1, Isimiso sobuchwepheshe bokumboza nge-vacuum ion
Kusetshenziswa ubuchwepheshe bokukhipha i-arc ye-vacuum ekamelweni le-vacuum, ukukhanya kwe-arc kukhiqizwa ebusweni bezinto ze-cathode, okubangela ukuthi ama-athomu nama-ion akheke ezintweni ze-cathode. Ngaphansi kwesenzo sensimu kagesi, i-athomu kanye nemishayo ye-ion ihlasela ubuso bento yokusebenza njenge-anode ngesivinini esikhulu. Ngesikhathi esifanayo, igesi yokusabela ifakwa ekamelweni le-vacuum, bese kwakheka ungqimba lokumboza olunezakhiwo ezinhle kakhulu ebusweni bento yokusebenza.
2, Izici zokugqoka i-vacuum ion
(1) Ukunamathela okuhle kwesendlalelo sokumboza, ungqimba lwefilimu akulula ukuwa.
(2) Ukumbozwa okuhle okugoqekayo kanye nokumbozwa okuthuthukisiwe kwendawo.
(3) Ikhwalithi enhle yesendlalelo sokumboza.
(4) Izinga eliphezulu lokufakwa kanye nokwakheka kwefilimu okusheshayo.
(5) Uhla olubanzi lwezinto zokwakha ezifanelekile kanye nezinto zefilimu zokumboza
Imishini yokumboza ehlanganisiwe ye-magnetron ene-arc eminingi emikhulu yokulwa nokunyathelisa kweminwe
Umshini wokumboza i-magnetron sputtering ophikisana neminwe usebenzisa inhlanganisela ye-medium frequency magnetron sputtering, i-multi-arc ion kanye nobuchwepheshe be-AF, obusetshenziswa kabanzi embonini yehadiwe, ihadiwe yetafula, ipuleti lensimbi engagqwali ye-titanium, isinki yensimbi engagqwali kanye nokucubungula ipuleti lensimbi engagqwali enkulu. Inokuqina okuhle, ukuphindaphindeka, ubuningi kanye nokufana kwesendlalelo sefilimu, umkhiqizo ophezulu kanye nesivuno esikhulu somkhiqizo.
Isikhathi sokuthunyelwe: Novemba-07-2022