Ezisetshenzisweni ze-optical—ikakhulukazi ekukhiqizweni kwamalensi, izihlungi, izibonisi, kanye nezingxenye ze-optical zokuhlobisa—ukulawulwa kokuphambuka kombala sekuyindlela ebalulekile yokulinganisa ukuqinisekisa ukuhambisana komkhiqizo kanye nokusebenza okubonakalayo. Ukuphambuka kombala ikakhulukazi kuvela ekujikeni kwefilimu okungalingani, ukuhlukahluka kwenkomba yokukhanya, kanye nokushintshashintsha kwenqubo. Ngakho-ke, ukwazi amasu okulawula asebenzayo kubalulekile ekuthuthukiseni ikhwalithi yezingubo zokukhanya.
Izindlela Zokuphambuka Kombala Ezingu-1
Izembozo ezibonakalayo zivame ukufakwa ngokushiswa kwe-thermal noma i-magnetron, zakha izingqimba eziningi. Ubukhulu befilimu kanye nenkomba yokukhanya kuthinta ngqo ukubonakaliswa kanye nokudluliselwa kuzo zonke izigaba zamaza obubanzi, ngaleyo ndlela kuthinte umbala obonwayo. Izindlela eziyinhloko zifaka:
Ukwehluka Kobukhulu Befilimu: Izinga lokufakwa elingalingani noma ukujikeleza/ukufaka okungafanele kwe-substrate kuholela ekwehlukeni kobukhulu bendawo, okushintsha imiphumela yokuphazamiseka kokukhanya.
Ukushintsha Kwenkomba Yokugqama: Ukwehluka kokuhlanzeka kwezinto, ukwakheka kwegesi, noma izinga lokushisa le-substrate kungashintsha inkomba yokugqama, okuholela ekushintsheni kombala wokukhanya/ukudlulisa.
Ukuxhumanisa Ukuphazamiseka Kwezingqimba Eziningi: Ezinqwabeni zesihlungi ezikhanyisa kakhulu noma eziphazamisayo, amaphutha obukhulu ayaqoqana, okubangela ukushintshashintsha kwezinga lokuphazamiseka okubonakala njengokuphambuka kombala.
Inombolo 2.Umbala Wokumboza ObonakalayoAmasu Okulawula
1. Ukulawula Ubukhulu Obuqondile
I-Quartz Crystal Microbalance (QCM) noma izinhlelo zokuqapha ezibonakalayo zisetshenziselwa isilinganiso sokufakwa kanye nokulinganisa ubukhulu ngesikhathi sangempela.
Izinhlelo zokulawula ezivaliwe zilungisa amandla omthombo wokuhwamuka noma umugqa wamanje oqondiwe, zigcina ukunemba kobukhulu ngaphakathi kuka-±1%.
2. Ukuvumelana Kwenkomba Yokubheka Okubonakalayo
Ukuhlanzeka kwezinto ezibonakalayo kanye nokulawulwa kwenqubo ye-vacuum ephezulu kubalulekile ekunciphiseni ukufakwa kwegesi esele kanye nokuzinzisa izinkomba zokubuyisa.
Ezintweni ezisabelayo njenge-TiO₂ ne-SiO₂, ukulawulwa kwempendulo yegesi esabelayo kuqinisekisa ukuzinza kwe-stoichiometric.
3. Ukuthuthukiswa Kobunye
Ukujikeleza kwe-substrate, ukunyakaza kwamaplanethi, noma ukumiswa kwe-multi-target kuthuthukisa ukufana kwefilimu.
Kwizindawo ezinkulu, ukuhwamuka kwemithombo eminingi noma izinhloso zokuphalaza eziyisilinda/ezinezingqimba kunciphisa ukuphambuka okuphakathi kuya konqenqema.
4. Ukulungiswa Ngemva Kokufakwa Kwendawo
Ngezimbozo zokuphazamiseka kwezingqimba eziningi, i-metrology yobukhulu obusekelwe ku-laser ingaqondisa ukulungiswa kokufakwa kabusha ukuze kuncishiswe ukuphambuka.
Ukufakwa kwe-thermal annealing kuthuthukisa ukucindezeleka kwefilimu kanye nama-optical constants, kuthuthukisa ukufana kombala.
Izicelo Nemikhuba Yezimboni Noku-3
Kumadivayisi okubonisa aphezulu, ama-AR/VR optics, amalensi ekhamera, namafilimu okukhanya okuhlobisa, ukulawulwa kokuphambuka kombala kunquma ngqo isivuno somkhiqizo kanye nekhwalithi yokubuka. Isibonelo:
Amalensi e-AR/VR adinga izembozo ezilwa nokukhanya eziningi ezinombala ofanayo kuwo wonke ama-engeli okubuka, okudinga ukunemba kobukhulu ngaphakathi kuka-±2 nm.
Izihlungi zokubonisa eziqukethe izendlalelo zenkomba yokukhanya ephezulu/ephansi ezishintshanayo zizwela kakhulu ekushintsheni kombala, zidinga ukufana okunembile kanye nokuqina kwenkomba.
Ukulawulwa kokuphambuka kombala ezimbozweni ezibonakalayo kuncike ekuqondeni kobukhulu befilimu, ukuzinza kwenkomba yokukhanya, kanye nokwenza ngcono ukufana. Ngokuhlanganisa i-QCM noma ukuqapha okubonakalayo, ukwenza ngcono inqubo ye-vacuum, ukufakwa kwemithombo eminingi, kanye nokulungiswa kokufakwa ngemuva kokufakwa, abakhiqizi bangafinyelela ukuvumelana kombala okuphezulu. Lawa masu awagcini nje ngokuqinisekisa ukusebenza okubonakalayo kodwa futhi athuthukisa ikhwalithi yokubuka komkhiqizo wokugcina kanye nokuncintisana kwemakethe.
—Lesi sihloko sishicilelwe nguimishini yokumboza nge-vacuumumenzi we-Zhenhua Vacuum
Isikhathi sokuthunyelwe: Agasti-21-2025