Hauv cov txheej txheem nqus tsev, qhov kub ntawm cov substrate tsis yog tsuas yog ib qho txheej txheem thib ob xwb. Nws cuam tshuam ncaj qha rau cov qauv txheej txheem, kev nplaum, kev ntxhov siab ntawm zaj duab xis, cov khoom siv kho qhov muag, cov qauv ntawm qhov chaw, thiab thaum kawg qhov sib xws thiab kev ntseeg tau ntawm cov khoom tiav. Raws li cov txheej txheem txheej txheem txuas ntxiv mus rau qhov siab dua ntawm cov nqi tso tawm, cov zaj duab xis ntau txheej tuab dua, thiab cov txheej txheem ua haujlwm nyuaj dua, kev tswj hwm qhov kub ntawm cov substrate tau dhau los ua ib feem tseem ceeb ntawm kev txhim kho cov txheej txheem thiab kev tsim khoom siv.
Rau cov txheej txheem txheej sib txawv, qhov kub ntawm lub substrate muaj lub qhov rais txheej txheem tsim nyog. Qhov kub nce siab dhau heev yuav ua rau muaj kev hloov pauv thermal, tsis ruaj khov ntawm qhov loj me, cov substrate discoloration, cov txheej tsis zoo, lossis kev puas tsuaj ntawm cov khoom siv uas rhiab rau qhov kub. Ntawm qhov tod tes, qhov kub ntawm lub substrate qis dhau heev yuav txo qhov kev txav mus los ntawm adatom ntawm qhov chaw ntawm lub substrate, ua rau cov zaj duab xis tsis zoo, tsis txaus lo, thiab kev ua haujlwm tsis ruaj khov ntawm cov txheej txheem. Yog li ntawd, kev tswj hwm thermal zoo tsis yog tsuas yog hais txog "ua kom lub substrate txias," tab sis hais txog kev tswj hwm lub substrate hauv qhov kub thiab txias tsim nyog thoob plaws hauv cov txheej txheem tso dej.
Vim li cas qhov kub ntawm cov substrate thiaj li nce siab thaum lub sijhawm nqus tsev txheej?
Thaum lub sijhawm tso cov khoom siv nqus tsev, lub substrate raug rau ntau lub zog nkag. Hauv cov txheej txheem xws liasKev ua kom sov, kev ua kom hluav taws xob tawg, magnetron sputtering, thiab cathodic arc deposition,lub substrate tsis yog tsuas yog tau txais lub zog cuam tshuam nrog cov txheej txheem tuaj txog, tab sis kuj tseem muaj cua sov thiab, nyob ntawm cov txheej txheem, lub zog tawg ntawm cov khoom me me.
Piv txwv li, hauv kev ua kom sov thiab kev ua kom hluav taws xob los ntawm lub teeb, kev tawg los ntawm qhov chaw ua kom sov thiab cov khoom cua sov hauv lub chamber tuaj yeem pab txhawb rau qhov kub ntawm lub substrate. Hauv magnetron sputtering thiab cathodic arc deposition, cov ions muaj zog thiab cov khoom me me uas tsim tawm hauv plasma tuaj yeem hloov lub zog ntxiv rau lub substrate. Thaum lub sijhawm tso tawm nce ntxiv, cov cua sov no sib sau ua ke, ua rau qhov kub ntawm lub substrate nce ntxiv tas li.
Cov yam ntxwv ntawm lub substrate nws tus kheej kuj tseem ceeb heev. Cov ntaub ntawv uas muaj cov thermal conductivity sib txawv, lub peev xwm kub tshwj xeeb, tuab, geometry, thiab qhov chaw emissivity qhia txog kev ua kom sov thiab txias sib txawv. Cov khoom yas nyias nyias, cov khoom siv optical, thiab cov khoom txhaj tshuaj precision feem ntau muaj lub qhov rais thermal txheej txheem nqaim dua li cov khoom siv hlau ib txwm muaj.
Yog li ntawd, kev tswj qhov kub ntawm cov substrate yuav tsum tau xav txog los ntawm qhov kev xav ntawm tag nrho qhov sib npaug ntawm qhov kub ntawm lub tshuab nqus tsev, es tsis txhob cia siab rau ib qho kev ntsuas txias.
Lub Hauv Paus ntawm Kev Tswj Kub: Tswj Kev Nkag Kub thiab Kev Tshem Kub
Lub hauv paus ntsiab lus ntawm kev tswj qhov kub ntawm lub substrate yog los tsim kom muaj kev sib npaug ntawm cov cua sov nkag thiab cov cua sov tawm.
Los ntawm sab khoom siv, thawj kauj ruam yog kom txo qhov tsis tsim nyog ntawm cov hluav taws xob thermal uas ncav cuag lub substrate. Qhov layout thiab qhov chaw sib piv ntawm qhov chaw evaporation, sputtering cathode, substrate holder, shielding components, thiab chamber phab ntsa tuaj yeem cuam tshuam rau qhov thermal load uas workpiece ntsib. Qhov deb ntawm qhov chaw mus rau substrate, kev tsim shielding, thiab kev teeb tsa cov txheej txheem tuaj yeem txo qhov radiant cua sov ncaj qha thaum tswj qhov ceev deposition uas xav tau.
Tib lub sijhawm ntawd, lub substrate fixture ua lub luag haujlwm tseem ceeb hauv kev tswj cua sov. Lub fixture uas tsim tau zoo tuaj yeem txhim kho kev coj cua sov ntawm lub substrate thiab lub substrate holder txias, ua rau cov cua sov uas tau khaws cia tuaj yeem hloov pauv tau zoo dua ntawm qhov workpiece. Rau cov ntawv thov uas muaj cov substrates uas rhiab rau qhov kub thiab txias, cov substrate holders uas txias los yog tswj qhov kub thiab txias tuaj yeem muab qhov xwm txheej thermal boundary ruaj khov dua thoob plaws hauv lub voj voog deposition.
Txawm li cas los xij, lub peev xwm txias ib leeg tsis lav qhov kub zoo. Kev txias dhau kuj tseem yuav cuam tshuam rau cov txheej txheem tso dej los ntawm kev hloov pauv qhov kub ntawm qhov chaw, tus cwj pwm condensation, zaj duab xis nucleation, thiab cov yam ntxwv loj hlob ntawm zaj duab xis. Yog li ntawd, lub hom phiaj yuav tsum yog los tsim kom muaj qhov kub ntawm cov substrate ruaj khov thiab tswj tau es tsis yog tsuas yog ua kom muaj peev xwm txias ntau tshaj plaws.
Cov Txheej Txheem Txheej Txheem Tseem Txheeb Xyuas Qhov Thermal Load
Qhov kub ntawm cov substrate muaj feem cuam tshuam nrog cov kev teeb tsa deposition. Lub zog deposition, qhov ceev deposition, lub zog ua haujlwm, bias voltage, arc current, sputtering power, duty cycle, thiab coating time txhua yam tuaj yeem cuam tshuam rau qhov ntau ntawm lub zog hloov mus rau lub substrate.
Piv txwv li, kev nce lub zog tso tawm tuaj yeem ua rau tus nqi tso tawm nce ntxiv, tab sis nws kuj tuaj yeem ua rau lub nra hnyav ntawm lub substrate nce ntxiv. Kev nce lub substrate bias tuaj yeem ua rau ion bombardment nce ntxiv thiab txhim kho zaj duab xis densification, tib lub sijhawm ua rau lub zog nkag mus rau lub substrate nce ntxiv. Yog li ntawd, kev ua kom zoo dua ntawm cov txheej txheem yuav tsum muaj kev sib npaug ntawm kev ua haujlwm ntawm kev tso tawm, cov khoom ntawm zaj duab xis, thiab lub nra hnyav thermal.
Rau cov txheej txheej ntau txheej, yuav tsum tau saib xyuas qhov kub thiab txias. Txawm tias qhov kub nce thaum lub sijhawm tso ib txheej yog nyob rau hauv qhov ntau thiab tsawg uas txais tau, kev tso ntau txheej tas mus li tuaj yeem ua rau muaj cua sov sib sau ua ke. Kev qhia txog lub sijhawm txias kom tsim nyog, kev ua kom zoo dua cov txheej txheem tso txheej, lossis kev kho cov txheej txheem ntawm cov theem txheej sib txawv tuaj yeem pab tiv thaiv kev sib sau ua ke ntawm qhov kub thiab txias ntau dhau.
Hauv kev tsim khoom tiag tiag, lub qhov rais txheej txheem zoo tshaj plaws feem ntau yog tsim los ntawm kev sib xyaw ua ke ntawm kev saib xyuas qhov kub ntawm cov substrate, kev tswj tus nqi deposition, kev ua kom zoo dua ntawm cov txheej txheem, thiab kev txheeb xyuas kev ua haujlwm ntawm cov txheej txheem.
Kev Sib Npaug Kub yog qhov tseem ceeb npaum li Qhov Kub Tshaj Plaws
Rau kev tsim khoom ntau, kev tswj qhov kub siab tshaj plaws ntawm cov substrate tsuas yog ib feem ntawm qhov teeb meem xwb. Kev sib npaug ntawm qhov kub thoob plaws tag nrho cov substrate nto thiab ntawm cov workpieces sib txawv kuj tseem ceeb ib yam.
Yog tias thaj chaw sib txawv ntawm ib qho workpiece muaj cov cua sov sib txawv heev, qhov sib txawv ntawm cov xwm txheej loj hlob ntawm zaj duab xis yuav ua rau muaj kev hloov pauv ntawm cov tuab ntawm zaj duab xis, cov qauv me me, kev ua haujlwm ntawm qhov muag, xim, qhov nyuaj, lossis kev ntxhov siab seem. Ntawm cov kab ntau lawm, qhov kub tsis sib xws tuaj yeem tshwm sim ua qhov sib txawv ntawm ib pawg mus rau ib pawg txawm tias cov txheej txheem nominal tseem tsis hloov pauv.
Qhov no yog vim li cas kev tig ntawm cov substrate, kev tsim cov khoom siv, kev teeb tsa chav, kev faib tawm qhov chaw, thiab kev teeb tsa txoj kab txias yuav tsum tau txiav txim siab ua ib qho kev sib koom ua ke. Rau cov ntawv thov txheej txheej loj lossis cov khoom siv thauj khoom ntau, qhov chaw cua sov hauv chav yuav tsum tau soj ntsuam ua ke nrog kev faib tawm ntawm cov khoom kom ua tiav ob qho tib si zaj duab xis thiab qhov kub thiab txias sib xws.
Kev Tswj Kub Yuav Tsum Tau Koom Ua Ke Rau Hauv Kev Tsim Khoom Siv Thiab Txheej Txheem
Yuav tsum pib siv txoj kev tswj qhov kub ntawm cov khoom siv thaum lub sijhawm tsim cov khoom siv es tsis txhob xav txog qhov teeb meem tom qab kev tsim khoom.
Lub chamber txheej, qhov chaw ua kom cov dej noo lossis cov dej tawg, lub substrate holder, lub tshuab txias, cov qauv tiv thaiv, thiab lub tshuab tswj yuav tsum ua haujlwm ua ke los tswj cov thermal behavior ntawm lub substrate. Ntawm theem txheej txheem, cov kev txwv kub yuav tsum tau suav nrog rau hauv kev tsim cov zaub mov deposition, nrog rau cov lus teb thermal ntawm lub substrate tiag tiag siv ua qhov tseem ceeb rau kev txiav txim siab cov txheej txheem.
Rau cov khoom yas uas rhiab heev rau qhov kub thiab txias, cov khoom siv kho qhov muag, cov khoom siv hluav taws xob, thiab lwm yam khoom siv precision, qhov kub ntawm cov khoom siv yuav tsum tau txhais raws li cov yam ntxwv ntawm cov khoom siv thiab cov kev cai siv zaum kawg. Lub hom phiaj tsis yog tsuas yog ua kom tiav qhov kev tso dej xwb, tab sis kom ntseeg tau tias cov khoom siv tseem nyob hauv nws lub qhov rais thermal uas tso cai thaum tswj hwm qhov kev ua tau zoo ntawm cov txheej txheem.
Los ntawm "Kev Txo Kub" mus rau "Kev Tswj Xyuas Txheej Txheem Thermal"
Raws li cov ntawv thov txheej txheem nqus tsev ua ntau yam sib txawv, kev tswj qhov kub ntawm cov khoom siv hauv qab tau hloov pauv los ntawm qhov teeb meem txias yooj yim mus rau qhov teeb meem kev tswj hwm cov txheej txheem thermal.
Ib txoj kev tsim cov txheej txheem nqus tsev zoo yuav tsum xav txog qhov twg cua sov los, cua sov kis mus li cas, qhov twg nws sib sau ua ke, thiab nws tuaj yeem tso tawm tau zoo npaum li cas. Los ntawm kev sib koom ua ke cov khoom siv, kev tsim khoom siv, lub peev xwm txias, cov txheej txheem tso tawm, kev tig ntawm cov khoom siv, thiab cov txheej txheem sequencing, nws muaj peev xwm tsim kom muaj ib puag ncig thermal ruaj khov dua rau kev tso cov txheej txheem.
Rau cov tuam txhab tsim cov txheej txheem, lub hom phiaj kawg tsis yog nrhiav kom qhov kub qis tshaj plaws ntawm cov khoom siv, tab sis kom tswj tau cov khoom siv hauv qhov txheej txheem kom ruaj khov, rov ua dua, thiab rov ua dua. Qhov no muab lub hauv paus txhim khu kev qha dua rau kev nplaum cov txheej txheem, qhov ceev ntawm zaj duab xis, kev ua haujlwm ntawm qhov muag, cov khoom siv kho tshuab, thiab kev sib xws ntawm cov khoom tsim tawm.
Zhenhua Vacuum txuas ntxiv mus txhim kho cov khoom siv nqus tsev txheej thiab cov txheej txheem daws teeb meem nyob ib puag ncig qhov xav tau tiag tiag ntawm kev tsim khoom, kev koom ua ke ntawm kev tswj hwm thermal rau hauv kev tsim khoom siv thiab kev txhim kho cov txheej txheem los pab cov neeg siv khoom ua tiav cov txheej txheem zoo ruaj khov, kev tsim khoom zoo dua, thiab kev tsim khoom ntau dua.
-Tsab xov xwm no tau luam tawm byChaw tsim khoom siv nqus tsev txheej Zhenhua Nqus Tsev
Lub sijhawm tshaj tawm: Lub Yim Hli-20-2026