Ua Raws Li Kev Sib Tw Txheej Txheem
Rau cov khoom sib xyaw uas muaj qhov sib piv siab, tsis muaj lub tshuab nqus tsev uas zoo tshaj plaws rau txhua tus. Kev teeb tsa cov khoom siv yuav tsum tau txiav txim siab raws li cov khoom siv hauv qab, qhov loj ntawm cov khoom, qhov sib piv ntawm cov khoom, cov khoom siv txheej, qhov tuab ntawm zaj duab xis uas xav tau, kev ua haujlwm ntawm txheej, peev xwm tsim khoom, thiab qhov kub uas tso cai.
Rau cov ntawv thov kho kom zoo nkauj, yuav tsum muaj qhov tseem ceeb rau qhov sib xws ntawm cov xim, qhov zoo li ntawm qhov chaw, thiab kev npog peb-seem. Rau cov txheej txheem ua haujlwm xws li DLC, cov txheej txheem tiv thaiv kev hnav, cov yeeb yaj kiab conductive, cov teeb meem diffusion, lossis cov yeeb yaj kiab optical, yuav tsum tau them sai sai rau qhov ceev ntawm cov yeeb yaj kiab, lub zog lo, qhov nyuaj, cov khoom hluav taws xob, kev ua haujlwm ntawm qhov muag, thiab qhov tuab sib xws.
Yog li ntawd, cov txheej txheem hloov kho cov khoom siv feem ntau yuav tsum pib nrog kev ntsuam xyuas kev ua haujlwm ntawm cov khoom siv, ua raws li kev tsim khoom siv, kev teeb tsa qhov chaw tso dej, kev xaiv cov txheej txheem plasma, thiab kev txheeb xyuas cov qauv txheej txheem. Tsuas yog tom qab cov txiaj ntsig txheej txheem ua tau raws li cov ntsuas kev ua tau zoo uas xav tau yuav tsum txiav txim siab qhov kev teeb tsa khoom siv kawg.
9. Los ntawm "Txheej Txheej" mus rau "Txheej Txheej Sib Xws"
Qhov sib txawv loj tshaj plaws ntawm cov qauv ib txwm muajcov khoom thiab cov qauv siab-piv txwv yog tias muaj peev xwm tso zaj duab xis tsis sib npaug rau kev ua tiav cov txheej txheem tsim nyog.
Rau cov qauv yooj yim, cov khoom siv PVD ib txwm muaj peev xwm muab cov txiaj ntsig zoo. Txawm li cas los xij, rau cov qhov tob, cov qhov nqaim, cov qhov tsis pom kev, thiab cov qauv peb-seem nyuaj, kev hloov kho cov khoom siv yuav tsum hais txog tag nrho cov txheej txheem tso dej - los ntawm kev tsim lub tshuab nqus tsev thiab kev txhawb nqa plasma mus rau kev npaj qhov chaw, kev txav mus los ntawm cov khoom siv, kev tswj hwm kev ntxub ntxaug, kev tsim khoom siv, thiab kev ua kom zoo dua qub.
Lub hom phiaj tsis yog tsuas yog ua kom cov txheej txheej ncav cuag cov khoom xwb, tab sis kuj tsim kom muaj ib puag ncig uas tswj tau thiab rov ua dua uas muab kev npog txaus, tuab ntawm zaj duab xis sib npaug, kev nplaum ruaj khov, thiab kev ua tau zoo ib yam.
Vim li no, kev txheej txheej siab yuav tsum tau saib xyuas ua qhov teeb meem ntawm cov khoom siv thiab cov txheej txheem, tsis yog tsuas yog xaiv lub tshuab nqus tsev loj dua lossis nce lub zog tso tawm.
10. Zhenhua Lub Tshuab Nqus Tsev: Kev Hloov Kho Khoom Siv Raws Li Cov Kev Xav Tau ntawm Daim Ntawv Thov
Rau cov khoom sib xyaw ua ke uas muaj qhov sib piv siab, Zhenhua Vacuum tuaj yeem tsim cov khoom siv raws li qhov geometry thiab cov kev xav tau ntawm cov khoom ua haujlwm. Los ntawm kev tsim qauv sib koom ua ke ntawm cov qauv chav nqus tsev, cov chaw tso khoom, cov khoom siv hauv ntiaj teb, cov txheej txheem substrate bias, kev ntxuav plasma, kev tswj cov roj ntws, thiab kev tswj cov txheej txheem tsis siv neeg, lub kaw lus txheej txheem tuaj yeem hloov kho rau cov khoom peb-seem nyuaj thiab cov ntawv thov txheej txheem uas xav tau kev ua haujlwm ntau.
Cov khoom siv kawg yuav tsum tau lees paub los ntawm cov qauv tiag tiag thiab cov ntaub ntawv txheej txheem, suav nrog kev faib tawm ntawm cov zaj duab xis-tuab, kev npog kauj ruam, kev nplaum, qhov nyuaj, cov qauv ntawm qhov chaw, cov khoom siv kho qhov muag lossis hluav taws xob, thiab lub sijhawm tsim khoom. Txoj hauv kev siv daim ntawv thov no tso cai rau cov khoom siv txheej txheem txav mus los ntawm kev teeb tsa dav dav mus rau kev daws teeb meem tshwj xeeb rau cov txheej txheem uas muaj peev xwm txhawb nqa kev tsim khoom lag luam ruaj khov.
- Tsab xov xwm no tau luam tawm los ntawmChaw tsim khoom siv nqus tsev txheejZhenhua Nqus Tsev
Lub sijhawm tshaj tawm: Lub Yim Hli-01-2026