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Trending Products TOPCON Battery Coating Equipment - TGV Glass Through Hole Coating Inline – Zhenhua

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PRODUCT DESCRIPTION

Equipment advantage

1. Deep Hole Coating Optimization

Exclusive Deep Hole Coating Technology: Zhenhua Vacuum’s self-developed deep hole coating technology can achieve a superior aspect ratio of 10:1 even for tiny apertures as small as 30 micrometers, overcoming the coating challenges of complex deep hole structures.

 

2. Customizable, Supports Different Sizes

Supports glass substrates of various sizes, including 600×600mm / 510×515mm or larger specifications.

 

3. Process Flexibility, Compatible with Multiple Materials

The equipment is compatible with conductive or functional thin film materials such as Cu, Ti, W, Ni, and Pt, meeting different application needs for conductivity and corrosion resistance.

 

4. Stable Equipment Performance, Easy Maintenance

The equipment is equipped with an intelligent control system that enables automatic parameter adjustment and real-time monitoring of film thickness uniformity; it adopts a modular design for easy maintenance, reducing downtime.

 

Application: Can be used for TGV/TSV/TMV advanced packaging, capable of achieving deep hole seed layer coating with an aspect ratio ≥10:1.

The machine can be designed according customers’ requirement Get A Quote

PRODUCT FEATURE

INDUSTRY APPLICATION

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