Kwiinkqubo zokufakwa komphunga ngokwasemzimbeni (i-PVD) ezisekelwe kwiukufuma kobushushu,Umgangatho wefilimu awumiselwanga kuphela yinqanaba le-vacuum, izinto ze-substrate, okanye iiparameter zenkqubo. Uyilo lwesakhiwo somthombo wokufuma ludlala indima ebalulekileyo ekuchazeni uzinzo lokubekwa, ukufana kwefilimu, isakhiwo esincinci, kunye nokuphindaphinda kwenkqubo ixesha elide.
Njengoko izicelo zokugquma ziqhubeka nokwanda ziye kwi-optical yemoto, ii-coating zokuhombisa, iifilimu zokukhusela ezisebenzayo, kunye neendawo eziphezulu ze-optical, iimfuno zokungaguquguquki kwefilimu kunye nokuthembeka ziye zaba nzima ngakumbi. Phantsi kwezi meko, uyilo lomthombo wokufuma aluseyona nto ibalulekileyo—luyinto ephambili yobunjineli benkqubo.
1. Umthombo woMphunga njengeMvelaphi yoKwakhiwa kweeFilimu
Kwiinkqubo zokufudumala komphunga, umthombo womphunga usebenza njengemvelaphi ephambili yokujikeleza komphunga, nto leyo echaza ngokuthe ngqo:
Uzinzo lwezinga lokuphuma komphunga
Ukusasazwa kwe-engile kweentlobo eziphumayo
Ukusasazwa kwamandla eenxalenye zomphunga
Ukuvumelana okwethutyana kwemveliso yezinto ezibonakalayo
Nakuphi na ukungazinzi okanye ukunqongophala kwesakhiwo kwinqanaba lomthombo kuya kusasazeka kuyo yonke inkqubo yokubeka, ekugqibeleni kubonakale njengokwahluka kobukhulu befilimu, ukunamathelana okungekho semgangathweni, okanye iziphene zesakhiwo.
2. Uyilo lweSakhiwo kunye nokuzinza koMphunga
2.1 Ukulingana kobushushu kunye nokuDluliselwa kobushushu
Umthombo wokufuma oyilwe kakuhle kufuneka uqinisekise ukuba ubushushu busasazwa ngokulinganayo kwizinto zokufuma. Ukufudumeza okungalinganiyo kunokubangela ubushushu obuphezulu kwindawo ethile, ukutshiza kwezinto, okanye ukuphelelwa ngamandla, okukhokelela koku:
Amazinga okufaka atshintshatshintshayo
Ungcoliseko lwamasuntswana
Ukonyuka koburhabaxa bomphezulu
Ijiyometri yomthombo olungiselelweyo, idityaniswe nezinto ezifanelekileyo zokunyibilikisa kunye noyilo lwezinto zokufudumeza, inceda ukugcina umphunga ozinzileyo ngexesha elide lokugquma.
2.2 Ukondla kunye nokuSebenza kakuhle kwezinto
Izinto eziqwalaselwayo kwisakhiwo ezifana nejometri yokulayisha izinto, ubunzulu bokubethelela, kunye noyilo lokukhupha umphunga zichaphazela ngokuthe ngqo ukusebenza kakuhle kwezinto. Imithombo eyilwe kakubi inokuba neengxaki ezilandelayo:
Ukufuma kwezinto ezingaphelelanga
Ukufuma kunye nokubekwa kwakhona ngaphakathi komthombo
Isivuno esinciphileyo sokugquma kunye neendleko zokusebenza eziphezulu
Umthombo wokufuma olungiselelweyo uvumela ukusetyenziswa kwezinto ezilawulwayo kunye nokuziphatha okuqikelelweyo kokubeka izinto, okubalulekileyo kwimveliso yezinga lemizi-mveliso.
3. Ukusasazwa kweVapor Flux kunye nokufana kweFilimu
3.1 Ulwalathiso kunye noSasazo lwe-Angular
Ubudlelwane bejometri phakathi komthombo womphunga kunye nesiseko bumisela ukusasazwa kwe-angular komphunga womphunga. Uyilo lomthombo olungalunganga lunokukhokelela koku:
Ubukhulu befilimu obungalinganiyo kwiindawo ezinkulu
Ukuncitshiswa komphetho okanye ukuqina kwembindi
Inkangeleko engahambelaniyo yokukhanya okanye yokuhombisa
Izakhiwo zemithombo yokufuma eziphucukileyo zenzelwe ukubonelela ngeplamu yomphunga ezinzileyo nelawulekayo, ukuqinisekisa ukuba ifakwa ngokulinganayo nakwizinto ezintsonkothileyo okanye ezinemilinganiselo emithathu.
3.2 Ukusebenzisana neSubstrate Motion
Kwiinkqubo zokugquma zanamhlanje, uyilo lomthombo wokufuma kufuneka luhambelane nokujikeleza kwe-substrate, intshukumo yeplanethi, okanye iindlela zokuthutha ezithe ngqo. Injongo kukufezekisa ubukhulu befilimu kunye nokwakheka kwayo kuzo zonke ii-substrate, nokuba zikweyiphi na indawo ngaphakathi kwigumbi.
4. Impembelelo kwisakhiwo sefilimu kunye nokunamathela
Umthombo womphunga uchaphazela ngokungathanga ngqo isakhiwo sefilimu ngokulawula amandla entshukumo kunye nesantya sokufika kwamasuntswana omphunga. Iimeko zomphunga ezizinzileyo zinegalelo koku:
Isakhiwo sefilimu exineneyo
Iziphene zokukhula kwekholamu ezinciphileyo
Ukuphuculwa kokubopha ubuso
Kwizicelo ezifana neengubo zezibane zeemoto okanye iifilimu zokukhusela, apho ukunamathela kunye nokuqina kubalulekile, umthombo wokufuma owenziwe ngokufanelekileyo ubalulekile ukuze kufezekiswe ukusebenza okuthembekileyo.
5. Ukuphindaphinda kweNkqubo kunye nokuthembeka kweShishini
Ngokwembono yemizi-mveliso, umgangatho wokugquma kufuneka uphindaphindwe, ulinganiswe, kwaye ulawuleke. Izakhiwo zomthombo womphunga ezinengxaki yokuguquka, ukufudumeza okungaguqukiyo, okanye ukwakheka kwezinto ziya kungenisa inkqubo yokuhamba ngokuhamba kwexesha.
Uyilo lwemithombo yokufuma esemgangathweni ophezulu lugxile koku kulandelayo:
Uzinzo lwesakhiwo sexesha elide
Kulula ukugcinwa nokutshintshwa kwezinto
Ukusebenza ngokuqhubekayo kwimijikelo emininzi yemveliso
Ezi zinto zichaphazela ngokuthe ngqo ixesha lokusebenza kwezixhobo, izinga lokuvelisa, kunye neendleko zizonke zobunini bazo.
6. Isiphelo
Kwiinkqubo zokugquma nge-vacuum ezisekelwe kubushushu, umthombo wokugquma ungaphezulu kakhulu kunesibambi sezinto okanye icandelo lokufudumeza. Yinto ebalulekileyo echaza inkqubo echaphazela ngokuthe ngqo umgangatho wefilimu, uzinzo lwemveliso, kunye nokuthembeka kokugquma.
Njengoko iitekhnoloji zokugquma zitshintsha zisiya ekusebenzeni okuphezulu kunye nokunyamezelana okuqinileyo, ubunjineli obucokisekileyo besakhiwo somthombo wokufuma bube yinto efunekayo. Kubavelisi abafuna iifilimu ezincinci ezihambelanayo nezisemgangathweni ophezulu kwizicelo ezifuna amandla, ukutyala imali kuyilo lomthombo wokufuma oluphuculweyo akulona ukhetho—yinto eyimfuneko.
–Eli nqaku lipapashwe nguizixhobo zokugquma nge-vacuum umenzi we-Zhenhua Vacuum
Ixesha leposi: Jan-16-2026