Hauv cov txheej txheem vapor deposition (PVD) raws likev ua kom sov,Qhov zoo ntawm zaj duab xis tsis yog txiav txim siab los ntawm qib nqus tsev, cov khoom siv hauv qab, lossis cov txheej txheem txheej txheem xwb. Kev tsim qauv ntawm qhov chaw evaporation ua lub luag haujlwm tseem ceeb hauv kev txhais cov kev ruaj khov ntawm kev tso dej, kev sib xws ntawm zaj duab xis, microstructure, thiab kev rov ua dua mus sij hawm ntev.
Raws li cov ntawv thov txheej txuas ntxiv nthuav dav mus rau hauv cov khoom siv kho qhov muag hauv tsheb, cov txheej txheem kho kom zoo nkauj, cov yeeb yaj kiab tiv thaiv ua haujlwm, thiab cov nplaim kho qhov muag, qhov yuav tsum tau ua kom cov yeeb yaj kiab sib xws thiab kev ntseeg tau tau dhau los ua qhov nruj dua. Hauv qab cov xwm txheej no, kev tsim cov khoom siv evaporation tsis yog qhov kev txiav txim siab thib ob lawm - nws yog lub hauv paus tseem ceeb ntawm kev tsim kho txheej txheem.
1. Qhov Chaw Ua Kom Qhuav Ua Lub Hauv Paus Ntawm Kev Tsim Zaj Duab Xis
Hauv cov txheej txheem thermal evaporation, qhov chaw evaporation ua haujlwm ua lub hauv paus chiv keeb ntawm cov pa dej, ncaj qha txiav txim siab:
Kev ruaj khov ntawm cov dej noo
Kev faib tawm ntawm cov tsiaj txhu uas tau evaporated
Kev faib hluav taws xob ntawm cov khoom me me ntawm cov pa dej
Kev sib xws ntawm lub sijhawm ntawm cov khoom tso tawm
Txhua qhov tsis ruaj khov lossis kev txwv ntawm qhov chaw yuav nthuav dav thoob plaws hauv cov txheej txheem tso dej, thaum kawg ua rau pom qhov sib txawv ntawm cov tuab ntawm zaj duab xis, kev nplaum tsis zoo, lossis cov teeb meem me me.
2. Kev Tsim Qauv thiab Kev Ruaj Ntseg ntawm Cov Pa Dej
2.1 Kev Sib Npaug Kub thiab Kev Hloov Kub
Ib qho chaw ua kom cov dej noo uas tsim tau zoo yuav tsum ua kom muaj kev faib cua sov sib npaug thoob plaws cov khoom ua kom cov dej noo. Kev ua kom sov tsis sib npaug tuaj yeem ua rau kub dhau, cov khoom nchuav tawm, lossis poob sai sai, ua rau:
Cov nqi tso tawm hloov pauv
Kev ua qias tuaj ntawm cov khoom me me
Kev nce ntawm qhov chaw ntxhib
Qhov geometry ntawm qhov chaw zoo tshaj plaws, ua ke nrog cov ntaub ntawv crucible thiab cov qauv tsim cua sov, pab tswj kom cov dej noo ruaj khov thaum lub sijhawm txheej ntev.
2.2 Kev Pub Khoom Siv thiab Kev Siv Khoom Zoo
Cov kev xav txog cov qauv xws li cov qauv ntawm cov khoom thauj, qhov tob ntawm lub crucible, thiab kev tsim cov pa tawm ncaj qha cuam tshuam rau kev siv cov khoom siv zoo. Cov peev txheej tsim tsis zoo yuav raug kev txom nyem los ntawm:
Cov khoom siv tsis tiav evaporation
Kev sib sau ua ke thiab rov ua dua hauv qhov chaw
Txo cov txiaj ntsig ntawm cov txheej txheem thiab cov nqi khiav lag luam siab dua
Ib qho chaw ua kom cov dej noo zoo tshaj plaws ua rau muaj kev tswj hwm kev siv khoom thiab kev kwv yees tus cwj pwm tso dej, uas yog qhov tseem ceeb rau kev tsim khoom hauv kev lag luam.
3. Kev Faib Tawm Vapor Flux thiab Zaj Duab Xis Sib Xws
3.1 Kev Taw Qhia thiab Kev Faib Tawm Lub kaum sab xis
Qhov kev sib raug zoo ntawm cov qauv geometric ntawm qhov chaw ua pa thiab lub substrate txiav txim siab qhov kev faib tawm ntawm lub kaum sab xis ntawm cov pa dej. Kev tsim qhov chaw tsis zoo yuav ua rau:
Cov zaj duab xis tuab tsis sib xws thoob plaws thaj chaw loj
Kev ua kom ntug nyias los yog qhov chaw tuab
Kev pom tsis zoo lossis kev kho kom zoo nkauj tsis sib xws
Cov qauv tsim cov khoom siv evaporation siab heev tau tsim los muab cov pa dej ruaj khov thiab tswj tau, ua kom muaj kev sib npaug txawm tias nyob rau ntawm cov khoom nyuaj lossis peb-seem.
3.2 Kev Sib Cuam Tshuam Nrog Kev Txav Mus Los ntawm Cov Khoom Siv
Hauv cov txheej txheem niaj hnub no, kev tsim cov qhov chaw evaporation yuav tsum phim nrog kev tig ntawm cov substrate, kev txav mus los ntawm lub ntiaj teb, lossis cov txheej txheem thauj mus los. Lub hom phiaj yog kom ua tiav cov zaj duab xis tuab thiab cov khoom sib xws thoob plaws txhua lub substrates, tsis hais lawv qhov chaw nyob hauv chav.
4. Kev cuam tshuam rau zaj duab xis microstructure thiab adhesion
Qhov chaw ua kom cov pa dej tsis sib haum xeeb cuam tshuam rau cov qauv ntawm cov zaj duab xis los ntawm kev tswj lub zog kinetic thiab qhov nrawm ntawm cov pa dej. Cov xwm txheej ua kom cov pa dej ruaj khov pab txhawb rau:
Cov qauv zaj duab xis tuab
Txo cov teeb meem kev loj hlob ntawm cov kab ke
Kev sib txuas lus zoo dua qub
Hauv cov ntawv thov xws li cov txheej txheem teeb pom kev zoo hauv tsheb lossis cov yeeb yaj kiab tiv thaiv, qhov twg qhov kev nplaum thiab kev ua haujlwm ntev yog qhov tseem ceeb, qhov chaw ua kom cov dej noo uas tau tsim kho kom zoo yog qhov tseem ceeb rau kev ua tiav kev ua tau zoo.
5. Kev Rov Ua Dua Txheej Txheem thiab Kev Ntseeg Siab Hauv Kev Lag Luam
Los ntawm kev lag luam, qhov zoo ntawm cov txheej yuav tsum rov ua dua, ntsuas tau, thiab tswj tau. Cov qauv ntawm cov dej noo uas raug kev puas tsuaj, cua sov tsis sib xws, lossis cov khoom sib sau ua ke yuav ua rau muaj kev hloov pauv ntawm cov txheej txheem raws sijhawm.
Cov qauv tsim cov khoom siv evaporation zoo tsom mus rau:
Kev ruaj khov ntawm cov qauv mus sij hawm ntev
Yooj yim ntawm kev saib xyuas thiab hloov khoom siv
Kev ua tau zoo sib xws thoob plaws ntau lub voj voog tsim khoom
Cov yam no cuam tshuam ncaj qha rau lub sijhawm ua haujlwm ntawm cov khoom siv, tus nqi tsim khoom, thiab tus nqi tag nrho ntawm kev muaj.
6. Xaus Lus
Hauv cov txheej txheem nqus tsev uas siv cua sov los ua kom cov txheej txheej yaj, qhov chaw uas cov txheej txheej yaj tsis yog tsuas yog ib qho chaw tuav cov khoom siv lossis cov khoom siv cua sov xwb. Nws yog ib qho tseem ceeb uas cuam tshuam rau qhov zoo ntawm cov zaj duab xis, kev ruaj khov ntawm kev tsim khoom, thiab kev ntseeg tau ntawm cov txheej txheej.
Thaum cov txheej txheem txheej txheej hloov zuj zus mus rau qhov ua tau zoo dua thiab muaj kev kam rau siab dua, kev tsim kho kom zoo ntawm cov qauv ntawm qhov chaw evaporation tau dhau los ua qhov tseem ceeb. Rau cov tuam txhab tsim khoom uas tab tom nrhiav cov yeeb yaj kiab nyias nyias zoo thiab ruaj khov hauv cov ntawv thov uas nyuaj, kev nqis peev rau kev tsim cov qauv evaporation zoo tshaj plaws tsis yog ib qho kev xaiv - nws yog qhov tsim nyog.
– Tsab xov xwm no tau luam tawm los ntawmcov khoom siv nqus tsev txheej Chaw tsim khoom Zhenhua Lub Tshuab Nqus Tsev
Lub sijhawm tshaj tawm: Lub Ib Hlis-16-2026