Kwishishini lokugquma nge-vacuum, ukuphuculwa kwezixhobo kudla ngokuqondwa njengokongeza ii-cathode ezingaphezulu, ukwandisa amandla, ukwandisa igumbi, okanye ukuphucula inqanaba lokuzenzekela. Olu phuculo lunokuphucula amandla emveliso. Nangona kunjalo, kwiiprojekthi zemveliso yokwenyani, impumelelo yokuphuculwa kwezixhobo idla ngokuxhomekeka kungekuphela kwiiparameter ezibonakalayo kwiphepha leenkcukacha, kodwa ziinkcukacha zobugcisa ezisisiseko ezingananzwa lula.
Kwi-PVD, CVD, PECVD, magnetron sputtering, evaporation coating, kunye neenkqubo ze-cathodic arc ion plating, ukuphuculwa akuyonto nje yokongeza izixhobo zekhompyutha. Kukwakhiwa ngokutsha kwenkqubo ye-vacuum, ulawulo lwe-plasma, ulwakhiwo lwefilimu, uzinzo lwenkqubo, kunye nokuhambelana kwemveliso yobuninzi. Ukuba kuphela iiparameter zokusebenza zomntu ngamnye eziphuculweyo ngelixa ukuhambelana kwenkqubo iyonke kungahoywa, ukuphuculwa kunokukhokelela ekutshintsheni kobukhulu befilimu, ukunamathela okubi, ukwanda kweziphene zesuntswana, kunye nemveliso engazinzile.
1. Ukulinganisa iNkqubo yeVacuum, kungekuphela nje ngesantya esiphezulu sokumpompa
Xa kuphuculwa izixhobo zokugquma nge-vacuum, abavelisi abaninzi baqala ngokugxila kwinkqubo yokumpompa, njengokongeza iipompo ze-turbomolecular, iipompo zeRoots, okanye iipompo ezomileyo ukuze kwandiswe isantya sokumpompa. Nangona kunjalo, isitshixo senkqubo yokumpompa nge-vacuum asikokuba ikhawuleza kangakanani ukupompa, kodwa kunye ne-curve yokumpompa, i-vacuum yokugqibela, uzinzo loxinzelelo lokusebenza, kunye nokusasazwa kokuhamba kwegesi ngaphakathi kwigumbi.
Kwinkqubo zokutshiza ngemagnetron kunye neenkqubo zokutshiza ezisabelayo, uxinzelelo oluzinzileyo lokusebenza luchaphazela ngokuthe ngqo uxinano lweplasma, izinga lokutshiza, kunye nokwakheka kwefilimu. Kwiinkqubo zokugquma zePECVD okanye ezisabelayo, ixesha lokuhlala kwegesi, ukusasazwa kwegesi esabelayo, kunye nokusebenza kakuhle kokukhupha umoya, zonke ezi zinto zichaphazela uxinano lwefilimu, isalathisi sokuchasana, uxinzelelo lwangaphakathi, kunye nokunamathela.
Ukuba umthamo wegumbi unyusiwe ngexesha lokuphuculwa ngelixa uyilo lokungena kwegesi, indawo yokumpompa, kunye nesakhiwo se-baffle zingalungiswanga ngokufanelekileyo, iingxaki ezinje ngoxinzelelo lwendawo olungalinganiyo, ukusetyenziswa kwegesi engaguqukiyo, ukutshintsha kombala, kunye nokuphambuka kobukhulu befilimu kunokwenzeka. Ke ngoko, ukuphuculwa kwenkqubo ye-vacuum kufuneka kusekelwe kuyilo lwentsimi yokuhamba kwegumbi iyonke, ukusasazwa kwegesi, kunye neemfuno zefestile yenkqubo, endaweni yokulandela nje isantya esiphezulu sokumpompa.
2. Uzinzo lwePlasma lusisiseko esiphambili soMgangatho wokuGcina
Kwizixhobo zokugquma zePVD, amandla ekujoliswe kuwo, umbane we-arc source, umbane we-bias, kunye noqwalaselo lomthombo we-ion zihlala zizinto ezijongwayo xa kuphuculwa izixhobo. Nangona kunjalo, into egqiba ngokwenene umgangatho wokugquma kukuba ingaba iplasma inokuhlala izinzile na ngexesha lemveliso yexesha elide.
Xa sijonga ukutshiza kwemagnetron njengomzekelo, ukonyusa amandla kunokuphucula izinga lokufakwa. Nangona kunjalo, ukuba uyilo lwe-magnetic field, umgama ophakathi kwe-target-to-substrate, inkqubo yokupholisa, kunye nokuhambelana kombane akwanelanga, oku kunokubangela ukukhukuliseka kwe-target okungalinganiyo, ukukhutshwa okungaqhelekanga, uxinzelelo lwefilimu oluphezulu, i-arcing, kunye neziphene ze-particle.
Kwiinkqubo ze-cathodic arc ion plating, ulawulo lwe-arc spot motion, ukuhluzwa kwe-macroparticle, izinga le-ionization, kunye nokuhambelana kwe-substrate bias zimisela ngokuthe ngqo uxinano lwe-coating, uburhabaxa bomphezulu, kunye nokumelana nokuguguleka.
Ngoko ke, ukuphuculwa kwezixhobo akufuneki kugxile kuphela kumandla aphezulu. Kufuneka kuhlolwe uzinzo lokukhupha, ukufana kokusasazwa kweplasma, izinga lokusetyenziswa kwethagethi, kunye nokuphindaphinda kwenkqubo ngexesha lokuveliswa kwebhetshi.
3. Izixhobo kunye neeNkqubo zokuHamba zeWorkpiece zichonga ngokuthe ngqo ukuLunga kweFilimu
Inkqubo yokufakelwa yenye yezona ndawo zingathathelwa ngqalelo kakhulu zokuphucula izixhobo zokufaka ipeyinti. Abavelisi abaninzi banikela ingqalelo engakumbi kwigumbi, kwiithagethi, nakwizinto zombane, ngelixa bengayinaki impembelelo yeendlela zokulayisha, iindlela zokujikeleza, izixhobo zeplanethi, kunye noyilo lokukhusela kwimo efanayo yefilimu.
Kwimveliso yokwenyani, ukufana kobukhulu befilimu akuxhomekanga kuphela kumthombo wokubeka izinto, kodwa nakubudlelwane bendawo phakathi kwesixhobo somsebenzi kunye nomthombo wokugquma. Kwiindawo zangaphakathi zeemoto, iglasi ebonakalayo, ii-substrates zeseramikhi, ii-micro drills, izixhobo zokusika, iindawo zokuhombisa zeplastiki, kunye nezinye iimveliso, i-geometry yesixhobo somsebenzi, ubungakanani, i-angle yokubamba, kunye nendlela yokujikeleza iyahluka kakhulu.
Ukuba uyilo lwesixhobo alunangqiqo, kwanenkqubo yokugquma enobume obuphezulu inokubangela ubukhulu obukhulu befilimu yendawo, ukugquma okungonelanga komphetho, iziphumo ezicacileyo zomthunzi, okanye ukungaguquguquki kakuhle kwebhetshi ukuya kwibhetshi.
Ingakumbi kwi-optical coating enkulu, i-compound component coating eyinkimbinkimbi enemilinganiselo emithathu, kunye ne-micro-precision workpiece coating, uyilo lwe-fixture alusasebenzi nje kuphela. Luye lwaba yinxalenye ebalulekileyo yenkqubo yenkqubo. Ngexesha lokuphuculwa kwezixhobo, inkqubo ye-fixture kufuneka iphuhliswe kunye nenkqubo ye-coating, endaweni yokuba ilungiswe emva kokuba izixhobo zigqityiwe.
4. Ulawulo lobushushu kunye nolawulo lomthwalo wobushushu luchaphazela ukunamathela kunye noxinzelelo lwefilimu
Kwiinkqubo zokutshiza ngamandla aphezulu, ukufuma kwe-electron beam, i-CVD, kunye ne-PECVD, ulawulo lomthwalo wobushushu yinto ebalulekileyo echaphazela ukusebenza kobushushu. Iziphene ezininzi zobushushu aziveli kumthombo wokubeka ngokwawo, kodwa zivela ekutshintsheni kobushushu be-substrate, ukusasazwa kwentsimi yobushushu obungalinganiyo, okanye ukusebenza kakuhle kokupholisa.
Ubushushu be-substrate buchaphazela ngokuthe ngqo ubukhristali befilimu, uxinzelelo lwangaphakathi, ukunamathela, kunye noxinano. Kwizinto ezibuthathaka kubushushu ezifana neenxalenye zeplastiki, iifilimu eziguquguqukayo, kunye nezinto zangaphakathi zeemoto, ubushushu obugqithisileyo bunokubangela ukuguquka, ukuphuma kwegesi, ukuqhekeka kwefilimu, okanye ukunamathela okubi. Kwizinto eziqinileyo, iifilimu ze-optical, kunye neefilimu ezisebenzayo, ubushushu obungonelanga bunokuchaphazela ulwakhiwo lwefilimu kunye nokuzinza kokusebenza kwexesha elide.
Ke ngoko, ngexesha lokuphucula izixhobo, kuyimfuneko ukuvavanya isekethe yamanzi okupholisa, ukusebenza kakuhle kokupholisa ekujoliswe kuko, ibhalansi yobushushu begumbi, inkqubo yokufudumeza ye-substrate, kunye nokuchaneka kokujonga ubushushu. Kuphela xa kufakwe intsimi yobushushu ezinzileyo apho ukusebenza kombala kungaphinda kuphindwe rhoqo.
5. Iinkqubo zoLawulo lweNkqubo zingaphezulu nje kokuZenzekelayo
Ukwenziwa kwezinto ngokuzenzekelayo kuyimfuneko eqhelekileyo ekuphuculweni kwezixhobo. Nangona kunjalo, ukwenza izinto ngokuzenzekelayo okubaluleke ngokwenene akuthathi nje indawo yokusebenza ngesandla. Kufuneka kuvumele ulawulo lwenkqubo oluchanekileyo, ukurekhoda idatha, kunye nokulandeleka kwenkqubo.
Kwimveliso yokugquma ephezulu, umgangatho wefilimu uhlala umiselwa ziiparameters ezibalulekileyo ezininzi, kubandakanya inqanaba le-vacuum, izinga lokuhamba kwegesi, amandla okutshiza, umbane womthombo we-arc, umbane we-bias, i-voltage waveform, ubushushu, ixesha lokufaka, isantya sokujikeleza kwe-workpiece, kunye nedatha yokujonga ubukhulu befilimu. Ukuguquguquka kwenye yezi parameters kunokuchaphazela ukusebenza kwemveliso yokugqibela.
Ngoko ke, xa kuphuculwa inkqubo yolawulo, kufuneka kuqwalaselwe ulawulo lokuhamba kwegesi ye-MFC, ulawulo loxinzelelo oluvaliweyo, ukujonga ubukhulu befilimu, ulawulo lweresiphi, imisebenzi engaqhelekanga ye-alamu, ukufunyanwa kwedatha, kunye nokuhlanganiswa kwenkqubo ye-MES. Ingakumbi kwimigca yemveliso yokugquma eqhubekayo kunye neenkqubo zemveliso enkulu, ukulandeleka kwedatha kuye kwaba sisiseko esibalulekileyo solawulo lomgangatho.
6. Ukuqinisekiswa kwefestile yenkqubo kubaluleke ngakumbi kuneeparamitha zezixhobo
Eyona njongo yokuphucula izixhobo kukuvelisa ngobuninzi, kungekuphela nje ukuqinisekiswa kwesampulu. Iiprojekthi ezininzi zokuphucula zinokuvelisa iingubo ezifanelekileyo ngexesha lovavanyo, kodwa emva kokungena kwimveliso yebhetshi, iingxaki ezinje ngokuguguleka kobukhulu befilimu, ukutshintsha kombala, ukuguquguquka kokunamathela, okanye ukulahleka kwemveliso kunokwenzeka. Isizathu esiyintloko kukungabikho kokuqinisekiswa kwefestile yenkqubo epheleleyo.
Ukuphuculwa kwezixhobo ezivuthiweyo kufuneka kuquke uvavanyo lokuhambelana kwezinto, uvavanyo lobomi bonke ekujoliswe kubo, ukuqinisekiswa komjikelo wokucoca igumbi, uvavanyo lokwahluka komthamo wokulayisha, uvavanyo oluqhubekayo lozinzo lokusebenza, uvavanyo lokusebenza kwe-coating, kunye nokuqinisekiswa kokuphindaphinda kwebhetshi ukuya kwibhetshi. Kuphela xa izixhobo zinokuhlala zizinzile phantsi kweebhetshi ezahlukeneyo, iimeko ezahlukeneyo zokulayisha, kunye nokusebenza kwexesha elide apho ukuphuculwa kuya kuhlangabezana neemfuno zemveliso enkulu.
Isiphelo
Ukuphuculwa kwezixhobo zokugquma nge-vacuum akupheleli nje ekulandeleni uhlengahlengiso oluphezulu. Yinkqubo yokwenza ngcono ecwangcisiweyo egxile ekusebenzeni kokugquma, uzinzo lwenkqubo, kunye nokuveliswa kwemveliso ngobuninzi. Uyilo lwenkqubo yokugquma nge-vacuum, uzinzo lwe-plasma, intshukumo yesixhobo, ulawulo lobushushu, ulawulo oluzenzekelayo, kunye nokuqinisekiswa kwefestile yenkqubo zonke zizinto ezibalulekileyo zobugcisa ezimisela impumelelo yophuculo.
Kubavelisi, ukuphuculwa kwezixhobo zokugquma ezixabisekileyo akufuneki kwandise kuphela amandla emveliso, kodwa kukwaphucule ukuhambelana kwefilimu, kunciphise amazinga eziphene, kufinyeze imijikelo yokugunyazisa, kwaye kuphucule ukulawulwa kwenkqubo ixesha elide. Kuphela ngokufaka ezi nkcukacha zobugcisa ezisoloko zinganakwa kwisicwangciso sokuphucula apho ukuphuculwa kwezixhobo kunokuguqulwa kube kukukhuphisana okunamandla kwemveliso kunye nokusebenza kakuhle kokuvelisa.
-Eli nqaku lipapashwe nguumenzi wezixhobo zokugquma nge-vacuumI-Zhenhua Vacuum
Ixesha leposi: Epreli-09-2026