Hauv kev lag luam txheej tshuab nqus tsev, kev txhim kho cov khoom siv feem ntau nkag siab tias yog ntxiv ntau cov cathodes, nce lub peev xwm fais fab, nthuav lub chamber, lossis txhim kho qib ntawm kev ua haujlwm tsis siv neeg. Cov kev txhim kho no yeej tuaj yeem txhim kho lub peev xwm tsim khoom. Txawm li cas los xij, hauv cov haujlwm tsim khoom tiag tiag, kev vam meej ntawm kev txhim kho cov khoom siv feem ntau tsis yog txiav txim siab los ntawm cov kev ntsuas pom tseeb tshaj plaws ntawm daim ntawv qhia tshwj xeeb, tab sis los ntawm cov ntsiab lus kev siv tshuab uas yooj yim tsis quav ntsej.
Rau PVD, CVD, PECVD, magnetron sputtering, evaporation coating, thiab cathodic arc ion plating systems, kev txhim kho tsis yog tsuas yog ib qho teeb meem ntawm kev ntxiv cov khoom siv kho vajtse xwb. Nws yog kev tsim kho dua tshiab ntawm lub tshuab nqus tsev, kev tswj plasma, cov qauv zaj duab xis, kev ruaj khov ntawm cov txheej txheem, thiab kev sib xws ntawm cov khoom loj. Yog tias tsuas yog cov kev ua tau zoo ntawm tus kheej tau txhim kho thaum kev sib phim tag nrho cov txheej txheem raug tsis quav ntsej, kev txhim kho yuav ua rau cov zaj duab xis tuab hloov pauv, kev sib txuas tsis zoo, cov khoom me me ntxiv, thiab cov txiaj ntsig tsis ruaj khov.
1. Kev Sib Txuas Lub Tshuab Nqus Tsev, Tsis Yog Tsuas Yog Kev Ceev Pumping Siab Dua Xwb
Thaum txhim kho cov khoom siv nqus tsev, ntau lub tuam txhab tsim khoom feem ntau tsom mus rau lub tshuab nqus tsev ua ntej, xws li ntxiv cov twj turbomolecular, Roots twj, lossis cov twj qhuav kom nce qhov ceev ntawm kev nqus tsev. Txawm li cas los xij, qhov tseem ceeb rau lub tshuab nqus tsev tsis yog tsuas yog nws tuaj yeem nqus tsev sai npaum li cas xwb, tab sis kuj yog qhov nkhaus ntawm kev nqus tsev, qhov kawg ntawm lub tshuab nqus tsev, kev ruaj khov ntawm lub zog ua haujlwm, thiab kev faib cov roj ntws hauv lub chamber.
Rau cov txheej txheem magnetron sputtering thiab reactive sputtering, lub zog ua haujlwm ruaj khov ncaj qha cuam tshuam rau qhov ceev ntawm plasma, qhov nrawm ntawm sputtering, thiab cov yeeb yaj kiab. Rau PECVD lossis cov txheej txheem reactive coating, lub sijhawm nyob ntawm cov roj, kev faib cov roj reactive, thiab kev ua haujlwm ntawm cov pa tawm txhua yam cuam tshuam rau qhov ceev ntawm cov yeeb yaj kiab, qhov ntsuas refractive, kev ntxhov siab sab hauv, thiab kev nplaum.
Yog tias qhov ntim ntawm lub chamber nce ntxiv thaum lub sijhawm txhim kho thaum lub sijhawm tsim cov roj nkag, qhov chaw ntawm lub twj tso kua mis, thiab cov qauv baffle tsis tau ua kom zoo, cov teeb meem xws li qhov siab hauv zos tsis sib xws, kev siv roj tsis sib xws, kev hloov pauv xim, thiab qhov tuab ntawm zaj duab xis yuav tshwm sim. Yog li ntawd, kev txhim kho lub tshuab nqus tsev yuav tsum ua raws li kev tsim cov dej ntws hauv chav, kev faib roj, thiab cov kev xav tau ntawm cov txheej txheem, es tsis txhob tsuas yog nrhiav kev nrawm dua.
2. Kev Ruaj Ntseg ntawm Plasma yog Lub Hauv Paus Tseem Ceeb ntawm Kev Zoo ntawm Txheej
Hauv cov khoom siv PVD txheej, lub zog ntawm lub hom phiaj, qhov hluav taws xob ntawm qhov chaw arc, lub zog ntawm qhov tsis sib xws, thiab kev teeb tsa qhov chaw ion feem ntau yog qhov tseem ceeb ntawm kev hloov kho cov khoom siv. Txawm li cas los xij, qhov tseeb txiav txim siab qhov zoo ntawm txheej yog seb cov plasma puas tuaj yeem ruaj khov thaum lub sijhawm tsim khoom ntev.
Piv txwv li, siv magnetron sputtering los ua piv txwv, kev nce zog tuaj yeem ua rau kom cov khoom tso tawm sai dua. Txawm li cas los xij, yog tias qhov tsim ntawm lub zog sib nqus, qhov deb ntawm lub hom phiaj mus rau lub substrate, lub kaw lus txias, thiab kev sib phim ntawm lub zog tsis txaus, nws yuav ua rau lub hom phiaj puas tsuaj tsis sib xws, kev tso tawm tsis zoo, kev ntxhov siab ntawm zaj duab xis ntau ntxiv, kev sib tsoo, thiab cov khoom me me tsis zoo.
Rau cov txheej txheem cathodic arc ion plating, kev tswj hwm qhov chaw arc, kev lim dej macroparticle, tus nqi ionization, thiab kev sib phim ntawm cov khoom siv ncaj qha txiav txim siab qhov ceev ntawm cov txheej txheem, qhov roughness ntawm qhov chaw, thiab kev hnav tsis kam.
Yog li ntawd, kev txhim kho cov khoom siv yuav tsum tsis txhob tsuas yog tsom mus rau lub zog siab tshaj plaws xwb. Nws kuj tseem yuav tsum soj ntsuam qhov ruaj khov ntawm kev tso tawm, kev faib tawm plasma sib xws, kev siv lub hom phiaj, thiab kev rov ua dua ntawm cov txheej txheem thaum lub sijhawm tsim khoom ntau.
3. Cov Khoom Siv thiab Cov Txheej Txheem Ua Haujlwm Ncaj Qha Txheeb Xyuas Qhov Sib Npaug Ntawm Zaj Duab Xis
Lub tshuab teeb tsa yog ib qho ntawm cov khoom siv kho kom zoo nkauj uas feem ntau tsis tau saib xyuas ntau. Ntau lub tuam txhab tsim khoom them sai sai rau lub chamber, lub hom phiaj, thiab cov khoom siv fais fab, thaum tsis quav ntsej txog qhov cuam tshuam ntawm cov txheej txheem thauj khoom, cov txheej txheem tig, cov khoom siv planetary, thiab kev tsim cov ntaub thaiv rau kev sib npaug ntawm cov zaj duab xis.
Hauv kev tsim khoom tiag tiag, qhov tuab ntawm zaj duab xis tsis yog nyob ntawm qhov chaw tso cov khoom xwb, tab sis kuj nyob ntawm qhov sib raug zoo ntawm qhov chaw ua haujlwm thiab qhov chaw txheej. Rau cov khoom siv sab hauv tsheb, iav kho qhov muag, cov khoom siv ceramic, cov tshuab laum me me, cov cuab yeej txiav, cov khoom siv kho kom zoo nkauj yas, thiab lwm yam khoom, cov duab ntawm cov khoom siv, qhov loj me, lub kaum sab xis clamping, thiab txoj kev tig sib txawv heev.
Yog tias qhov tsim ntawm lub teeb tsis tsim nyog, txawm tias lub kaw lus txheej txheem siab kuj tseem yuav tsim cov zaj duab xis tuab dhau, tsis txaus npog ntug, pom tseeb cov teebmeem ntxoov ntxoo, lossis tsis sib xws ntawm ib pawg mus rau ib pawg.
Tshwj xeeb tshaj yog nyob rau hauv thaj chaw loj optical coating, complex peb-dimensional Cheebtsam coating, thiab micro-precision workpiece coating, kev tsim fixture tsis yog tsuas yog ib qho kev pabcuam qauv. Nws tau dhau los ua ib feem tseem ceeb ntawm cov txheej txheem txheej txheem. Thaum lub sijhawm hloov kho cov khoom siv, lub fixture system yuav tsum tau tsim ua ke nrog cov txheej txheem txheej txheem, es tsis txhob hloov kho tom qab cov khoom siv tiav.
4. Kev Tswj Kub thiab Kev Tswj Xyuas Thermal Load Cuam Tshuam rau Kev Sib Txuas thiab Kev Nyuaj Siab ntawm Zaj Duab Xis
Hauv cov txheej txheem high-power sputtering, electron beam evaporation, CVD, thiab PECVD, kev tswj hwm thermal load yog ib qho tseem ceeb uas cuam tshuam rau kev ua haujlwm ntawm cov txheej. Ntau qhov tsis zoo ntawm cov txheej tsis yog los ntawm qhov chaw tso cov khoom nws tus kheej, tab sis los ntawm kev hloov pauv ntawm qhov kub ntawm cov substrate, kev faib tawm ntawm cov cua sov tsis sib xws, lossis kev ua haujlwm txias tsis txaus.
Qhov kub ntawm cov khoom siv ncaj qha cuam tshuam rau qhov crystallinity ntawm zaj duab xis, kev ntxhov siab sab hauv, kev nplaum, thiab qhov ceev. Rau cov khoom siv uas rhiab heev rau cua sov xws li cov khoom yas, cov zaj duab xis yooj ywm, thiab cov khoom siv sab hauv tsheb, qhov kub ntau dhau yuav ua rau deformation, tawm pa tawm, zaj duab xis tawg, lossis tsis nplaum zoo. Rau cov txheej tawv, cov zaj duab xis kho qhov muag, thiab cov zaj duab xis ua haujlwm tau zoo, qhov kub tsis txaus yuav cuam tshuam rau cov qauv zaj duab xis thiab kev ruaj khov ntawm kev ua haujlwm mus sij hawm ntev.
Yog li ntawd, thaum lub sijhawm hloov kho cov khoom siv, nws yog qhov tsim nyog los soj ntsuam lub voj voog dej txias, lub hom phiaj ua kom txias zoo, qhov sib npaug ntawm lub chamber thermal, lub substrate cua sov system, thiab kev soj ntsuam qhov tseeb ntawm qhov kub. Tsuas yog nrog lub tshav kub ruaj khov thiaj li ua tau zoo ntawm cov txheej txheem.
5. Cov Txheej Txheem Tswj Xyuas Txheej Txheem Ntau Tshaj Li Kev Ua Haujlwm Tsis Siv Neeg
Kev siv tshuab ua haujlwm yog ib qho uas yuav tsum tau ua hauv kev txhim kho cov khoom siv. Txawm li cas los xij, kev siv tshuab ua haujlwm muaj txiaj ntsig tiag tiag tsis yog hloov kev ua haujlwm tes xwb. Nws yuav tsum ua kom muaj kev tswj hwm cov txheej txheem kom raug, sau cov ntaub ntawv, thiab taug qab cov txheej txheem.
Hauv kev tsim cov txheej txheem siab heev, qhov zoo ntawm zaj duab xis feem ntau yog txiav txim siab los ntawm ntau yam tseem ceeb, suav nrog qib nqus tsev, roj ntws npaum li cas, lub zog sputtering, arc qhov tam sim no, bias voltage, voltage waveform, kub, lub sijhawm tso tawm, qhov ceev ntawm kev tig ntawm workpiece, thiab cov ntaub ntawv saib xyuas tuab ntawm zaj duab xis. Kev hloov pauv ntawm ib qho ntawm cov kev ntsuas no yuav cuam tshuam rau kev ua haujlwm ntawm cov khoom kawg.
Yog li ntawd, thaum txhim kho lub kaw lus tswj hwm, yuav tsum tau them sai sai rau MFC roj ntws tswj, kaw-lub voj voog siab tswj, zaj duab xis tuab saib xyuas, kev tswj hwm daim ntawv qhia zaub mov, kev ua haujlwm ceeb toom tsis zoo, kev tau txais cov ntaub ntawv, thiab MES system kev koom ua ke. Tshwj xeeb tshaj yog nyob rau hauv cov kab ntau lawm txheej txheem txuas ntxiv thiab cov kab ntau lawm loj, kev taug qab cov ntaub ntawv tau dhau los ua lub hauv paus tseem ceeb rau kev tswj hwm zoo.
6. Kev Txheeb Xyuas Qhov Rai Txheej Txheem Tseem Ceeb Dua Li Cov Qauv Khoom Siv
Lub hom phiaj kawg ntawm kev txhim kho cov khoom siv yog kev tsim khoom ntau, tsis yog tsuas yog kev lees paub cov qauv xwb. Ntau qhov project txhim kho tuaj yeem tsim cov txheej txheem zoo tagnrho thaum lub sijhawm sim, tab sis tom qab nkag mus rau hauv kev tsim khoom ntau, teeb meem xws li kev hloov pauv ntawm cov zaj duab xis tuab, kev hloov pauv xim, kev hloov pauv ntawm kev nplaum, lossis kev poob qis ntawm cov txiaj ntsig yuav tshwm sim. Qhov laj thawj tseem ceeb yog tsis muaj kev lees paub tag nrho ntawm lub qhov rais txheej txheem.
Kev txhim kho cov khoom siv kom zoo yuav tsum muaj kev ntsuam xyuas qhov sib xws ntawm cov khoom siv, kev ntsuam xyuas lub neej ntev, kev txheeb xyuas lub voj voog ntxuav chav, kev sim qhov sib txawv ntawm qhov muaj peev xwm thauj khoom, kev ntsuam xyuas kev ruaj khov ntawm kev ua haujlwm tas mus li, kev sim kev ua haujlwm ntawm cov txheej txheem, thiab kev txheeb xyuas qhov rov ua dua ntawm ntau pawg. Tsuas yog thaum cov khoom siv tuaj yeem ruaj khov nyob rau hauv ntau pawg, ntau yam kev thauj khoom, thiab kev ua haujlwm ntev tuaj yeem ua tau raws li qhov xav tau ntawm kev tsim khoom ntau.
Xaus lus
Kev txhim kho cov khoom siv nqus tsev tsis yog hais txog kev ua raws li cov qauv siab dua xwb. Nws yog ib qho txheej txheem kev txhim kho uas tsom mus rau kev ua haujlwm ntawm cov txheej txheem, kev ruaj khov ntawm cov txheej txheem, thiab cov txiaj ntsig ntawm kev tsim khoom ntau. Kev tsim lub tshuab nqus tsev, kev ruaj khov ntawm plasma, kev txav mus los ntawm cov khoom siv, kev tswj hwm thermal, kev tswj hwm automation, thiab kev lees paub qhov rai ntawm cov txheej txheem yog cov yam ntxwv tseem ceeb uas txiav txim siab qhov ua tiav ntawm kev txhim kho.
Rau cov chaw tsim khoom, kev hloov kho cov khoom siv txheej txheem uas muaj txiaj ntsig tiag tiag yuav tsum tsis yog tsuas yog ua rau muaj peev xwm tsim khoom ntau ntxiv xwb, tab sis kuj tseem yuav txhim kho qhov sib xws ntawm zaj duab xis, txo cov nqi tsis zoo, ua kom luv luv lub voj voog ua haujlwm, thiab txhim kho kev tswj hwm cov txheej txheem mus sij hawm ntev. Tsuas yog los ntawm kev koom ua ke cov ntsiab lus kev siv tshuab uas feem ntau tsis quav ntsej rau hauv txoj kev npaj hloov kho tshiab thiaj li hloov kho cov khoom siv mus rau hauv kev sib tw khoom muaj zog dua thiab ua haujlwm tau zoo dua.
- Tsab xov xwm no tau luam tawm los ntawmChaw tsim khoom siv nqus tsev txheejZhenhua Nqus Tsev
Lub sijhawm tshaj tawm: Plaub Hlis-09-2026