Hauv kev siv kho qhov muag—tshwj xeeb tshaj yog hauv kev tsim cov iav, cov lim dej, cov zaub, thiab cov khoom siv kho kom zoo nkauj—kev tswj xim sib txawv tau dhau los ua qhov ntsuas tseem ceeb kom ntseeg tau tias cov khoom sib xws thiab kev ua tau zoo ntawm kev pom. Kev sib txawv xim feem ntau yog los ntawm cov zaj duab xis tsis sib xws, kev hloov pauv ntawm cov ntsuas refractive, thiab kev hloov pauv ntawm cov txheej txheem. Yog li ntawd, kev paub txog cov txheej txheem tswj hwm zoo yog qhov tseem ceeb rau kev txhim kho qhov zoo ntawm cov txheej txheem kho qhov muag.
No.1 Cov Txheej Txheem ntawm Kev Hloov Xim
Cov txheej txheej kho qhov muag feem ntau raug tso los ntawm kev ua kom sov lossis magnetron sputtering, tsim cov pawg ntau txheej. Lub thickness ntawm zaj duab xis thiab cov ntsuas refractive ncaj qha cuam tshuam rau kev cuam tshuam thiab kev xa mus rau ntau qhov wavelength sib txawv, yog li cuam tshuam rau qhov pom xim. Cov txheej txheem tseem ceeb suav nrog:
Kev Hloov Pauv Thickness ntawm Zaj Duab Xis: Qhov nrawm ntawm kev tso tawm tsis sib xws lossis kev tig / kho tsis raug ntawm cov khoom siv ua rau muaj qhov sib txawv ntawm qhov tuab hauv zos, hloov pauv cov teebmeem cuam tshuam ntawm qhov muag.
Kev Hloov Pauv ntawm Refractive Index: Kev hloov pauv ntawm cov khoom siv purity, cov roj sib xyaw, lossis qhov kub ntawm cov substrate tuaj yeem hloov pauv qhov refractive index, ua rau muaj kev hloov pauv xim ntawm reflectance/transmittance.
Kev Sib Txuas Lus Cuam Tshuam Ntau Txheej: Hauv cov lim dej uas muaj kev cuam tshuam ntau lossis kev cuam tshuam, qhov yuam kev tuab yuav sib sau ua ke, ua rau muaj kev cuam tshuam ntau dua uas tshwm sim ua qhov sib txawv ntawm xim.
Tsis muaj 2.Xim Txheej Kho Qhov MuagCov Txuj Ci Tswj
1. Kev Tswj Xyuas Qhov Thickness Kom Tseeb
Quartz Crystal Microbalance (QCM) lossis cov tshuab saib xyuas qhov muag pom kev siv rau kev ntsuas qhov nrawm thiab tuab ntawm cov khoom siv.
Cov txheej txheem tswj hwm kaw-voj kho qhov hluav taws xob evaporation lossis sputtering target tam sim no, tswj qhov tuab raug hauv ± 1%.
2. Kev Ntsuas Refractive Index
Cov khoom siv huv si thiab kev tswj cov txheej txheem nqus tsev siab yog qhov tseem ceeb heev rau kev txo cov pa roj seem thiab ua kom cov ntsuas refractive ruaj khov.
Rau cov ntaub ntawv reactive xws li TiO₂ thiab SiO₂, kev tswj cov pa roj reactive ua kom muaj kev ruaj khov stoichiometric.
3. Kev Txhim Kho Kev Sib Xws
Kev tig ntawm cov substrate, kev txav mus los ntawm lub ntiaj teb, lossis ntau lub hom phiaj teeb tsa txhim kho qhov sib xws ntawm zaj duab xis.
Rau cov substrates loj, ntau qhov chaw evaporation lossis cylindrical/annular sputtering targets txo qhov sib txawv ntawm nruab nrab mus rau ntug.
4. Kev Kho Tom Qab Tso Tawm
Rau cov txheej txheej cuam tshuam ntau txheej, laser-based thickness metrology tuaj yeem coj kev kho kom rov ua kom zoo dua kom txo qhov sib txawv.
Kev ua kom sov sov ua kom zoo dua qhov kev ntxhov siab ntawm zaj duab xis thiab qhov tsis hloov pauv ntawm qhov muag, txhim kho kev sib xws ntawm cov xim.
No.3 Kev Siv thiab Kev Ua Haujlwm Hauv Kev Lag Luam
Hauv cov khoom siv tso saib zoo heev, AR/VR optics, lub koob yees duab lens, thiab cov yeeb yaj kiab kho kom zoo nkauj, kev tswj qhov sib txawv ntawm xim ncaj qha txiav txim siab qhov ntau thiab tsawg ntawm cov khoom thiab qhov zoo ntawm cov duab. Piv txwv li:
Cov iav AR/VR xav tau cov txheej txheej tiv thaiv kev cuam tshuam ntau txheej nrog cov xim sib xws thoob plaws cov ces kaum pom, xav tau qhov tuab raug hauv ± 2 nm.
Cov ntxaij lim dej tso saib uas muaj cov txheej txheem refractive index siab/qis sib hloov pauv yog qhov rhiab heev rau kev hloov xim, xav tau kev sib npaug zoo thiab kev ruaj khov ntawm cov ntsuas.
Kev tswj xim sib txawv hauv cov txheej txheem kho qhov muag vam khom rau qhov tseeb ntawm cov zaj duab xis tuab, kev ruaj khov ntawm cov ntsuas refractive, thiab kev ua kom zoo sib xws. Los ntawm kev koom ua ke QCM lossis kev saib xyuas qhov muag, kev ua kom zoo dua ntawm cov txheej txheem nqus tsev, kev tso tawm ntau qhov chaw, thiab kev kho tom qab tso tawm, cov chaw tsim khoom tuaj yeem ua tiav cov xim sib xws siab. Cov txheej txheem no tsis yog tsuas yog ua kom muaj kev ua tau zoo ntawm qhov muag xwb tab sis kuj txhim kho qhov zoo ntawm cov khoom kawg thiab kev sib tw ua lag luam.
— Tsab xov xwm no tau luam tawm los ntawmcov khoom siv nqus tsev txheejChaw tsim khoom Zhenhua Lub Tshuab Nqus Tsev
Lub sijhawm tshaj tawm: Lub Yim Hli-21-2025