Eminyakeni yamuva nje, ubuchwepheshe bokupompa nge-vacuum sputtering bube yinqubo ebalulekile ezimbonini ezahlukene kusukela kuma-elekthronikhi kuya kuma-optics. Le ndlela eyinkimbinkimbi ivumela ukufakwa kwamafilimu amancane ezindaweni ezahlukene, okuthuthukisa izakhiwo zezinto ezibonakalayo kanye nezindawo ezisebenzayo. Ubuchwepheshe bokupompa nge-vacuum sputtering bunezinhlelo zokusebenza eziningi ezahlukene futhi bunamandla amakhulu okuguqula amasimu amaningana ezimboni. Kulesi sihloko sebhulogi, sihlola intuthuko eyenziwe kulo mkhakha futhi sixoxe ngamathuba ayo esikhathi esizayo.
Enye yezinzuzo ezibalulekile zobuchwepheshe bokupompa nge-vacuum yikhono layo lokuthuthukisa ukusebenza kwamadivayisi kagesi. Ngokufaka amafilimu amancane ezinto ezithile ezingxenyeni ze-elekthronikhi, abakhiqizi bangathuthukisa ukuhanjiswa kwawo, ukumelana kwawo kanye nokuqina kwawo. Lokhu kuzuzisa kakhulu ekukhiqizweni kwama-semiconductor, amaseli elanga kanye nezibonisi zamaphaneli ayisicaba lapho ukunemba okuphezulu kanye nokusebenza kubalulekile khona. Amasu okupompa nge-vacuum angabeka la mafilimu ngokunemba okuphezulu, okuqinisekisa ukusebenza kahle kwedivayisi.
Ngaphezu kwalokho, ukusputter nge-vacuum nakho kunezicelo ezibalulekile emkhakheni we-optics. Ngokusebenzisa lobu buchwepheshe ukumboza izingxenye ze-optical ngamafilimu amancane, abakhiqizi bangalawula ukubonakaliswa, ukumuncwa kanye nokudluliselwa kokukhanya. Lokhu kuvula indlela yokuthuthukiswa kwezingubo zokukhanya ezithuthukisiwe ezisetshenziswa kumanethiwekhi okuxhumana, amalensi ekhamera kanye nezingubo zokuvikela ukubonakaliswa kwezibuko zamehlo. Ukuguquguquka kobuchwepheshe bokusputter nge-vacuum kuvumela ukukhiqizwa kwalezi zingubo ngobukhulu obuqondile kanye nokwakheka kwezakhiwo zokukhanya eziphakeme.
Ubuchwepheshe bokuchitha i-vacuum bubone intuthuko ephawulekayo eminyakeni yamuva nje. Enye intuthuko enjalo kwaba ukuthuthukiswa kokukhipha i-magnetron, okusebenzisa amasimu kazibuthe ukwandisa ukusebenza kahle kanye nekhwalithi yenqubo yokufaka. Ngokusebenzisa ama-magnetron, abakhiqizi bangafinyelela amazinga aphezulu okuchitha i-sputter, banciphise ukungcola kwezinhlayiya futhi bathuthukise ukunamathela kwefilimu. Lokhu kusungula izinto kube negalelo elikhulu ekwamukelweni kabanzi kobuchwepheshe bokukhipha i-vacuum ezimbonini ezahlukahlukene.
Ngaphezu kwalokho, ukuhlanganiswa kwezinhlelo zokwenza izinto ngokuzenzakalelayo kanye nokulawula kushintshe inqubo yokuphalaza nge-vacuum. Izinhlelo zesimanje zokuphalaza nge-vacuum zihlonyiswe ngezinzwa ezithuthukisiwe, amamonitha kanye nezindlela zokuphendula ezivumela ukulawulwa kwenqubo yesikhathi sangempela kanye nokwenza ngcono. Lokhu akugcini nje ngokwandisa ukuthembeka kanye nokuphindaphindeka kwenqubo yokufaka, kodwa futhi kunciphisa ukuchithwa kwezinto kanye nesikhathi sokungasebenzi. Ukufika kobuhlakani bokwenziwa kanye nokufunda komshini kuye kwasheshisa le ntuthuko, okuvumela ukulungiswa kokubikezela kanye nokulawulwa kwenqubo okuhlakaniphile.
Uma sibheka phambili, amathuba obuchwepheshe bokupompa nge-vacuum akhanya kakhulu. Njengoba isidingo esikhulayo sama-elekthronikhi asebenza kahle kakhulu kanye nezinhlelo zokukhanya ezithuthukisiwe, kudingeka izinto ezintsha ezengeziwe kulo mkhakha. Abacwaningi okwamanje bahlola izinto ezintsha namasu okwandisa ububanzi bamasu okupompa nge-vacuum. Isibonelo, ukusetshenziswa kwamagesi asebenzayo ngesikhathi sokufakwa kungakhiqiza amafilimu amancane ama-compounds anezakhiwo ezihlukile, okuvula amathuba amasha emikhakheni efana ne-catalysis kanye nokugcinwa kwamandla.
Ekuphetheni, ubuchwepheshe bokuchitha i-vacuum sputtering bube yinto eshintsha kakhulu izimboni ezahlukene. Amandla ayo okufaka amafilimu amancane ngokunemba nokulawula ashintshe kakhulu ukukhiqizwa kwe-elekthronikhi kanye ne-optics. Ngentuthuko efana nokuchitha i-magnetron kanye nokuzenzakalela, ubuchwepheshe buye baba ngcono futhi buthembekile. Uma sibheka phambili, ikusasa lokukhipha i-vacuum sputtering linamandla amakhulu njengoba abacwaningi beqhubeka nokuhlola izinto ezintsha kanye nobuchwepheshe. Njengoba izimboni zilwela ukuthola izixazululo ezisebenza kahle nezisimeme, ubuchwepheshe bokukhipha i-vacuum sputtering buzodlala indima ebalulekile ekwakheni ikusasa.
——Lesi sihloko sikhishwe yi-umenzi womshini wokumboza nge-vacuumI-Guangdong Zhenhua
Isikhathi sokuthunyelwe: Agasti-25-2023