Equipment advantage
1. Deep Hole Coating Optimization
Exclusive Deep Hole Coating Technology: Zhenhua Vacuum’s self-developed deep hole coating technology can achieve a superior aspect ratio of 10:1 even for tiny apertures as small as 30 micrometers, overcoming the coating challenges of complex deep hole structures.
2. Customizable, Supports Different Sizes
Supports glass substrates of various sizes, including 600×600mm / 510×515mm or larger specifications.
3. Process Flexibility, Compatible with Multiple Materials
The equipment is compatible with conductive or functional thin film materials such as Cu, Ti, W, Ni, and Pt, meeting different application needs for conductivity and corrosion resistance.
4. Stable Equipment Performance, Easy Maintenance
The equipment is equipped with an intelligent control system that enables automatic parameter adjustment and real-time monitoring of film thickness uniformity; it adopts a modular design for easy maintenance, reducing downtime.
Application: Can be used for TGV/TSV/TMV advanced packaging, capable of achieving deep hole seed layer coating with an aspect ratio ≥10:1.
The cathode of the equipment adopts the dual drive technology of front coil and permanent magnet superposition, and cooperates with the anode layer ion source etching system and three-dimensional m...
Vacuum plasma cleaning equipment adopts integrated structure, equipped with RF ion cleaning system, fully automatic control, convenient operation and maintenance. The RF high-frequency generator ca...
The equipment is a vertical double door structure. It is a composite equipment integrating DC magnetron sputtering coating technology, resistance evaporation coating technology, CVD coating technol...
Optional models Vertical multifunctional coating production line Vertical decorative film coating production line
In the vacuum state, place the workpiece on the cathode of low-pressure glow discharge and inject appropriate gas. At a certain temperature, a coating is obtained on the surface of the workpiece by...
In the vacuum chamber, the coating material is vaporized and deposited on the substrate by using the resistance heating method, so that the surface of the substrate can obtain metal texture and ach...
The vacuum coating chamber of the chemical vapor deposition equipment adopts an independent double-layer water-cooling structure, which is efficient and uniform in cooling, and has a safe and stabl...
Vacuum plasma cleaning equipment adopts integrated structure, equipped with RF ion cleaning system, fully automatic control, convenient operation and maintenance. The RF high-frequency generator ca...
Optional models Vertical multifunctional coating production line Vertical decorative film coating production line
Vacuum plasma cleaning equipment adopts integrated structure, equipped with RF ion cleaning system, fully automatic control, convenient operation and maintenance. The RF high-frequency generator ca...
The equipment adopts the cathode arc evaporation ion coating technology, which has the characteristics of fast deposition rate, high energy and high metal ionization rate. The cathode arc can be co...
The large-scale metal anti fingerprint coating equipment is equipped with cathode arc ion coating system, medium frequency magnetron sputtering coating system and anti fingerprint coating system, w...
The large-scale metal anti fingerprint coating equipment is equipped with cathode arc ion coating system, medium frequency magnetron sputtering coating system and anti fingerprint coating system, w...
The equipment adopts the electron beam evaporation technology. Electrons are emitted from the cathode filament and focused into a certain beam current, which is accelerated by the potential between...
ITO / ISI horizontal continuous coating production line is a large planar magnetron sputtering continuous production equipment, which adopts modular design to facilitate future expansion and upgrad...
Vacuum plasma cleaning equipment adopts integrated structure, equipped with RF ion cleaning system, fully automatic control, convenient operation and maintenance. The RF high-frequency generator ca...
Equipment advantages: The Large Flat Optical Coating Production Line is suitable for various large flat products. The production line can achieve up to 14 layers of precision optical coatings with ...
The large-scale metal anti fingerprint coating equipment is equipped with cathode arc ion coating system, medium frequency magnetron sputtering coating system and anti fingerprint coating system, w...
The equipment adopts the cathode arc evaporation ion coating technology, which has the characteristics of fast deposition rate, high energy and high metal ionization rate. The cathode arc can be co...
The coating line adopts modular structure, which can increase the chamber according to the process and efficiency requirements, and can be coated on both sides, which is flexible and convenient. Eq...
Vacuum plasma cleaning equipment adopts integrated structure, equipped with RF ion cleaning system, fully automatic control, convenient operation and maintenance. The RF high-frequency generator ca...
The large-scale metal anti fingerprint coating equipment is equipped with cathode arc ion coating system, medium frequency magnetron sputtering coating system and anti fingerprint coating system, w...
The equipment mainly adopts chemical vapor deposition to prepare oxide film, which has the characteristics of fast deposition rate and high film quality. As for the equipment structure, the double ...
The coating line adopts modular structure, which can increase the chamber according to the process and efficiency requirements, and can be coated on both sides, which is flexible and convenient. Eq...
Vacuum plasma cleaning equipment adopts integrated structure, equipped with RF ion cleaning system, fully automatic control, convenient operation and maintenance. The RF high-frequency generator ca...
With the national attention to industrial environmental protection, the water electroplating process is gradually abandoned. At the same time, with the rapid growth of demand in the automotive indu...
The vacuum coating chamber of the chemical vapor deposition equipment adopts an independent double-layer water-cooling structure, which is efficient and uniform in cooling, and has a safe and stabl...
This series of equipment converts the coating materials with low melting point and easy to evaporate into nano particles by heating in the medium frequency induction furnace or evaporation molybden...
The equipment adopts multi arc ion coating technology, which has the advantages of simple operation, fast pumping speed, high efficiency and good process repeatability. It is equipped with a double...
Sapphire film hard coating equipment is a professional equipment for depositing sapphire film. The equipment integrates three coating systems of medium frequency reactive magnetron sputtering + CVD...
The equipment mainly adopts chemical vapor deposition to prepare oxide film, which has the characteristics of fast deposition rate and high film quality. As for the equipment structure, the double ...
The equipment adopts the electron beam evaporation technology. Electrons are emitted from the cathode filament and focused into a certain beam current, which is accelerated by the potential between...
The large-scale anti fingerprint coating equipment for high-end sanitary ware is equipped with cathode arc ion coating system, medium frequency magnetron sputtering coating system and anti fingerpr...
The equipment mainly adopts chemical vapor deposition to prepare oxide film, which has the characteristics of fast deposition rate and high film quality. As for the equipment structure, the double ...
Sapphire film hard coating equipment is a professional equipment for depositing sapphire film. The equipment integrates three coating systems of medium frequency reactive magnetron sputtering + CVD...
The equipment is a vertical double door structure. It is a composite equipment integrating DC magnetron sputtering coating technology, resistance evaporation coating technology, CVD coating technol...
The equipment adopts the cathode arc evaporation ion coating technology, which has the characteristics of fast deposition rate, high energy and high metal ionization rate. The cathode arc can be co...
The equipment mainly adopts chemical vapor deposition to prepare oxide film, which has the characteristics of fast deposition rate and high film quality. As for the equipment structure, the double ...
The CF1914 equipment is equipped with medium frequency magnetron sputtering coating system + anode layer ion source + SPEEDFLO closed-loop control + crystal control monitoring system. The medium fr...
The equipment adopts the electron beam evaporation technology. Electrons are emitted from the cathode filament and focused into a certain beam current, which is accelerated by the potential between...
The equipment is a vertical double door structure. It is a composite equipment integrating DC magnetron sputtering coating technology, resistance evaporation coating technology, CVD coating technol...
The equipment adopts the electron beam evaporation technology. Electrons are emitted from the cathode filament and focused into a certain beam current, which is accelerated by the potential between...
Vacuum plasma cleaning equipment adopts integrated structure, equipped with RF ion cleaning system, fully automatic control, convenient operation and maintenance. The RF high-frequency generator ca...
The equipment is a vertical double door structure. It is a composite equipment integrating DC magnetron sputtering coating technology, resistance evaporation coating technology, CVD coating technol...
Vacuum plasma cleaning equipment adopts integrated structure, equipped with RF ion cleaning system, fully automatic control, convenient operation and maintenance. The RF high-frequency generator ca...
In the vacuum chamber, the coating material is vaporized and deposited on the substrate by using the resistance heating method, so that the surface of the substrate can obtain metal texture and ach...
The equipment integrates magnetron sputtering and resistance evaporation technology, and provides a solution for coating a variety of different substrates. The experimental coating equipment is mai...
The equipment integrates magnetron sputtering and resistance evaporation technology, and provides a solution for coating a variety of different substrates. The experimental coating equipment is mai...
The equipment adopts the cathode arc evaporation ion coating technology, which has the characteristics of fast deposition rate, high energy and high metal ionization rate. The cathode arc can be co...
Vacuum plasma cleaning equipment adopts integrated structure, equipped with RF ion cleaning system, fully automatic control, convenient operation and maintenance. The RF high-frequency generator ca...
The experimental roll to roll coating equipment adopts the coating technology combining magnetron sputtering and cathode arc, which meets the requirements of both film compactness and high ionizati...
The large-scale metal anti fingerprint coating equipment is equipped with cathode arc ion coating system, medium frequency magnetron sputtering coating system and anti fingerprint coating system, w...
Magnetron winding coating equipment is to use magnetron sputtering method to change the coating material into gaseous or ionic state in the vacuum environment, and then deposit it on the work-piece...
The cathode of the equipment adopts the dual drive technology of front coil and permanent magnet superposition, and cooperates with the anode layer ion source etching system and three-dimensional m...
With the rapid growth of the market demand for improving the wear resistance, lubrication, corrosion resistance and other properties of hard coatings, cathodic arc magnetic filtration ion coating e...
The equipment mainly adopts chemical vapor deposition to prepare oxide film, which has the characteristics of fast deposition rate and high film quality. As for the equipment structure, the double ...
The equipment integrates magnetron sputtering and resistance evaporation technology, and provides a solution for coating a variety of different substrates. The experimental coating equipment is mai...
The equipment is a vertical double door structure. It is a composite equipment integrating DC magnetron sputtering coating technology, resistance evaporation coating technology, CVD coating technol...
Optional models Vertical multifunctional coating production line Vertical decorative film coating production line
The equipment integrates magnetron sputtering and resistance evaporation technology, and provides a solution for coating a variety of different substrates. The experimental coating equipment is mai...
The equipment adopts the cathode arc evaporation ion coating technology, which has the characteristics of fast deposition rate, high energy and high metal ionization rate. The cathode arc can be co...
This series of equipment converts the coating materials with low melting point and easy to evaporate into nano particles by heating in the medium frequency induction furnace or evaporation molybden...
Vacuum plasma cleaning equipment adopts integrated structure, equipped with RF ion cleaning system, fully automatic control, convenient operation and maintenance. The RF high-frequency generator ca...
The equipment adopts the cathode arc evaporation ion coating technology, which has the characteristics of fast deposition rate, high energy and high metal ionization rate. The cathode arc can be co...
The experimental roll to roll coating equipment adopts the coating technology combining magnetron sputtering and cathode arc, which meets the requirements of both film compactness and high ionizati...
The cathode of the equipment adopts the dual drive technology of front coil and permanent magnet superposition, and cooperates with the anode layer ion source etching system and three-dimensional m...
With the national attention to industrial environmental protection, the water electroplating process is gradually abandoned. At the same time, with the rapid growth of demand in the automotive indu...
The CF1914 equipment is equipped with medium frequency magnetron sputtering coating system + anode layer ion source + SPEEDFLO closed-loop control + crystal control monitoring system. The medium fr...
Optional models Vertical multifunctional coating production line Vertical decorative film coating production line
With the rapid growth of mobile phone industry demand, the loading capacity of traditional optical coating machine can not meet this demand. ZHENHUA has launched magnetron sputtering optical coatin...
The equipment integrates magnetron sputtering and ion coating technology, and provides a solution for improving color consistency, deposition rate and stability of compound composition. According t...
The vacuum coating chamber of the chemical vapor deposition equipment adopts an independent double-layer water-cooling structure, which is efficient and uniform in cooling, and has a safe and stabl...
The equipment adopts the cathode arc evaporation ion coating technology, which has the characteristics of fast deposition rate, high energy and high metal ionization rate. The cathode arc can be co...
The equipment adopts the electron beam evaporation technology. Electrons are emitted from the cathode filament and focused into a certain beam current, which is accelerated by the potential between...
Vacuum plasma cleaning equipment adopts integrated structure, equipped with RF ion cleaning system, fully automatic control, convenient operation and maintenance. The RF high-frequency generator ca...
The equipment adopts the electron beam evaporation technology. Electrons are emitted from the cathode filament and focused into a certain beam current, which is accelerated by the potential between...
Vacuum plasma cleaning equipment adopts integrated structure, equipped with RF ion cleaning system, fully automatic control, convenient operation and maintenance. The RF high-frequency generator ca...
The equipment integrates magnetron sputtering and ion coating technology, and provides a solution to improve color consistency, deposition rate and stability of compound composition with unique whe...
The equipment integrates magnetron sputtering and resistance evaporation technology, and provides a solution for coating a variety of different substrates. The experimental coating equipment is mai...
With the rapid growth of the market demand for improving the wear resistance, lubrication, corrosion resistance and other properties of hard coatings, cathodic arc magnetic filtration ion coating e...
Vacuum plasma cleaning equipment adopts integrated structure, equipped with RF ion cleaning system, fully automatic control, convenient operation and maintenance. The RF high-frequency generator ca...
The cathode of the equipment adopts the dual drive technology of front coil and permanent magnet superposition, and cooperates with the anode layer ion source etching system and three-dimensional m...
The large-scale anti fingerprint coating equipment for high-end sanitary ware is equipped with cathode arc ion coating system, medium frequency magnetron sputtering coating system and anti fingerpr...
The equipment is equipped with magnetron sputtering coating system + anti fingerprint coating system + SPEEDFLO closed-loop control. The equipment adopts medium frequency magnetron sputtering techn...
This series of equipment converts the coating materials with low melting point and easy to evaporate into nano particles by heating in the medium frequency induction furnace or evaporation molybden...
