Ku bijyanye no kongera ubwiza n'ubudahangarwa bw'ibicuruzwa bitandukanye, gusiga irangi rya PVD byagaragaye nk'amahitamo akunzwe mu nganda nyinshi. Kuva ku bice by'imodoka kugeza ku bikoresho byo mu rugo, iri koranabuhanga rigezweho ryo gusiga ritanga inyungu nyinshi. Ariko, abakiriya bashobora kuba...
Uburyo bwo gusiga irangi rya cathode ion rikozwe mu buryo bukurikira: 1. Shyira ingots z'ikibuno mu gipfundikizo. 2. Gushyira igikoresho cyo gukoraho. 3. Nyuma yo kuva kuri 5 × 10-3Pa, gaze ya argon yinjizwa mu cyumba cyo gusiga irangi iva mu muyoboro wa silver, kandi urwego rw'ingufu ruri hafi 100Pa. 4. Fungura imbaraga za bias. 5....
1. Gushyiramo imirasire ya ioni ahanini bikoresha imirasire ya ioni ifite ingufu nke kugira ngo bifashe mu guhindura ubuso bw'ibikoresho. (1) Ibiranga gushyiramo imirasire ya ioni mu gihe cyo gusiga, uduce twa filime twashyizwemo duhora duterwa na ioni zishyushye ziva ku isoko ya ioni ku buso bwa ...
Gusiga icyuma gishyushya icyuma gikozwe mu gihe cyo gusohora urumuri, gifite ubucucike buke bw'amashanyarazi n'ubucucike buke bwa plasma mu cyumba cyo gusiga. Ibi bituma ikoranabuhanga rya magnetron rigira ingaruka mbi nko kuba imbaraga nke zo guhuza icyuma, igipimo gito cya ionization y'icyuma, ndetse no kuba nta bushobozi bwo gushyiramo...
1. Ni ingirakamaro mu gusuka no gushyiramo icyuma gikingira umuriro. Impinduka zihuse mu gusuka kwa electrode zishobora gukoreshwa mu gusukamo icyuma gikingira umuriro mu buryo butaziguye kugira ngo haboneke icyuma gikingira umuriro. Iyo hakoreshejwe isoko y'amashanyarazi ya DC mu gusuka no gushyiramo icyuma gikingira umuriro, icyuma gikingira umuriro kizabuza ioni nziza ku...
TiN ni yo mwambaro ukomeye wa mbere ukoreshwa mu gukata ibikoresho, ufite ibyiza nko gukomera cyane, gukomera cyane, no kudashira. Ni yo mwambaro ukomeye wa mbere wakoreshejwe mu nganda kandi ukoreshwa cyane, ukoreshwa cyane mu bikoresho bitwikiriye n'ibipfundikizo bitwikiriye. Imwambaro ukomeye wa TiN wabanje gushyirwa ku bushyuhe bwa 1000 ℃...