Mumaitiro ekuputira vacuum, kugoverwa kwesimba rezvikamu zvinosvika chinhu chakakosha chinokanganisa kukura kwefirimu, chimiro chidiki, kunamira, density, residual stress, uye pakupedzisira mashandiro ekuona, mashandiro, uye mashandiro epurasitiki. Kunyangwe maitiro acho achisanganisira magnetron sputtering, cathodic arc deposition, electron-beam evaporation, kana mamwe matekinoroji ePVD, mamiriro esimba ezvikamu zvinosvika pasitadhi anokanganisa zvakananga kuti firimu rinokura sei uye rinoita sei.
Saka, kunaka kwependi hakugone kuongororwa nekungofunga nezvehuwandu hwekuisa kana ukobvu hwefirimu. Kunzwisisa nekudzora kugoverwa kwesimba rezvikamu zvakakosha zvakaenzana kuti uwane hunhu hwakagadzikana hwefirimu uye kushanda kwakaringana kwekugadzira.
1. Chii chinonzi Particle Energy Distribution muVacuum Coating?
Munguva yekuputira vacuum, maatomu, maion, mamorekuru, nedzimwe mhando dzinogadzirwa kubva kune chinangwa kana kuti tsime remvura dzinofamba nemukamuri revacuum dzichienda kune substrate. Izvi zvidimbu hazviwanzo kusvika pasubstrate zvine simba rakafanana rekinetic. Pane kudaro, zvinoumba kugoverwa kwesimba.
Kugoverwa kwacho kunoenderana nezvinhu zvakaita se tekinoroji yekuisa, simba rekuburitsa, kumanikidzwa kwekushanda, zvinhu zvakanangwa, kuumbwa kwegasi, kusarura kwesubstrate, daro kubva panobva kuenda kune substrate, uye mamiriro eplasma.
Semuenzaniso, mukusveta kwemagnetron, maion ane simba anobva muplasma anorova chinangwa chacho oburitsa maatomu acho. Mhando idzi dzakasveta dzinobva dzafamba dzichienda kusubstrate, uko dzinoungana dzogadzira chifukidziro. Mu cathodic arc deposition, chikamu chikuru che deposited flux chinosanganisira mhando dzesimbi dzine ionized zvakanyanya dzine kinetic energy yakakwira. Mu thermal evaporation, mhando dzevapor dzine maatomu akawanda asina neutral ane kinetic energy yakaderera.
Kusiyana uku musimba rezvikamu chimwe chezvikonzero zvikuru nei matekinoroji akasiyana ekugadzira vacuum coating achigona kugadzira maumbirwo nemaitiro akasiyana efirimu.
2. Simba rezvikamu rinokanganisa sei kukura kwemafirimu
Kana zvidimbu zvakaiswa pasi pevhu zvikasvika pamusoro pevhu, simba razvo rekufamba rinosarudza kuti zvinobatana sei nepamusoro uye nemaatomu akamboiswa pasi.
Kana simba rezvipenyu zvishoma, mhando dzinosvika dzine kufamba kushoma pamusoro. Dzinogona kuramba dziri pedyo nenzvimbo dzadzo dzekutanga, zvichikonzera kuti pave nechinhu chakavhurika kana kuti chine maburi madiki. Mune mamwe mamiriro ezvinhu, izvi zvinogona kutungamira kukura kwemakona, kuwedzera kuumbwa kwevhu, uye kuderera kwehuwandu hwemafirimu.
Sezvo simba rezvikamu richikwira, kufamba kwepamusoro nepedyo nepamusoro kunogona kuvandudzika. Maatomu nemaion akachengetwa anokwanisa kutamira kunzvimbo dzakanaka, zvichikurudzira kupararira kwepamusoro, nucleation, uye densification. Izvi zvinogona kugadzira microstructure diki ine kunamira kwakavandudzwa uye hunhu hwemakanika.
Zvisinei, simba guru rezvikamu hazvirevi kuti firimu rinoita zviri nani nguva dzose. Kuputika kwemaion ane simba rakawanda kunogona kukonzera kupopota, kugadzirwa kwezvikanganiso, kudziyisa substrate, kuiswa kwechinhu, uye kuwedzera kushushikana kwakasara. Nokudaro, chinangwa hachisi chekungowedzera simba rezvikamu, asi ndechekugadzira kugoverwa kwesimba kwakakodzera kwezvikamu zvakananga uye system yekuputira.
3. Hukama Huripo Pakati Pesimba reZvidimbu neKuwanda kweMafirimu
Kuwanda kwemafirimu kwakabatana zvakanyanya nesimba rinounzwa kufirimu riri kukura.
Mumaitiro mazhinji ePVD, kushomeka kwesimba kwakakwana kunogona kukonzera kuputirwa kwechinhu chisina kusimba zvakanyanya. Maburi nemiganhu yepakati pemakoramu zvinogona kupa nzira dzekuti hunyoro kana ngura zvipinde mufirimu, zvichigona kuderedza kuramba ngura uye kugadzikana kwenguva refu.
Kuputika kwemaion kuri pakati nepakati kunogona kuwedzera kufamba kweadatom uye kukurudzira chimiro chefirimu chakasimba. Izvi zvakakosha zvikuru kumashandisirwo anoda kuomarara kwakanyanya, kuramba kupfeka, kushanda zvakanaka kwezvipingamupinyi, kana hunyanzvi hwakagadzikana hwemaziso.
Semuenzaniso, mukusputtering kwemagnetron, kuwedzera simba kana kushandisa substrate bias yakakodzera kunogona kuwedzera simba remaion nedzimwe mhando dzine simba dzinosvika substrate. Zvisinei, mhedzisiro chaiyo inoenderana nenzvimbo yese yeplasma pane pane imwe process parameter. Kumanikidzwa kwebasa, daro riri pakati pechinangwa nesubstrate, magnetic field configuration, uye kuumbwa kwegasi zvese zvinopesvedzera kugoverwa kwesimba.
Saka, simba rimwe chete kana kuti voltage yekusarudza zvakasiyana hazvireve kuti simba rezvikamu zvakafanana rinogoverwa pamhando dzakasiyana dzemachira.
4. Simba rezvikamu uye Kunamira kweCoating
Kunamatira kwependi ndeimwe hunhu hwakakosha hunokanganiswa nesimba rezvikamu.
Panguva yekuiswa, maion ane simba anogona kuwedzera kusanganiswa kwemukati meganda uye kuvandudza kubatana pakati pefirimu rakaiswa nesubstrate. Kuiswa kwemaion kwakakodzera kunogonawo kubvisa tsvina isina kusimba uye kumutsa pamusoro pesubstrate isati yakura uye panguva yekukura kwefirimu.
Ichi ndicho chimwe chikonzero nei ion etching uye substrate biasing zvichishandiswa zvakanyanya muPVD processes.
Zvisinei, kuputirwa kwemaion akawanda kunogona kuva nemigumisiro yakasiyana. Kupinda kwesimba rakawandisa kunogona kukonzera zvikanganiso panzvimbo inopindirana, kuunza kushushikana kwakanyanya, kukanganisa masubstrate anonzwa tembiricha, kana kukonzera kupopota kwakanyanya. Kune mapurasitiki, zvikamu zve optical, nezvimwe zvinhu zvinonzwa kupisa, kudzora simba reion kwakakosha zvikuru nekuti substrate inogona kunge iine kushivirira kushoma kwekupisa uye kwemakanika.
Saka, kunamira zvakanaka hakusi kungoshandisa voltage yepamusoro-soro inogoneka. Simba reion rinofanira kuenderana nezvinhu zve substrate, mamiriro ekugadzirisa usati watanga, magadzirirwo e coating, uye hunhu hwefirimu hunodiwa.
5. Kupesvedzera Kushushikana Kwemafirimu uye Kuumbwa Kwezvinhu Zvidiki
Simba rezvikamu zvine simba guru pakushushikana kwemukati mukati mejira.
Kana maion ane simba akaputira firimu riri kukura, anogona kukonzera kupenya kwemaatomu uye kugadzirisa chimiro chekurongedza chezvinhu zvakachengetwa. Mumamiriro ezvinhu akakodzera, izvi zvinogona kuwedzera huwandu hwefirimu uye kuvandudza mashandiro emuchina. Zvisinei, kuputira kwakanyanya kunogona kukonzera kushushikana kwakanyanya.
Kushushikana kwakanyanya kunogona kukonzera kutsemuka kwejira, kucheka, kushanduka, kana kusagadzikana kwemativi, kunyanya kana kutsemuka kwakakora kwaiswa.
Saka hukama huripo pakati pesimba rezvikamu uye kushushikana kwasara hausi wemutsara. Hunoenderana nehuwandu hweioni-ku-atomu, simba reioni, tembiricha yesubstrate, mwero wekuisa zvinhu, kuumbwa kwefirimu, uye mamiriro ese ekuisa zvinhu.
Pakuputira zvinhu zvine jira rakawanda, mhedzisiro yacho inova yakaoma zvikuru nekuti jira rega rega rinogona kuda mamiriro akasiyana esimba kuti riwane chimiro che microstructure uye hunhu hwe interface.
6. Simba rezvikamu muMagnetron Sputtering uye Cathodic Arc Deposition
Matekinoroji akasiyana ePVD anogadzira kugoverwa kwakasiyana kwesimba rezvikamu.
Mukushandiswa kwemagnetron sputtering, maatomu mazhinji anotsvedza haana kwaakarerekera, nepo chikamu chidiki chemaion ane simba nedzimwe mhando dzeplasma dzichibatanidzwa mukukura kwefirimu. Kugoverwa kwesimba kunogona kukanganiswa nekumanikidzwa kushanda, simba rekuburitsa, bias ye substrate, magnetic field configuration, uye target-to-substrate geometry.
Pakumanikidzwa kwakanyanya kushanda, kuroverana muplasma kunogona kukonzera kupararira kakawanda uye kurasikirwa nesimba zvidimbu zvisati zvasvika pasi pevhu. Pakumanikidzwa kwakaderera, zvidimbu zvinogona kufamba zvakasununguka, zvichibvumira huwandu hwakawanda hwemarudzi ane simba rakawanda kusvika pasi pevhu.
Mu cathodic arc deposition, vapor flux ine huwandu hwakawanda hwesimbi dzakasanganiswa neion ine simba rekinetic rakawanda. Izvi zvinopa ion bombardment yakasimba panguva yekukura kwefirimu uye zvinogona kugadzira machira akaomarara ane kunamira kwakanaka. Panguva imwe chete, nzvimbo ine simba rakawanda yeplasma inoda kudzora zvinobudirira kwe substrate bias, arc current, magnetic filtering, uye macroparticle generation kuti uwane mhando inodiwa yenzvimbo.
Misiyano iyi inoratidza kuti kugoverwa kwesimba rezvikamu kwakabatana zvakanyanya nehunhu hwakakosha hwetekinoroji yega yega yekuputira vacuum.
7. Kukosha kweKusarura kweSubstrate
Voltage ye substrate bias ndeimwe yenzira dzinoshanda zvikuru dzekugadzirisa simba reion pa substrate.
Kushandisa bias isina kunaka kunokwezva ma ions akanaka kubva muplasma kuenda ku substrate, zvichiwedzera kuputika kwema ions panguva yekuisa. Nekugadzirisa mamiriro e bias, simba rinounzwa kufirimu iri kukura rinogona kudzorwa mukati meimwe nzvimbo.
Kusarura kwakakodzera kunogona kuvandudza kuwanda kwefirimu, kunamira, kuomarara, uye kufanana kwemaumbirwo emukati memuviri. Zvisinei, kusarura kwakanyanya kunogona kuwedzera kupopota uye kushushikana kwakasara kana kukuvadza substrate.
Nechikonzero ichi, bias voltage haifanirwe kutorwa sechikamu chakasiyana. Mhedzisiro yayo inofanira kutariswa pamwe chete nekumanikidzwa kushanda, huwandu hweplasma, mwero wekuisa, simba rechinangwa, tembiricha ye substrate, uye zvinhu zvekufukidza.
Kune zvinhu zvinobata tembiricha zvakaita semapurasitiki einjiniya, mapolymer emaziso, uye zvikamu zvemagetsi, kudzora simba reion kwakakosha zvikuru.
8. Kugoverwa kweSimba reZvidimbu uye Kuenderana kweKugadzirwa Kwakawanda
Mukuyedza kwekufukidza murabhoritari, zvinokwanisika kuwana mashandiro akanaka efirimu nekudzokorora kugadzirisa maparamita emaitiro ega ega. Zvisinei, mukugadzirwa kwehuwandu, dambudziko nderekuchengetedza nharaunda imwechete yesimba rezvikamu kubva pabatch kuenda kune batch.
Kuchinja kwekumanikidzwa kwekamuri, mamiriro echinangwa, plasma impedance, kurodha substrate, kushandiswa kwechinangwa, uye magadzirirwo echinhu zvinogona kuchinja hunhu hweplasma uye nekudaro kuchinja kugoverwa kwesimba kusvika kunzvimbo dzakasiyana dzebasa.
Izvi zvinogona kukonzera kusiyana kweukobvu hwefirimu, kuwanda kwayo, ruvara rwayo, kuoma kwayo, kunamira kwayo, uye mashandiro ayo ekuona.
Pamidziyo yekuputira vacuum yeindasitiri, kudzora mashandiro kwakasimba kunoda zvinopfuura kungochengetedza kumanikidzwa kwesimba uye kukosha kwesimba. Nzvimbo yeplasma, flux yeion, bias ye substrate, geometry yekuisa, uye mamiriro ekwakabva zvinofanirwa kudzorwa sechikamu chewindo rekubatanidza maitiro.
Kune zvikamu zvakaoma zvine mativi matatu, mamiriro acho ezvinhu anotowedzera kuoma nekuti nzvimbo dzakasiyana dzinogona kusangana nemakona akasiyana ezviitiko uye kuyerera kwezvikamu zvakasiyana. Dhizaini yakakodzera yezvigadzirwa, kutenderera kwebasa, kurongeka kwenzvimbo, uye kugadzirisa mashandiro azvo zvakakosha kuti pave nekufanana kwejira rekufukidza.
9. Maitiro Ekudzora Simba reParticle muIndustrial Vacuum Coating Process
Mukugadzirwa kwePVD, simba rezvikamu rinofanira kudzorwa zvichienderana nehunyanzvi hwekupenda pane kudzorwa zvisina tsarukano.
Nguva yakakodzera yekushanda inowanzo gadziriswa nekubatanidza kumanikidzwa kwekushanda, simba rekuburitsa, kusarura kwe substrate, huwandu hweplasma, kuyerera kwegasi, tembiricha ye substrate, mwero wekuisa, uye geometry yekubva kune substrate.
Pakushongedza, kuputira maion akawanda kunogona kuwedzera kukuvara kwepamusoro kana kushushikana kwasara, nepo simba risina kukwana rinogona kukonzera kushomeka kwakashata kana kunamira. Pakuputira kwakasimba, simba remaion akawanda rinogona kubatsira pakuwana ma microstructures akakora uye kuomarara kwakanyanya, asi kuputira kwakawanda kunogona kukonzera zvikanganiso zvine chekuita nekushushikana.
Saka, kufambira mberi kwemaitiro kunofanirwa kutarisa pakugadzira chiyero chakasimba pakati pesimba remaion, flux yemaion, chiyero chekuiswa kwemvura, uye mhinduro ye substrate.
Pamichina yekugadzira, izvi zvinorevawo kuti kudzokorora mashandiro, mamiriro ekamuri, kushandiswa kwechinangwa, magadzirirwo ezvishandiso, uye kudzora mashandiro otomatiki zvinhu zvakakosha pakuchengetedza nharaunda yesimba rezvikamu zvakafanana.
Kugoverwa kwesimba rezvikamu chimwe chezvinhu zvakakosha zvinotungamira kukura kwefirimu mu vacuum covering. Zvinokanganisa kupararira kwepasi, nucleation, density yefirimu, kunamira, microstructure, residual stress, kuomarara, optical performance, uye kuvimbika kwenguva refu.
Chinokosha hachisi kungowedzera simba rezvikamu zvakachengetwa, asi kugadzira kugoverwa kwesimba kwakakodzera uye kwakasimba zvichienderana nezvinhu zvekufukidza, hunhu hwepasi, magadzirirwo efirimu, uye zvinodiwa pakushandisa.
Pakugadzirwa kwePVD mumaindasitiri, kunzwisisa hukama huripo pakati pehunhu hweplasma, simba reion, substrate bias, kushanda kwepressure, uye nzira dzekukura kwemafirimu zvinobvumira mainjiniya ekupenda kuti vapfuure kugadzirisa zviri nyore parameter uye kugadzira hwindo remaitiro akasimba. Izvi zvinonyanya kukosha pakuchinja kubva kusampuli dzemurabhoritari kuenda kukugadzirwa kwehuwandu hwakagadzikana, hunodzokororwa.
-Chinyorwa ichi chakabudiswa namugadziri wemidziyo yekuputira vacuumZhenhua Vacuum
Nguva yekutumira: Gunyana-03-2026