Izinqubo zokufakwa komusi womzimba (i-PVD) ezisekelwe kuukuhwamuka kokushisa,Ikhwalithi yefilimu ayinqunywa kuphela yizinga le-vacuum, izinto ze-substrate, noma amapharamitha enqubo. Ukwakheka kwesakhiwo somthombo wokuhwamuka kudlala indima ebalulekile ekuchazeni ukuzinza kokufakwa, ukufana kwefilimu, isakhiwo esincane, kanye nokuphindaphinda kwenqubo yesikhathi eside.
Njengoba izinhlelo zokusebenza zokumboza ziqhubeka nokukhula zibe yi-optical yezimoto, i-coating yokuhlobisa, amafilimu okuvikela asebenzayo, kanye nezindawo ezisezingeni le-optical, izidingo zokuvumelana nokuthembeka kwefilimu ziye zaba nzima kakhulu. Ngaphansi kwalezi zimo, ukwakheka komthombo wokuhwamuka akuseyona into yesibili okufanele icatshangelwe—kuyinto eyinhloko yobunjiniyela benqubo.
1. Umthombo Wokuhwamuka Njengomsuka Wokwakheka Kwefilimu
Ezinhlelweni zokuhwamuka kokushisa, umthombo wokuhwamuka usebenza njengomsuka oyinhloko wokugeleza komusi, okunquma ngqo:
Ukuqina kwezinga lokuhwamuka
Ukusatshalaliswa kwe-engela kwezinhlobo ezihwamukile
Ukusatshalaliswa kwamandla kwezinhlayiya zomusi
Ukuvumelana kwesikhashana kokukhishwa kwezinto ezibonakalayo
Noma yikuphi ukungazinzi noma ukulinganiselwa kwesakhiwo ezingeni lomthombo kuzosakazeka kuyo yonke inqubo yokufaka, ekugcineni kubonakale njengokwehluka kobukhulu befilimu, ukunamathela okubi, noma amaphutha esakhiwo esincane.
2. Ukwakheka Kwesakhiwo Nokuzinza Kokuhwamuka Komoya
2.1 Ukufana Kokushisa Nokudluliselwa Kokushisa
Umthombo wokuhwamuka oklanywe kahle kumele uqinisekise ukusatshalaliswa okufanayo kokushisa kuzo zonke izinto zokuhwamuka. Ukushisa okungalingani kungabangela ukushisa ngokweqile endaweni ethile, ukukhafulela izinto, noma ukuncipha ngaphambi kwesikhathi, okuholela ku:
Amanani okufaka aguqukayo
Ukungcola kwezinhlayiya
Ukwanda kobulukhuni bomphezulu
I-geometry yomthombo elungiselelwe kahle, ehlanganiswe nezinto ezifanele zokubethela kanye nokwakheka kwezinto zokushisa, kusiza ukugcina ukuhwamuka okuzinzile ngemijikelezo ende yokumboza.
2.2 Ukondla Nokusebenzisa Izinto Ezibalulekile Ngokuphumelelayo
Izinto ezicatshangelwayo ngesakhiwo ezifana ne-geometry yokulayisha izinto, ukujula kokubhoboza, kanye nomklamo wokukhipha umusi kuthinta ngqo ukusebenza kahle kwezinto. Imithombo eklanywe kabi ingase ihlupheke ngenxa yalokhu:
Ukuhwamuka kwezinto ezingaphelele
Ukufinyela kanye nokufakwa kabusha komthombo
Isivuno sokumboza esinciphile kanye nezindleko zokusebenza eziphakeme
Umthombo wokuhwamuka olungiselelwe kahle uvumela ukusetshenziswa kwezinto ezilawulwayo kanye nokuziphatha kokubeka okubikezelwayo, okubalulekile ekukhiqizweni kwezinga lezimboni.
3. Ukusatshalaliswa kwe-Vapor Flux kanye nokufana kwefilimu
3.1 Ukuqondiswa kanye Nokusatshalaliswa Kwe-Angular
Ubudlelwano bejometri phakathi komthombo wokuhwamuka kanye ne-substrate bunquma ukusatshalaliswa kwe-angular kokugeleza komhwamuko. Umklamo womthombo ongalungile ungaholela ku:
Ubukhulu befilimu obungalingani kuzo zonke izindawo ezinkulu
Ukuncipha komphetho noma ukuqina kwesikhungo
Ukubukeka okungafani kokukhanya noma kokuhlobisa
Izakhiwo zomthombo wokuhwamuka ezithuthukisiwe zakhiwe ukuze zinikeze i-vapor plume ezinzile nelawulekayo, okuqinisekisa ukufakwa okufanayo ngisho nasezintweni eziyinkimbinkimbi noma ezinezinhlangothi ezintathu.
3.2 Ukusebenzisana Nokunyakaza Kwe-Substrate
Ezinhlelweni zokumboza zesimanje, ukwakheka komthombo wokuhwamuka kumele kuhambisane nokujikeleza kwe-substrate, ukunyakaza kwamaplanethi, noma izindlela zokuthutha eziqondile. Umgomo ukufeza ukujiya kwefilimu nokwakheka kwayo kuzo zonke i-substrate, kungakhathaliseki ukuthi zikuphi ngaphakathi kwegumbi.
4. Umthelela kusakhiwo sefilimu esincane kanye nokunamathela
Umthombo wokuhwamuka uthonya ngokungaqondile isakhiwo sefilimu ngokulawula amandla e-kinetic kanye nesilinganiso sokufika kwezinhlayiya zomusi. Izimo zokuhwamuka ezizinzile zinegalelo ku:
Isakhiwo sefilimu esiminyene
Ukuncipha kwamaphutha okukhula kwekholomu
Ukuhlanganiswa okuthuthukisiwe kwe-interfacial
Ezinhlelweni ezifana nokufakwa kwezibani zezimoto noma amafilimu okuvikela, lapho ukunamathela nokuqina kubalulekile khona, umthombo wokuhwamuka owenziwe kahle ubalulekile ukuze kufezwe ukusebenza okuthembekile.
5. Ukuphindaphindwa Kwenqubo Nokuthembeka Kwezimboni
Ngokombono wezimboni, ikhwalithi yokumboza kumele iphindaphindwe, ilinganiswe, futhi ilawulwe. Izakhiwo zomthombo wokuhwamuka ezihlushwa ukuguquguquka, ukushisa okungaguquguquki, noma ukwakheka kwezinto kuzoletha ukukhukhuleka kwenqubo ngokuhamba kwesikhathi.
Imiklamo yemithombo yokuhwamuka esezingeni eliphezulu igxile ku:
Ukuqina kwesakhiwo isikhathi eside
Kulula ukugcinwa nokufakwa kwempahla
Ukusebenza okuhlala njalo emijikelezweni eminingi yokukhiqiza
Lezi zici zithinta ngqo isikhathi sokusebenza kwemishini, izinga lokukhiqiza, kanye nezindleko zobunikazi zizonke.
6. Isiphetho
Ezinhlelweni zokugqoka i-vacuum ezisekelwe ekushiseni okusekelwe ekushiseni, umthombo wokuhwamuka ungaphezu kakhulu kokubamba izinto noma ingxenye yokushisa. Kuyisici esibalulekile esichaza inqubo esithinta ngqo ikhwalithi yefilimu, ukuzinza kokukhiqiza, kanye nokuthembeka kokugqoka.
Njengoba ubuchwepheshe bokumboza buthuthuka bubheke ekusebenzeni okuphezulu kanye nokubekezelelana okuqinile, ubunjiniyela obucophelelayo besakhiwo somthombo wokuhwamuka sebubalulekile kakhulu. Kubakhiqizi abafuna amafilimu amancane ahambisanayo, asezingeni eliphezulu ekusetshenzisweni okudingakalayo, ukutshala imali ekwakhiweni komthombo wokuhwamuka okulungiselelwe kahle akuyona inketho—kuyisidingo.
–Lesi sihloko sishicilelwe nguimishini yokumboza nge-vacuum umenzi we-Zhenhua Vacuum
Isikhathi sokuthunyelwe: Jan-16-2026