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Evaporation source design and use of the problem

Article source:Zhenhua vacuum
Read:10
Published:24-02-23

In the process of vacuum evaporation and vacuum ion, the membrane material will be in 1000 ~ 2000C high temperature, so that its Yanfa vaporization of the device, known as the evaporation source. Evaporation source more types, garlic hair source vaporization of membrane materials are different principles. However, in terms of its application characteristics, in the design or application, the main consideration should be given to the following aspects:

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① evaporation source should meet the membrane material evaporation with a large evaporation rate, and can store a sufficient number of membrane material;

② Evaporation source should have a better and longer service life;

③ Evaporation source should be used in a wide range of both evaporation of metals or alloys (such as Al, Ti, Fe. Co. Cr)  as well as compounds (e.g. SiO, SiO2, Zns etc.);

④ Evaporation source should strive to be simple in structure, easy to make, easy to use and maintain, and inexpensive to operate.

–This article is released by vacuum coating machine manufacturer Guangdong Zhenhua


Post time: Feb-23-2024