Isingeniso :
Siyakwamukela futhi ochungechungeni lwethu lwebhulogi ngenqubo ye-PVD (Physical Vapor Deposition)! Kulesi sihloko, sizongena ngokujulile ezinyathelweni eziyisisekelo ezidingekayo ukuze sithole imiphumela emihle kakhulu ngokufakwa kwe-PVD. Ngokwazi inqubo yokubeka i-PVD, ungathuthukisa ukuqina, ukumelana nokugqwala kanye nobuhle bemikhiqizo yakho. Sicela uhlanganyele nathi njengoba sihlola izici ezibalulekile ezinomthelela emiphumeleni ephumelelayo yokuhlanganisa i-PVD.
Ukuqonda i-PVD Deposition:
I-PVD deposition iyindlela esetshenziswa kabanzi yokufaka amafilimu amancanyana nezingubo zokumboza ezindaweni ezihlukahlukene njengezinsimbi, izitsha zobumba namapulasitiki. Le nqubo ihilela ukuhwamuka kwezinto eziqinile okulandelwa ukuminyanisa ku-substrate, kwakheka ifilimu elincanyana. Izembatho eziwumphumela ngokuvamile zibonisa izici ezithuthukisiwe ezinjengokuqina, ukumelana nemihuzuko nokubukeka okucwebezelayo.
Izinyathelo ezibalulekile zokuthuthukisa i-PVD deposition:
1. Ukulungiswa kwendawo: Ukulungiswa komphezulu kubalulekile ngaphambi kokuqala inqubo yokubeka i-PVD. Ukuhlanza ngokuphelele, ukucwenga kanye nokunciphisa i-substrate kuzosusa ukungcola, kuqinisekise ukunamathela okufanele futhi kuvimbele amaphutha. Indawo ehlanzekile ikhuthaza ukunamathela okungcono kokunamathela futhi ithuthukisa ikhwalithi iyonke yediphozithi.
2. Igumbi lokubeka i-PVD: Indawo ehlanzekile nelawulwayo ibalulekile ekubekweni ngempumelelo kwe-PVD. Igumbi lokubeka ligcinwa ngaphansi kwengcindezi ephansi kanye nezinga lokushisa elilawulwayo, okuvumela ama-athomu noma ama-molecule ahwamukile ukuthi ahambe ngokukhululeka ngaphandle kokuphazamiseka. Ukukhethwa okufanele kwemingcele yokubeka njengokucindezela, izinga lokushisa kanye nesikhathi sokubeka kuqinisekisa ukujiya kwefilimu okunembile kanye nokufana kwemiphumela emihle.
3. Ukukhethwa komthombo wokuhwamuka: Ukukhethwa komthombo wokuhwamuka kuthinta kakhulu inqubo yokubeka i-PVD. Izinto ezikhethiwe kufanele zibe nokuhlanzeka okuphezulu ukuze kuqinisekiswe ikhwalithi yefilimu enhle. Imithombo edumile yokuhwamuka ihlanganisa izikebhe ezishisisa ngokuqinile, imithombo ye-electron beam, noma i-magnetron sputtering cathodes, ngayinye elungiselelwe ukuhlangabezana nezidingo ezithile.
4. Ukuqapha ifilimu nokulawula ukushuba: Ukuqapha ngesikhathi sangempela nokulawula okunembayo kogqinsi lwefilimu kubalulekile ekubekweni kwe-PVD okungaguquki nokunembile. Ubuchwepheshe besimanje obufana ne-quartz crystal microbalances kanye nezinhlelo zokuqapha ezibonakalayo zivumela ukulawula okuthuthukisiwe kanye nokulungiswa ngesikhathi senqubo yokubeka. Ukugcina ubukhulu befilimu obanele kuqinisekisa ukusebenza okufunayo nokusebenza.
5. Ukwelashwa kwangemva kokufakwa: Ngemva kokuqedwa kokufakwa kwe-PVD, izinyathelo zokwelashwa zingathuthukisa izici zefilimu. I-Annealing, i-ion bombardment, noma i-ion etching izindlela ezisetshenziswa kakhulu zokuthuthukisa ukunamathela, ukuphela kwendawo, kanye nokuphumuza ingcindezi kwamafilimu afakiwe. Ukwelashwa okulungile kwangemuva kuqinisekisa ukuphila isikhathi eside nokusebenza kwezingubo ze-PVD.
Isikhathi sokuthumela: Jul-24-2023
