Hauv kev siv tshuab txheej txheej saum npoo av siab heev, muaj ib lub npe uas sawv tawm - lub tshuab txheej txheej magnetron sputtering vacuum. Cov khoom siv tshiab no ua rau muaj kev lag luam thoob plaws hauv kev lag luam los ntawm kev xa cov kev daws teeb meem txheej txheej saum npoo av uas txhim khu kev qha thiab ua tau zoo. Txij li cov khoom siv hluav taws xob mus rau cov tsheb, txij li aerospace mus rau optics, cov tshuab txheej txheej magnetron sputtering vacuum tab tom hloov pauv txoj kev uas peb xav txog cov txheej txheej saum npoo av.
Yog li, lub tshuab nqus tsev magnetron sputtering yog dab tsi tiag? Nws yog ib lub cuab yeej zoo heev uas siv cov txheej txheem magnetron sputtering los tsim cov zaj duab xis nyias nyias ntawm ntau qhov chaw. Cov txheej txheem no suav nrog kev muab cov khoom siv uas yuav tsum tau coated rau hauv lub tshuab nqus tsev thiab foob pob nrog cov ions muaj zog siab. Cov ions no ua rau cov atoms hauv cov khoom siv raug tso tawm, uas tom qab ntawd tsim cov zaj duab xis nyias nyias ntawm qhov chaw.
Lub tshuab nqus tsev magnetron sputtering muaj ntau yam zoo dua li cov txheej txheem ib txwm muaj. Ua ntej, nws muab kev sib npaug zoo dua thiab kev nplaum zoo dua. Qhov no txhais tau tias lub tshuab tsim cov zaj duab xis uas sib npaug, du thiab sib txuas nrog lub substrate. Yog li ntawd, qhov chaw coated qhia txog kev ruaj khov zoo dua, kev tiv thaiv corrosion thiab cov khoom siv kho qhov muag zoo dua.
Qhov thib ob, lub tshuab nqus tsev magnetron sputtering muaj ntau yam siv tau. Nws siv tau los tso ntau yam khoom siv, suav nrog cov hlau, cov khoom sib xyaw, cov khoom siv ceramic, thiab txawm tias cov organic compounds. Qhov kev hloov pauv no ua rau cov chaw tsim khoom tuaj yeem kho cov txheej txheem raws li qhov xav tau tshwj xeeb, txawm tias yuav txhim kho kev coj ua hluav taws xob hauv cov khoom siv hluav taws xob lossis muab kev tiv thaiv khawb rau cov iav tsom iav.
Tsis tas li ntawd xwb, cov thev naus laus zis siab heev no yog tus phooj ywg rau ib puag ncig. Lub tshuab nqus tsev hauv lub tshuab txheej txheej tiv thaiv cov pa phem lossis cov khoom tsis zoo, ua rau nws yog qhov kev xaiv ruaj khov. Tsis tas li ntawd xwb, kev tswj hwm cov txheej txheem txheej txheej kom raug txo cov khoom pov tseg, ua rau nws yog qhov kev daws teeb meem pheej yig.
Cov teb siv ntawm magnetron sputtering nqus tsev txheej tshuab yog dav thiab ntau yam. Hauv kev lag luam hluav taws xob, nws ua lub luag haujlwm tseem ceeb hauv kev tsim cov txheej txheem conductive rau cov integrated circuits, sensors thiab kov cov ntxaij vab tshaus. Hauv kev lag luam tsheb, nws tuaj yeem txhim kho kev ua tau zoo thiab kev ruaj khov ntawm ntau yam khoom, xws li cov khoom siv cav thiab cov khoom siv kho kom zoo nkauj. Hauv kev lag luam aerospace, cov thev naus laus zis muab cov txheej txheem tiv thaiv rau cov hniav turbine thiab lwm yam khoom tseem ceeb ua haujlwm hauv qhov xwm txheej hnyav.
Kev lag luam kho qhov muag kuj tau txais txiaj ntsig zoo los ntawm cov tshuab nqus tsev magnetron sputtering. Cov txheej txheem kho qhov muag zoo yog qhov tseem ceeb rau cov iav, daim iav, thiab lwm yam khoom siv kho qhov muag. Los ntawm kev tswj hwm cov txheej txheem tso tawm kom raug, cov tshuab no ua kom ntseeg tau tias cov txheej txheem kho qhov muag muaj cov khoom siv spectral xav tau, xws li tiv thaiv kev cuam tshuam, kev cuam tshuam lossis kev xaiv lub teeb lim.
Raws li qhov kev thov rau cov txheej txheem pleev xim saum npoo av txuas ntxiv loj hlob, cov txheej txheem nqus tsev magnetron sputtering tseem nyob rau pem hauv ntej ntawm thev naus laus zis. Nws lub peev xwm los tsim cov txheej txheem zoo, sib xws thiab ruaj khov ua rau nws yog ib qho cuab yeej tseem ceeb hauv ntau yam lag luam. Txij li kev txhim kho kev ua tau zoo ntawm cov khoom siv hluav taws xob mus rau kev ua kom cov khoom siv tsheb ua haujlwm tau zoo dua, cov thev naus laus zis no ua rau cov chaw tsim khoom thawb cov ciam teb ntawm qhov ua tau.
– Tsab xov xwm no yog tso tawm los ntawmlub tshuab nqus tsev txheej tshuab chaw tsim khoomGuangdong Zhenhua
Lub sijhawm tshaj tawm: Lub Kaum Hli-24-2023