kumenyekanisha:
Mu rwego rwa tekinoroji yo kubika firime yoroheje, umwuka wa elegitoronike ni uburyo bwingenzi bukoreshwa mu nganda zitandukanye kugirango habeho firime nziza cyane. Imiterere yihariye hamwe nibisobanuro bitagereranywa bituma ihitamo neza kubashakashatsi nababikora. Nyamara, kimwe nubuhanga ubwo aribwo bwose, e-beam ihumeka ifite aho igarukira.
Ibyiza byo guhumeka amashanyarazi ya electron:
1. Ibi bituma gukora firime yoroheje bikora neza, bigatwara igihe numutungo.
2. Kunoza ubwiza bwa firime: E-beam evaporation irashobora gukora firime zifatika neza kandi zera. Ingufu nyinshi zumuriro wa electron zifasha gusukura neza hejuru yubutaka, bikavamo ubwiza bwa firime kandi bikanoza umusaruro wanyuma.
3. Kugenzura neza uburebure bwa firime: Impumuro ya elegitoronike irashobora kumenya neza kugenzura neza ububiko bwa firime. Uru rwego rwibisobanuro ni ingenzi kubisabwa bisaba ubunini bwuzuye, nkibikoresho bya optique.
Ingaruka zo guhumeka ibiti bya electron:
1. Guhuza ibikoresho bike: Guhindura E-beam ntibikwiye kubikoresho byose. Ibikoresho bimwe, cyane cyane bifite aho bishonga cyangwa umuvuduko mwinshi wumuyaga, ntibishobora kwihanganira ubushyuhe bukabije butangwa nigiti cya electron. Ibi bigabanya urutonde rwibikoresho bishobora kubikwa ukoresheje ubu buhanga.
2. Igiciro cyibikoresho byinshi: Ugereranije nubundi buryo bwo kubitsa, ibikoresho bisabwa kugirango umwuka wa elegitoronike uhindurwe bihenze cyane. Ishoramari ryambere rirashobora gutera imbogamizi yimari kubikorwa bito cyangwa ibikoresho byubushakashatsi bifite ingengo yimari.
3. Gushiraho no kubungabunga bigoye: Gushiraho no kubungabunga sisitemu yo guhumeka e-beam birashobora kugorana. Bisaba ubuhanga nubuhanga, kimwe no kubungabunga buri gihe kugirango habeho imikorere ihamye. Ingorabahizi zirimo zituma bigora ubwo buhanga bushya bwo kubika firime kubyumva.
Igihe cyo kohereza: Nyakanga-04-2023