Mumaitiro emazuva ano ekuputira vacuum, sosi yeion inoita basa rakakosha sechikamu chakakosha chekubatsira uye inoshandiswa zvakanyanya muPVD (Physical Vapor Deposition) uyekuputira kwemazisominda. Hazvingogumiri pakuwanda uye kunamira kwechikamu chekuputira asiwo zvinokanganisa zvakananga kuenderana kwechigadzirwa uye goho. Saka, chii chaizvo chinoshanda nechinhu chinobva maion mukuita kwekuputira? Ndeipi musimboti wayo wekushanda? Chinyorwa chino chichapa ongororo yakadzama.
Chii chinonzi Ion Source?
Sosi yemaion mudziyo unogadzira nekukurumidzisa maion munzvimbo isina chinhu. Kuburikidza nenzira dzakadai sekukweva kweplasma uye kubhomba kwegasi risina kusimba, sosi yemaion inoburitsa mwenje yemaion ine simba rakawanda, iyo inogona kusangana nepamusoro pe substrate kana firimu rakatetepa riri kukura kuti riite mabasa akawanda, akadai sekuchenesa, kubatsira kuisa, uye kuwedzera kunamira.
Mhando dzakajairika dzemaIon dzinosanganisira: Thermionic Ion Source; Hollow Cathode Ion Source; Multipole Ion Source (inowanzoshandiswa pakubatsira vanhu vasina simba rakawanda); Mabasa Makuru eIon Source
1. Substrate Pre-treatment: Kuvandudza Adhesion
Usati waisa pasi, pamusoro pe substrate unowanzova nema oxides, organic detaminants, nezvimwe tsvina. Kushandisa sosi ye ion yeIon Cleaning kunogona kubvisa zvinobudirira tsvina iyi pamusoro, zvichivandudza simba rekubatanidza pakati pefirimu ne substrate. Zvichienzaniswa nenzira dzechinyakare dzekuchenesa, kuchenesa ion beam kune zvakanakira zvakaita sekusabata, kusaparadza, uye kushanda zvakanaka.
2. Kubatsira Kuisa Mafirimu: Kuvandudza Magadzirirwo Emafirimu
Munguva yekuiswa kwechinhu, danda reion rinogona kushanda se "simba rekubatsira" kuwedzera kugona kwekufamba kwemaatomu emaatomu panguva yekukura kwefirimu. Izvi zvinotungamira pakuumbwa kwemafirimu akaomarara, akasimba, uye akafanana. Izvi zvinonyanya kukosha kune machira e optical, machira akaomarara, uye mamwe mashandisirwo apo kudiwa kuwanda kwakanyanya uye kushushikana kushoma.
3. Kudzora Kushushikana Kwemafirimu uye Maumbirwo Epamusoro
Nekugadzirisa simba nekona yedanda reion, kushushikana kwemukati, saizi yetsanga, uye kunyange kuomarara kwefirimu kunogona kudzorwa zvinobudirira. Semuenzaniso, mukugadzirira mafirimu einterference ane layer yakawanda kana mafirimu e optical akanyatsogadzirwa, rubatsiro rwema ion source runogona kudzivirira zvikanganiso zvakajairika zvakaita se "pinholes" uye "delamination," zvichivandudza kugadzikana uye kugara kwenguva refu kwefirimu.
4. Kuvandudza Kuenderana Kwekuputira uye Kubereka
Nekubatsira kweiyoni source, chimiro chejira chakafanana chinogona kuwanikwa pazvishandiso zvakakura, kunyanya izvo zvine nzvimbo dzakakombama dzakakombama kana zvikamu zvegirazi zvakakura nepurasitiki zvekuvhara magirazi. Izvi zvinobatsira kuvandudza goho uye kudzora kudzokorora mukugadzirwa kwesimbi.
Maitiro ekushandisa maIon Sources muMaitiro Anoshanda
Kuiswa Kwemafirimu Emaziso: Kuvandudza hunhu hwemafirimu ekuona uye kunamira kwemafirimu akanyatsojeka akadai semachira anodzivirira kupenya, mafirimu anopenya zvakanyanya, uye mafirita ekuona.
Kugadzirira Kusunga Zvakasimba: Kuvandudza huwandu hwemafirimu uye kushanda kwekudzivirira kusvuuka mumafirimu ane kuomarara kwakanyanya akadai seDLC (Diamond-Like Carbon), TiN, uye CrN.
Mapendi emukati memotokari: Kuvandudza kuenderana kwemavara uye kunamira kwependi, zvichiwedzera hupenyu hwebasa.
Kugadziriswa kweZvikamu zveMagetsi Pamusoro: Iva nechokwadi chekuti chimiro chefirimu rakatetepa chakasimba uye mashandiro aro epamusoro-soro.
Manyuko eion chinhu chakakosha "chakawedzerwa kukosha" mumagadzirirwo emazuva ano ekuputira. Nekuunza kuyerera kwemaion ane simba rakawanda, inoita basa rakakosha pamatanho akasiyana-siyana ekugadzirwa kwefirimu. Ingave iri kusimudzira kunamira, kugadzirisa chimiro, kudzora kushushikana, kana kuvandudza kugadzikana, manyuko eion anopa rutsigiro rwakasimba rwekuwana mavharuvhu emhando yepamusoro uye anoshanda zvakanyanya.
Sezvo zvinodiwa pakushanda zvichiramba zvichiwedzera munzvimbo dzakadai se optical displays, precision electronics, uye automotive manufacturing, kuvandudzwa kwetekinoroji ye ion source kuchavawo chinhu chikuru chinotungamira mukusimudzira maitiro e vacuum coating kusvika padanho repamusoro.
—Nyaya iyi yakaburitswa na midziyo yekunamira ye vacuummugadziri Zhenhua Vacuum
Nguva yekutumira: Chikunguru-05-2025