yazisa:
Kwicandelo lobuchwepheshe bokubeka ifilimu encinci, ukufuma kwe-electron beam yindlela ebalulekileyo esetyenziswa kumashishini ahlukeneyo ukuvelisa iifilimu ezincinci ezikumgangatho ophezulu. Iimpawu zayo ezizodwa kunye nokuchaneka okungenakuthelekiswa nanto kwenza ukuba ibe lukhetho olunomtsalane kubaphandi kunye nabavelisi. Nangona kunjalo, njengayo nayiphi na indlela, ukufuma kwe-e-beam kunemida yayo ebalulekileyo.
Iingenelo zokukhupha umphunga we-electron beam:
1. Izinga eliphezulu lokufaka: Ukufuma kwe-E-beam kunezinga elihle lokufaka xa kuthelekiswa nezinye iindlela ezifana nokufuma kwe-thermal okanye ukufuma kwe-sputter. Oku kwenza ukwenziwa kweefilimu ezincinci kube nempumelelo ngakumbi, konga ixesha kunye nezixhobo.
2. Ukuphucula umgangatho wefilimu: Ukufuma kwe-E-beam kunokuvelisa iifilimu ezinamathelayo nezicocekileyo kakhulu. Amandla aphezulu e-electron beam anceda ekucoceni ngokupheleleyo umphezulu we-substrate, nto leyo ekhokelela kumgangatho wefilimu ogqwesileyo kunye nokusebenza ngcono kwemveliso yokugqibela.
3. Ulawulo oluchanekileyo lobukhulu befilimu: Ukufuma kwe-electron beam kunokulawula ngokuchanekileyo ubukhulu befilimu egciniweyo. Eli nqanaba lokuchaneka libalulekile kwizicelo ezifuna ubukhulu bemaleko obuchanekileyo, njengeengubo ezibonakalayo.
Iingxaki zokuphuma komphunga we-electron beam:
1. Ukuhambelana okulinganiselweyo kwezinto: Ukufuma kwe-E-beam akufanelekanga kuzo zonke izinto. Ezinye izinto, ingakumbi ezo zinamaqondo okunyibilika aphantsi okanye uxinzelelo oluphezulu lomphunga, zisenokungakwazi ukumelana nobushushu obukhulu obuveliswa yi-electron beam. Oku kunciphisa uluhlu lwezinto ezinokufakwa kusetyenziswa le ndlela.
2. Ixabiso eliphezulu lezixhobo: Xa kuthelekiswa nezinye iindlela zokufaka, izixhobo ezifunekayo ukuze kuphume umphunga we-electron beam zibiza kakhulu. Olu tyalo-mali lokuqala lunokuba ngumqobo kwezemali kwimisebenzi emincinci okanye kwizibonelelo zophando ezinebhajethi encinci.
3. Ukuseta nokulungisa okunzima: Ukuseta nokugcina inkqubo yokuphuma komoya kwi-e-beam kunokuba nzima. Kufuna ubuchule kunye nobuchule, kunye nokugcinwa rhoqo ukuqinisekisa ukusebenza rhoqo. Ubunzima obubandakanyekayo benza kube nzima ukuba ezo ndlela zintsha zokubeka ifilimu zibe ncinci ziqondwe.
Ixesha lokuthumela: Julayi-04-2023