Sekoahelo sa Mocheso sa Electrode Vacuum ke sesebelisoa se ikhethileng se sebelisoang lits'ebetsong tsa indasteri le tsa saense bakeng sa li-electrode tse koahelang kapa li-substrate tse ling tlas'a tikoloho ea vacuum, hangata se kopantsoe le kalafo ea mocheso. Ts'ebetso ena e sebelisoa hangata masimong a kang lisebelisoa tsa elektroniki, saense ea thepa, li-semiconductor le optics ho ntlafatsa thepa ea li-electrode kapa ho beha lifilimi tse tšesaane holim'a lisebelisoa tse fapaneng. Mona ke tlhaloso ea mesebetsi ea eona, lits'ebetso le theknoloji:
1. Tikoloho ea Vacuum
Morero: Tikoloho ea vacuum e bohlokoa bakeng sa ho thibela tšilafalo e bakoang ke likhase tsa sepakapaka tse kang oksijene le naetrojene, tse ka amang boleng ba ho roala. E boetse e fokotsa oxidation le lik'hemik'hale tse ling tse ka senyang thepa.
Melemo: E netefatsa hore ho koaheloa ha thepa ho hloekile haholo le hore e beoa hantle, haholo-holo bakeng sa lits'ebetso tse bonolo joalo ka li-semiconductor kapa likarolo tsa optical.
2. Mokhoa oa ho Futhumatsa
Kalafo ea Mocheso: Sistimi ena e kenyelletsa mokhoa o laoloang oa ho futhumatsa ho phekola substrate ka mocheso pele, nakong, kapa ka mor'a ts'ebetso ea ho roala. Sena se ka ntlafatsa ho khomarela ha roala, sa fetola litšobotsi tsa thepa, kapa sa nolofalletsa mefuta e itseng ea lits'ebetso tsa ho beha.
Taolo ea Mocheso: Taolo e nepahetseng ea mocheso e lumella ho lokisa hantle thepa ea mocheso ea substrate kapa thepa ea ho roala, ho ntlafatsa conductivity, matla a mechini, kapa thepa e meng.
3. Mekhoa ea ho roala
Electrode Vacuum Heat Coater e ka tšehetsa mahlale a fapaneng a ho koahela, ho latela ts'ebeliso:
Ho ntsha mouoane wa mmele (PVD): Mokhoa o tlwaelehileng ho di-vacuum coater moo thepa ya ho roala e fetohang mouoane mme e bewa hodima substrate ka tsela e laolwang. Mekhoa e kang ho ntsha metsi kapa ho ntsha mouoane ka mocheso e sebediswa haholo.
Ho ntshwa ha mouoane ka dikhemikhale (CVD): Mokgweng ona, ho hlaha karabelo ya dikhemikhale pakeng tsa dikhase tse kenngwang ka phaposing ya vacuum, e leng se fellang ka filimi e tshesane e thehwang hodima substrate.
Mouoane o Chesang: Mokhoa oo thepa ea ho roala e futhumatsoang ho fihlela e fetoha mouoane, 'me mouoane o kokobela holim'a substrate ho etsa lera le lesesaane.
4. Likopo
Lisebelisoa tsa elektroniki: Li sebelisetsoa ho kenya likarolo tse tsamaisang motlakase holim'a liboto tsa potoloho, li-electrode bakeng sa libeteri, le likarolo tse ling tsa elektroniki.
Li-semiconductor: Indastering ea li-semiconductor, sesebelisoa sena se bohlokoa bakeng sa ho beha likarolo tse tšesaane haholo tsa conductive kapa insulating holim'a li-chip le lipotoloho tse kopantsoeng.
Optics: Lilense tse koahelang, liipone, le li-sensor tsa optical tse nang le li-coat tse thibelang ho bonesa, li-filters, kapa likarolo tse sireletsang.
Polokelo ea Matla: Ho koahela li-electrode bakeng sa libeteri, joalo ka libeteri tsa lithium-ion kapa tsa boemo bo tiileng, moo ho kenngoa ha thepa ka nepo ho leng bohlokoa bakeng sa ts'ebetso le bophelo bo bolelele.
Disensara: Ho etsa dikoahelo bakeng sa disensara tse hlokang thepa e itseng ya motlakase, ya mocheso, kapa ya mahlasedi.
5. Litekanyo tsa Bohlokoa tsa Tshebetso
Botenya ba ho Koahela: Sistimi ena e lumella taolo e nepahetseng holim'a botenya ba lera le kentsoeng, hangata le lekanngoang ka li-nanometer kapa li-micrometer.
Ho tšoana: Ho netefatsa hore lesela le sebelisoa ka ho lekana holim'a substrate, e leng ntho ea bohlokoa bakeng sa lits'ebetso tsa elektroniki kapa tsa optical.
Ho khomarela: Seaparo se ntlafatsa ho khomarela ha lera le kentsweng ho substrate ka ho phekola mocheso le mekhoa ea ho lokisa bokaholimo.
Bohloeki ba Thepa: Ho sebetsa ka har'a vacuum ho fokotsa tšilafalo mme ho netefatsa hore ho koaheloa ka bohloeki bo phahameng.
6. Kopanyo le Tlhahiso ea Li-electrode
Hangata sekwahelo sa mocheso sa vacuum se kopanngoa le mela ea tlhahiso ea li-electrode, haholo-holo bakeng sa libeteri (tse kang libeteri tsa lithium-ion), lisele tsa mafura le li-capacitor. Ts'ebetsong tsena, lifilimi tse tšesaane tsa boleng bo holimo tsa thepa e tsamaisang motlakase (joalo ka nickel, koporo, kapa li-oxide tse ling tsa tšepe) li kenngoa holim'a li-electrode, e leng se ntlafatsang ho tsamaisa motlakase ha tsona, botsitso ba lik'hemik'hale le ts'ebetso ka kakaretso.
7. Melemo
Boleng bo Ntlafalitsoeng ba ho Koahela: Tikoloho ea vacuum e netefatsa hore ho koaheloa ha boleng bo holimo, ho se nang sekoli ho na le ho khomarela ho hoholo.
Ho Laolwa ha ho Hlahisoa: Ho nepahala ha botenya ba ho maneha, ho tšoana, le thepa ea thepa ho ntlafatsa ts'ebetso ea sehlahisoa.
Ho Tšoarella ho Ntlafatsang: Liaparo tse hlahisoang tlas'a vacuum le kalafo ea mocheso hangata li tšoarella haholoanyane ebile li hanela ho senyeha ha tikoloho, joalo ka oxidation kapa mafome.
8. Liphephetso
Litšenyehelo: Lisebelisoa tse phahameng tsa vacuum le tse nepahetseng tsa taolo ea mocheso li ka bitsa chelete e ngata, ka bobeli mabapi le matsete a pele le tlhokomelo.
Ho rarahana: Ho sebetsa litsamaiso tse joalo ho hloka litsebi tse nang le boiphihlelo le tlhahlobo e hlokolosi ho netefatsa liphetho tse ntle ka ho fetisisa.
–Sengoloa sena se lokollotsoe kemoetsi oa mochini oa ho roala ka vacuum cleanerGuangdong Zhenhua
Nako ea poso: Loetse-28-2024