Sekoahelo sa vacuum sa E-beam, kapa electron beam physical vapor deposition (EBPVD), ke mokhoa o sebelisetsoang ho beha lifilimi tse tšesaane kapa lipehelo holim'a libaka tse fapaneng. E kenyelletsa ho sebelisa lehlaseli la elektrone ho futhumatsa le ho etsa hore thepa ea ho koahela e be mouoane (joalo ka tšepe kapa ceramic) ka kamoreng e phahameng ea vacuum. Thepa e nang le mouoane ebe e kopana holim'a substrate e reriloeng, e etsa lehlaseli le lesesaane, le tšoanang.
Likarolo tsa Bohlokoa:
- Mohloli oa Mahlaseli a Elektrone: Mahlaseli a elektrone a shebaneng le 'ona a futhumatsa thepa ea ho roala.
- Lisebelisoa tsa ho roala: Hangata litšepe kapa li-ceramic, li kenngoa ka har'a sebopi kapa tereing.
- Kamore ea ho ntsha lesapo la mouoane: E boloka tikoloho e nang le khatello e tlase, e leng ea bohlokoa bakeng sa ho thibela tšilafalo le ho lumella thepa e nang le mouoane ho tsamaea ka mela e otlolohileng.
- Substrate: Ntho e koahetsoeng, e behetsoeng ho bokella thepa e fufulelitsoeng.
Melemo:
- Liaparo tse Hloekileng Haholo: Tikoloho ea vacuum e fokotsa tšilafalo.
- Taolo e Nepahetseng: Botenya le ho tšoana ha lesela ho ka laoloa hantle.
- Ho lumellana ha thepa ka bophara: E loketse litšepe, li-oxide le thepa e 'ngoe.
- Ho khomarela ka matla: Ts'ebetso ena e lebisa ho hokahaneng ho hotle pakeng tsa ho roala le substrate.
Likopo:
- Optics: Liaparo tse thibelang ho bonahatsa le tse sireletsang lilenseng le liiponeng.
- Li-semiconductor: Mealo e tšesaane ea tšepe bakeng sa lisebelisoa tsa elektroniki.
- Sefofane: Liaparo tse sireletsang bakeng sa mahare a turbine.
- Lisebelisoa tsa Bongaka: Liaparo tse lumellanang le 'mele bakeng sa li-implant.
–Sengoloa sena se lokollotsoe by moetsi oa mochini oa ho roala ka vacuum cleanerGuangdong Zhenhua
Nako ea poso: Loetse-25-2024