E-beam vacuum daahan, ama kaydka uumiga jidheed ee elektarooniga ah (EBPVD), waa nidaam loo isticmaalo in lagu dhejiyo aflaanta khafiifka ah ama dahaarka dusha kala duwan. Waxay ku lug leedahay isticmaalka alwaax elektaroonig ah si loo kululeeyo oo loo uumiyo shay daahan (sida biraha ama dhoobada) qolka faakuumka sare. Walxaha uumiga ayaa markaas isku ururin substrate-ka bartilmaameedka ah, iyaga oo samaynaya dahaar dhuuban oo isku mid ah.
Qaybaha Muhiimka ah:
- Isha Beam Electron: Isha elektarooniga ah ee diirada saaraya waxay kululaysaa alaabta daahan.
- Qalabka Dahaarka: Badanaa biraha ama dhoobada, oo lagu dhejiyo weel ama saxaarad.
- Qolka Vacuum: Waxay ilaalisaa jawi cadaadis hooseeya, kaas oo muhiim u ah ka hortagga faddaraynta iyo u oggolaanshaha walxaha uumiga ah inay ku safraan xariiq toosan.
- Substrate: Shayga la dahaadhay, meel la dhigay si uu u ururiyo walxaha uumiga.
Faa'iidooyinka
- Dahaarka Nadiifinta Sare: Deegaanka faakuumku wuxuu yareeyaa wasakhda.
- Xakamaynta saxda ah: Dhumucda iyo lebbiska dahaarka si fiican ayaa loo xakameyn karaa.
- Waafaqid Walaxda Wanaagsan: Ku habboon biraha, oksaydhka, iyo agabka kale.
- Adhesion Xoog leh: Nidaamku wuxuu keenaa isku xirnaan heer sare ah oo u dhexeeya daahan iyo substrate.
Codsiyada:
- Optics: Dahaarka ka-hortagga milicsiga iyo ilaalinta ee muraayadaha iyo muraayadaha.
- Semiconductors: Lakabyada birta khafiifka ah ee elektiroonigga ah.
- Aerospace: Dahaarka ilaalinta marawaxadaha marawaxadaha.
- Aaladaha Caafimaadka: Dahaarka noole ku habboon beer-qaadaha.
–Maqaalkan waa la sii daayay by soo saaraha mashiinka daahan vacuumGuangdong Zhenhua
Waqtiga post: Seb-25-2024