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how does a diffusion pump work

Article source:Zhenhua vacuum
Read:10
Published:23-08-05

Diffusion pumps are an essential component in many industrial processes, especially those that require high vacuum levels. These pumps have proven their efficiency and reliability time and time again. Today we’re going to take a deep dive into the inner workings of a diffusion pump and explore how it works to create the perfect vacuum.

Diffusion pumps are known for their ability to quickly achieve and maintain high vacuum levels. They are commonly used in applications such as semiconductor manufacturing, vacuum coating, and space simulation chambers. But how do they work?

The working principle of a diffusion pump revolves around the process of molecular diffusion. Simply put, diffusion involves the movement of molecules from an area of ​​high concentration to an area of ​​low concentration. For diffusion pumps, the process takes place in stages.

1. Vaporization: The diffusion pump is filled with a suitable pumped fluid, usually a low vapor pressure oil such as silicone or polyphenylene ether. Using electric coils or external heaters to heat the fluid, causing it to evaporate and form high-pressure steam.

2. Nozzle: On the top of the diffusion pump, there is a nozzle or spray assembly. This nozzle is designed to create a supersonic jet of steam, which is essential for the operation of the pump.

3. Jet impingement: The supersonic jet of steam shoots down to the bottom of the pump. When it collides with cooler gas molecules in the pump, they are pushed apart, creating a region of localized high vacuum.

4. Capture zone: Vapor molecules continue to collide with gas molecules, causing a chain reaction throughout the pump. This process creates a trapping zone where gas molecules are continually pushed and trapped, resulting in a high vacuum environment.

5. Baffles: In order to prevent the gas molecules from diffusing back into the vacuum chamber, the diffusion pump is equipped with a series of baffles or traps. These baffles act as a barrier, effectively preventing pumped gas from going back.

It is worth noting that the efficiency of a diffusion pump depends on several factors such as the choice of pumped fluid, nozzle design and operating temperature. Each parameter must be carefully calibrated for optimal performance.

In recent news, advancements in diffusion pump technology have focused on improving efficiency and reducing environmental impact. Researchers are exploring alternative pump fluids that have the least global warming potential and are less toxic. These advancements are designed to mitigate the negative environmental footprint associated with traditional diffusion pump oils.

All in all, diffusion pumps play a vital role in creating and maintaining high vacuum levels in various industrial processes. Understanding how these pumps work allows us to gain insight into the intricate mechanisms involved in achieving a perfect vacuum. As the technology continues to develop, we can expect further improvements in diffusion pump efficiency and environmental sustainability.


Post time: Aug-05-2023