2022 Latest Design Pvd Semiconductor Equipment - Hardness film coating equipment – Zhenhua
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PRODUCT DESCRIPTION
The cathode of the equipment adopts the dual drive technology of front coil and permanent magnet superposition, and cooperates with the anode layer ion source etching system and three-dimensional multi angle fixture to realize multi station simultaneous work. Equipped with large diameter cathode arc, under the service condition of large current, the cathode arc has excellent cooling performance, fast arc spot movement speed, high ionization rate and fast deposition rate, which can efficiently deposit a denser and smoother coating, and its coating has more significant advantages in oxidation resistance and high temperature resistance.
The equipment can be coated with AlTiN / AlCrN / TiCrAlN / TiAlSiN / CrN and other high-temperature super hard coatings, which have been widely used in micro drilling, milling cutters, taps, rod-shaped tools, auto parts, medical devices and other fields.
Examples of coating properties:
| Coatings | Thickness (um) | Hardness (HV) | Max temp(℃) | Color | Application |
| Ta-C | 1-2.5 | 4000-6000 | 400 | Black | Graphite, carbon fiber, composites, aluminum and aluminum alloys |
| TiSiN | 1-3 | 3500 | 900 | Bronze | 55-60HRC stainless steel cutting, fine finishing |
| AlTiN-C | 1-3 | 2800-3300 | 1100 | Bluish grey | Low hardness stainless steel cutting, forming mould, stamping mould |
| CrAlN | 1-3 | 3050 | 1100 | Grey | Heavy cutting and stamping mould |
| CrAlSiN | 1-3 | 3520 | 1100 | Grey | 55-60HRC stainless steel cutting, fine finishing, dry cutting |
Optional models
| HDA0809 | HDA1200 |
| φ850*H900(mm) | φ1200*H600(mm) |
PRODUCT FEATURE
INDUSTRY APPLICATION
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