Uburyo bwo kunoza ikoreshwa rya "Target Identification" muri Magnetron Sputtering

Uburyo bw'Ubwubatsi bwo Guteza Imbere Imikorere no Gutuza Imikorere

In inzira zo gusukamo magnetron,Igipimo cy’ikoreshwa ry’intego ni ikimenyetso cy’ingenzi kigira ingaruka ku buryo butaziguye ku kiguzi cy’umusaruro, imikorere myiza y’ibikoresho, no kurambye kw’ibikorwa.
Gukoresha intego nke ntibyongera gusa imyanda y'ibikoresho ahubwo binatuma habaho gusimbuza intego kenshi, kudahindagurika kw'imiterere y'ibikoresho, no kongera igihe cyo kubikora.

Mu rwego rw'inganda zikora, kunoza ikoreshwa ry'intego si uguhindura imiterere y'ibipimo bimwe, ahubwo ni ugutunganya urwego rwa sisitemu hifashishijwe igishushanyo mbonera cy'imbaraga za rukuruzi, imiterere y'intego, imiterere y'amashanyarazi, no kugenzura imikorere.

Iyi nkuru iravuga ku buryo bw'ikoranabuhanga bufatika bwo kunoza ikoreshwa ry'intego muri sisitemu zo gusukamo magnetron.

1. Gusobanukirwa ikoreshwa rya "Target Identification" muri Magnetron Sputtering

Ikoreshwa ry’intego rigaragaza ijanisha ry’ibikoresho by’intego byasutswe neza kandi bigashyirwa mu bubiko ugereranyije n’ingano y’ibikoresho byose bishobora gukoreshwa.

Mu miterere isanzwe ya magnetron, isuri ikunze kwibasira ahantu hato ho gusiganwa, bigatuma: Isuri idakwirakwira; Ahantu hanini hatarakoreshwa; Gusimbuza intego mbere y'igihe nubwo hasigaye ibikoresho. Iyi miterere y'isuri ituma gukoresha neza imbaraga za rukuruzi biba ingenzi mu kunoza ikoreshwa.

2. Igishushanyo mbonera cy'umurima wa rukuruzi: Ikintu cy'ingenzi
2.1 Kunoza ikwirakwizwa ry'umuyoboro wa Magnetic Field

Imbaraga rukuruzi zigena uburyo plasma ifungirwamo n'uburyo iyoni ikwirakwira ku buso bw'ikintu kigamije.

Mu kunoza: Imbaraga za magneti na polarity; Intera ya magneti na geometry; Uburebure bwa magneti ku buso bw'ingenzi

Birashoboka: Kwagura inzira yo gusiganwa ku butaka; Kugabanya isuri ikabije ahantu runaka; Kugera ku ntego imwe; Imiterere ya magnetron igezweho ikoresha imiterere ya rukuruzi ihindagurika cyangwa idahuje kugira ngo yongere ubwinshi bwa plasma burenga inzira isanzwe yo gusiganwa ku butaka.

2.2 Sisitemu zo Guhindura no Guhindura Magneti

Gushyira mu bikorwa amashami ya rukuruzi azenguruka cyangwa amashami ya rukuruzi agenda yemerera:

Gukomeza gusakaza uduce tw'isuri

Kwirinda inzira zidahinduka z'isuri

Iterambere rikomeye mu ikoreshwa ry'intego rusange

Ubu buryo bukoreshwa cyane mu nganda zikoresha uburyo bwagutse bwo gukwirakwiza amazi mu bice binini.

3. Igenamigambi rya Jewometiri n'Ivugurura ry'Imiterere
3.1 Kongera Ubunini bw'Intego Ifatika

Gushushanya intego zifite: Ubunini bwiza; Uduce tw’isuri dukomeye; Guhuza inkingi z’inyuma zijyanye n’imiterere y’isuri

Abakora bashobora kongera igihe cyo gukoresha icyo bashaka mu buryo butekanye batabangamiye ubushyuhe cyangwa ubusugire bw'aho bahurira.

3.2 Intego zizunguruka n'izizunguruka

Ugereranyije n'ibipimo by'ibishushanyo mbonera, ibipimo by'ibishushanyo mbonera bishobora kuzunguruka bitanga:

Isuri isa n'iy'ubushyuhe buri hejuru ya 360°

Igipimo cy'ikoreshwa ry'intego kirenga 80–90%

Imicungire myiza y'ubushyuhe bitewe no gukwirakwiza ubushyuhe mu buryo buzenguruka

Izi ntego zikwiriye cyane cyane imiyoboro ihoraho yo gukora no gusiga irangi ahantu hanini.

4. Imiterere y'amashanyarazi n'uburyo bwo kuyakoresha mu kugenzura
4.1 Guteza imbere ubucucike bw'ingufu

Ubucucike bukabije bw'ingufu zo mu gace runaka bwihutisha isuri y'inzira y'amasiganwa.

Binyuze mu: Guteza imbere ikwirakwizwa ry'imbaraga nyinshi; Kwirinda ahantu hakoreshwa cyane mu gusohora ibintu; Kwangirika kw'ibicuruzwa bishobora gukorwa kimwe, bigatuma ingano y'ibicuruzwa ikoreshwa irushaho kuba myiza.

4.2 Ingufu zikoreshwa na DC na Mid-Frequency

Gukoresha ingufu za DC cyangwa frequency ya hagati (MF) bifasha: Kugabanya ibikorwa byo gukubita; Gutuza ikwirakwizwa rya plasma; Gukomeza gutonyanga ku buso bugenewe

Imiterere y'amazi asohoka mu buryo buhamye ituma habaho imiterere y'isuri ishoboka.

5. Ibipimo by'imikorere n'imicungire ya gaze
5.1 Kugenzura Umuvuduko w'Umurimo

Ingaruka ku muvuduko w'imikorere: Ingufu za Ion; Imyitwarire yo gukwirakwira kwa plasma; Guhuza kw'amata; Amadirishya y'umuvuduko mwiza afasha gukumira isuri ikabije mu gihe agakomeza gukora neza.

5.2 Uburyo Gazi Igenda Ihinduka Ingano

Mu nzira zo gusohora umwuka utaringaniye, ikwirakwizwa ry’umwuka rishobora gutera:

Uburozi bugamije uburozi mu turere dutandukanye

Igipimo cy'isuri kidahuje

Kugenzura neza urujya n'uruza rw'umwuka n'igishushanyo mbonera cy'icyumba ni ingenzi kugira ngo habeho ikoreshwa ry'intego ringana.

6. Guhuza ibikoresho ku rwego rw'igihe kirekire no guhagarara neza

Iterambere nyaryo mu ikoreshwa ry’intego risaba guhuza ibikoresho ku rwego rwo hejuru, harimo:

Uburyo buhamye bwo gukonjesha kugira ngo hirindwe kwangirika k'ubushyuhe

Inyubako zo gushyiramo intego zikomeye cyane

Imiterere ya rukuruzi n'amashanyarazi isubirwamo

Iyo imiterere y’imbaraga za rukuruzi, gutanga ingufu, no gucunga ubushyuhe bihujwe neza, ni bwo gusa ikoreshwa ryinshi n’ihindagurika ry’imikorere y’igihe kirekire bishobora kubaho.

7. Umwanzuro: Gukoresha intego ni umusaruro w'ubuhanga mu by'ikoranabuhanga

Mu gukurura magnetron, ikoreshwa ry’intego ntirishobora gukemurwa n’ihinduka rimwe.

Ni umusaruro wa: Ubuhanga mu by'amashanyarazi; Igishushanyo mbonera cy'imiterere y'inyubako; Guteza imbere ingufu z'amashanyarazi; Kugenzura ibipimo by'imikorere

Ku bakora ibikoresho bashaka ibiciro biri hasi kuri buri gusiga, gukora cyane, no gukora ibintu byinshi mu buryo buhoraho, kunoza ikoreshwa ry’ibikoresho bigomba gufatwa nk’intego y’ingenzi y’ibikoresho n’uburyo bwo gushushanya, aho gufatwa nk’inyungu ya kabiri.

–Iyi nkuru yasohotse naibikoresho byo gusiga irangi ry'umwuka uruganda rwa Zhenhua Vacuum