Akụrụngwa ahụ nwere sistemu mkpuchi sputtering magnetron + sistemụ mkpuchi mkpịsị aka mkpịsị aka + SPEEDFLO mechiri emechi.
Akụrụngwa ahụ na-anabata teknụzụ ịgbasa magnetron ọkara yana teknụzụ mgbochi mkpịsị aka mkpịsị aka. Ọ bụ akụrụngwa mkpuchi nano emebere nke ọma maka ndebiri laser ziri ezi. Mgbe template na-ekpuchi nano mkpuchi, a oyi akwa nke ultra-low esemokwu coefficient mkpuchi nwere ike kpụrụ n'elu ya, nke na-agaghị kpụkọrọ akpụkọ mgbe ebi akwụkwọ solder mado na ọ dịghị mfe na-arapara n'ahụ solder mado, ka n'ụzọ dị irè na-echebe elu nke laser template na mma ya ọrụ ndụ na ezi ziri ezi.
Ngwa dị mma maka ngwaahịa igwe anaghị agba nchara na kristal kristal. Ọ nwere ike itinye oxides dị iche iche na ọla ndị dị mfe, ma kwadebe ihe nkiri agba na-egbuke egbuke, ihe nkiri agba gradient na ihe nkiri dielectric ndị ọzọ.
| ZCL0608 | ZCL1009 | ZCL1112 | ZCL1312 |
| Φ600*H800(mm) | φ1000*H900(mm) | φ1100*H1250(mm) | φ1300*H1250(mm) |
| ZCL1612 | ZCL1912 | ZCL1914 | ZCL1422 |
| φ1600*H1250(mm) | φ1900*H1250(mm) | φ1900*H1400(mm) | φ1400*H2200(mm) |