Nyob rau xyoo tas los no, thev naus laus zis nqus tsev sputtering tau dhau los ua ib qho txheej txheem tseem ceeb hauv ntau yam lag luam los ntawm cov khoom siv hluav taws xob mus rau optics. Cov txheej txheem zoo no tso cai rau kev tso cov zaj duab xis nyias nyias rau ntawm ntau yam substrates, txhim kho cov khoom siv thiab cov nto ua haujlwm. Thev naus laus zis nqus tsev sputtering muaj ntau yam kev siv thiab muaj peev xwm loj los hloov pauv ntau qhov chaw lag luam. Hauv tsab ntawv blog no, peb tshawb nrhiav kev nce qib hauv daim teb no thiab tham txog nws cov kev cia siab yav tom ntej.
Ib qho ntawm cov txiaj ntsig tseem ceeb ntawm cov thev naus laus zis nqus tsev yog nws lub peev xwm los txhim kho kev ua tau zoo ntawm cov khoom siv hluav taws xob. Los ntawm kev tso cov zaj duab xis nyias nyias ntawm cov ntaub ntawv tshwj xeeb rau ntawm cov khoom siv hluav taws xob, cov chaw tsim khoom tuaj yeem txhim kho lawv cov conductivity, resistivity thiab durability. Qhov no yog qhov tshwj xeeb tshaj yog rau kev tsim cov semiconductors, lub hnub ci hlwb thiab cov zaub vaj huam sib luag tiaj tus qhov twg qhov kev ua tau zoo thiab kev ua tau zoo yog qhov tseem ceeb. Cov txheej txheem nqus tsev tuaj yeem tso cov zaj duab xis no nrog kev ua tau zoo, kom ntseeg tau tias cov khoom siv ua tau zoo tshaj plaws.
Ntxiv mus, kev siv tshuab nqus tsev kuj muaj cov ntawv thov tseem ceeb hauv thaj chaw ntawm optics. Los ntawm kev siv cov thev naus laus zis no los txheej cov khoom siv kho qhov muag nrog cov yeeb yaj kiab nyias, cov chaw tsim khoom tuaj yeem tswj kev cuam tshuam, kev nqus thiab kev kis lub teeb. Qhov no ua rau txoj hauv kev rau kev tsim cov txheej txheem kho qhov muag siab heev uas siv hauv kev sib txuas lus hauv xov tooj, lub koob yees duab lens thiab cov txheej txheem tiv thaiv kev cuam tshuam rau cov tsom iav. Qhov ntau yam ntawm cov thev naus laus zis nqus tsev tso cai rau kev tsim cov txheej txheem no nrog cov tuab thiab cov khoom sib xyaw kom zoo rau cov khoom siv kho qhov muag zoo dua.
Cov thev naus laus zis nqus tsev tau pom qee qhov kev nce qib tseem ceeb hauv xyoo tas los no. Ib qho kev nce qib zoo li no yog kev tsim cov magnetron sputtering, uas siv cov teb magnetic los ua kom cov txheej txheem tso tawm zoo dua thiab zoo dua. Los ntawm kev siv cov magnetrons, cov chaw tsim khoom tuaj yeem ua tiav cov nqi sputtering siab dua, txo cov khoom me me thiab txhim kho kev nplaum zaj duab xis. Qhov kev tsim kho tshiab no tau pab txhawb rau kev siv cov thev naus laus zis nqus tsev hauv ntau yam lag luam.
Tsis tas li ntawd xwb, kev koom ua ke ntawm kev siv tshuab thiab kev tswj hwm tau hloov pauv txoj kev siv tshuab nqus tsev. Cov tshuab nqus tsev niaj hnub no muaj cov cuab yeej ntsuas siab heev, cov neeg saib xyuas thiab cov txheej txheem tawm tswv yim uas tso cai rau kev tswj hwm thiab kev ua kom zoo dua qub. Qhov no tsis yog tsuas yog ua rau muaj kev ntseeg siab thiab rov ua dua ntawm cov txheej txheem tso dej, tab sis kuj txo cov khoom pov tseg thiab lub sijhawm tsis ua haujlwm. Kev tshwm sim ntawm kev txawj ntse thiab kev kawm tshuab tau ua rau cov kev nce qib no sai dua, ua rau muaj kev saib xyuas thiab kev tswj hwm cov txheej txheem ntse.
Saib mus tom ntej, lub zeem muag rau thev naus laus zis nqus tsev sputtering yog ci ntsa iab. Nrog rau qhov kev thov nce ntxiv rau cov khoom siv hluav taws xob ua tau zoo thiab cov tshuab kho qhov muag siab heev, xav tau kev tsim kho tshiab ntxiv hauv daim teb no. Cov kws tshawb fawb tam sim no tab tom tshawb nrhiav cov ntaub ntawv tshiab thiab cov txheej txheem los nthuav dav cov txheej txheem nqus tsev sputtering. Piv txwv li, kev siv cov pa roj reactive thaum lub sijhawm tso tawm tuaj yeem tsim cov yeeb yaj kiab nyias nyias ntawm cov tshuaj uas muaj cov khoom tshwj xeeb, qhib cov cib fim tshiab hauv cov teb xws li catalysis thiab kev khaws cia lub zog.
Xaus lus, thev naus laus zis nqus tsev sputtering tau dhau los ua qhov kev hloov pauv hauv ntau yam lag luam. Nws lub peev xwm los tso cov zaj duab xis nyias nrog kev ua kom raug thiab kev tswj hwm tau hloov pauv kev tsim khoom siv hluav taws xob thiab optics. Nrog rau kev nce qib xws li magnetron sputtering thiab automation, thev naus laus zis tau ua haujlwm zoo dua thiab txhim khu kev qha. Saib rau pem hauv ntej, yav tom ntej ntawm nqus tsev sputtering muaj peev xwm zoo thaum cov kws tshawb fawb txuas ntxiv tshawb nrhiav cov ntaub ntawv tshiab thiab thev naus laus zis. Raws li kev lag luam siv zog nrhiav kev ua haujlwm siab thiab kev daws teeb meem ruaj khov, thev naus laus zis nqus tsev sputtering yeej paub tseeb tias yuav ua lub luag haujlwm tseem ceeb hauv kev tsim lub neej yav tom ntej.
—— Tsab xov xwm no yog tso tawm los ntawmlub tshuab nqus tsev txheej tshuab chaw tsim khoomGuangdong Zhenhua
Lub sijhawm tshaj tawm: Lub Yim Hli-25-2023