Ohlakeni lobuchwepheshe be-imishini yokumboza nge-vacuum,ukwakheka kokuphinda kukhiqizwe kabusha akuyona indlela yokulinganisa ewusizo, kodwa ikhono eliyisisekelo elifakwe kuyo yonke intuthuko yemishini, ukuqalwa kwenqubo, kanye nokukhiqizwa ngobuningi. Ikakhulukazi ezisetshenzisweni ezifana nezingxenye zangaphakathi zezimoto, izakhi zokukhanya, namafilimu asebenzayo—lapho ukuhambisana okuphezulu kuyadingeka—ukuphinda kukhiqizwe kabusha kwemishini kuchaza ngqo ukulawulwa kwezakhiwo zefilimu kanye nomkhawulo ophezulu wokukhiqiza okungandiswa.
Ngokombono wenqubo, ukumbozwa kwe-vacuum kuwubuchwepheshe bokukhiqiza obuncike kakhulu ekulawulweni okuhlangene kwamapharamitha amaningi. Kungakhathaliseki ukuthi izinqubo zokufakwa kwe-vapor ngokomzimba (i-PVD) ezifana nokuphuma kwe-magnetron kanye nokuhwamuka kokushisa, noma ezinhlelweni zokufakwa kwe-hybrid, isakhiwo sefilimu, ukusebenza kwe-optical, kanye nokunamathela konke kulawulwa yiziguquguquko ezifaka phakathi izinga le-vacuum, ubuningi be-plasma, izinga lokufakwa, izinga lokushisa le-substrate, kanye nesimo sethagethi. Kulo mongo, inhloso eyinhloko yomklamo wokuphinda ukhiqize ukuqinisekisa ukuthi la mapharamitha abalulekile ahlala ehambisana kakhulu kuzo zonke izinhlobo ezahlukene kanye namafasitela esikhathi ngokusebenzisa ukulungiswa okuhlelekile kokwakhiwa kwemishini, izinhlelo zokulawula, kanye nezindlela zenqubo—ngaleyo ndlela kuvumela ukusebenza kwefilimu okuphindaphindwayo.
Ukuphinda kukhiqizwe kubonakala okokuqala ekuzinzeni kohlelo lwe-vacuum. Ijika lokupompa elibikezelwayo kanye nezinga eliqinile le-vacuum lakha isisekelo sendawo yenqubo ehambisanayo. Ngokuhlanganisa kahle amaphampu okusekela, amaphampu e-Roots, namaphampu ane-vacuum ephezulu (njengephampu ye-turbomolecular noma i-diffusion), kanye namasu okulawula ingcindezi aqondile, ukuhlukahluka phakathi kwemijikelezo kungancishiswa ngempumelelo. Ngaphezu kwalokho, ukwakheka kwegumbi elilinganayo kanye nokusatshalaliswa kokugeleza kwegesi okufanayo kudlala indima ebalulekile ekuzinzeni kwe-plasma kanye nokufana kwefilimu, okwakha isisekelo sesakhiwo sokuphinda kukhiqizwe.
Ezinhlelweni zomthombo wokufaka, kungakhathaliseki ukuthi kusekulawulweni kwensimu yokushisa kwemithombo yokuhwamuka noma ukufana kwensimu yamagnetic yama-magnetron sputtering target, ukumiswa okujwayelekile kakhulu kubalulekile ukuze kulondolozwe ubudlelwano obuzinzile phakathi kokufakwa kwamandla nokukhishwa kwezinto. Isibonelo, ukuhambisana kwamaphrofayili okuguguleka kwenhloso ekufakweni kwe-sputtering kuthinta ngqo izinga lokufakwa kanye nokusatshalaliswa kobukhulu, kuyilapho ezinqubweni zokuhwamuka, impendulo eqondile phakathi kwamandla okushisa kanye nezinga lokuhwamuka inquma ukunemba kokulawulwa kobukhulu. Lezi zici zidinga ukuqinisekiswa okuqinile kokuphindaphinda esigabeni sokuklama, kunokuthembela ekunxephezelweni kwangemva kwenqubo.
Ukwenziwa kwedijithali kanye nokuguqulwa kwezinhlelo zokulawula kusekela ngokwengeziwe ukwakheka kokuphinda kukhiqizwe. Ngama-sensor anembe kakhulu, ukutholwa kwedatha ngesikhathi sangempela, kanye nama-algorithms okulawula impendulo, amapharamitha enqubo ebalulekile angaqashwa futhi alungiswe ngokuguquguqukayo kuma-loop avaliwe, okunciphisa kakhulu ukuguquguquka okubangelwa ukusebenza ngesandla. Ngesikhathi esifanayo, izinhlelo zokuphatha iresiphi ezijwayelekile zivumela ukushintsha komkhiqizo okusheshayo ngenkathi kuqinisekiswa ukulandeleka okugcwele kanye nokuphindaphindwa okunembile kwamapharamitha enqubo yomlando, okwakha umgogodla wokukhiqizwa okukhuliswayo.
Ngale kokusebenza kwemishini eyodwa, ukuphindaphindwa kabusha nakho kuyitshe lesisekelo sokuvumelana ezingeni lomugqa wokukhiqiza. Ezinhlelweni zokumboza eziqhubekayo ezinamakamelo amaningi kanye neziteshi eziningi, ukuvumelanisa amapharamitha kanye nokuvumelanisa kwe-takt phakathi kwamamojula kuthinta ngqo ukugeleza kanye nokukhiqiza. Ngakho-ke, ukuphindaphindwa kabusha kumele kufakwe ekwakhiweni kwezinga lesistimu—kusukela emakamelweni ngamanye kuya emigqeni yokukhiqiza ehlanganiswe ngokugcwele—ukuze kugwenywe ukungalingani okubangelwa ukwenza ngcono okuhlukile.
Ngokombono wezinhlelo zokusebenza zokugcina, inani lokuphindaphindeka libonakala kuzo zonke izilinganiso. Ezingxenyeni zangaphakathi zezimoto, ukuhambisana kombala wefilimu kanye nokufana okucwebezelayo kuthinta ngqo ikhwalithi ebonwayo; ekumbozweni okubonakalayo, ukuphambuka kobukhulu kungaholela ekushintsheni okuhlelekile kokudlulisa nokubonakalisa; ekumbozweni okusebenzayo, ukuguquguquka kokunamathela kanye nokuqina kuthinta ukuthembeka komjikelezo wokuphila komkhiqizo. Zonke lezi zinkomba zokusebenza ekugcineni zincike ekuphindaphindeni kwemishini yokumboza.
Empeleni, ukugcizelela ukwakheka kokukhiqiza kabusha akukhona nje "ukwenza into efanayo njalo," kodwa mayelana nokwakha ipulatifomu yokukhiqiza ebikezelwayo, elawulekayo, nephindaphindwayo ngaphakathi kwendawo yenqubo eyinkimbinkimbi, eguquguqukayo. Leli khono limelela umehluko obalulekile kwezobuchwepheshe bezinhlelo zokumboza i-vacuum ezithuthukisiwe kanye nesisekelo esibalulekile sokukhiqiza kwekhwalithi ephezulu, okukhulu.
-Lesi sihloko sishicilelwe nguumenzi wemishini yokumboza nge-vacuum I-Zhenhua Vacuum
Isikhathi sokuthunyelwe: Ephreli-17-2026