Uma kukhulunywa ngobuchwepheshe obusezingeni eliphezulu emkhakheni wokufakwa kwefilimu encane, ukusputtering nge-magnetron ngokungangabazeki yikho okukhanga kakhulu. Lobu buchwepheshe obushintshayo buthole ukunakwa okukhulu ngenxa yokusebenza kahle kwayo okumangalisayo kanye nokuguquguquka kwayo. Kule bhulogi, sizohlola ngokujulile ukusebenza kwe-sputtering nge-magnetron futhi sihlole umthelela wayo ezimbonini ezahlukahlukene.
Isimiso esiyisisekelo ngemuva kokukhipha i-magnetron sihilela ukushaya i-target ngama-ion anamandla. Izinto eziqondiwe (ngokuvamile insimbi noma i-compound) zitholakala ekamelweni le-vacuum kanye ne-substrate ezogqokwa. Ngokuyinhloko i-magnetron isebenzisa insimu yamagnetic eduze kwe-target. Leli lungiselelo linikeza izinzuzo eziningana kunezindlela ezivamile zokukhipha i-sputtering.
Amandla ayinhloko ashukumisayo ngemuva kokukhipha i-magnetron ukuba khona kwe-plasma ngaphakathi kwegumbi lokugeza. Ama-plasma akhiwa ngokungenisa igesi efana ne-argon, equkethe ama-ion asheshiswa aye endaweni okuqondiwe kuyo yinsimu kagesi. Lapho la ma-ion eshayisana nelitshe, ama-athomu noma ama-molecule akhishwa ebusweni bawo ngenqubo ebizwa ngokuthi i-sputtering. Lezi zinhlayiya ezifuthweyo zibe sezidlula ekamelweni lokugeza bese ekugcineni zihlala phansi, zakha ungqimba lwefilimu oluncane.
Manje, ake sihlole inhlanganisela yokuthi i-magnetron sputtering isebenza kanjani kanye nokuqukethwe kwezindaba zakamuva ngomongo womkhiqizo wokumaketha. Kukhona ukwanda kwesidingo samafilimu amancane asezingeni eliphezulu kuzo zonke izimboni ezifana ne-elekthronikhi, izindiza, kanye nokunakekelwa kwempilo. Ngakho-ke, izinkampani bezitshala imali eningi ocwaningweni nasekuthuthukisweni ukuze zisebenzise ngokugcwele amandla e-magnetron sputtering.
Ngokufika kwe-nanotechnology, i-magnetron sputtering isibe yigugu nakakhulu. Amandla okulawula ngokunembile ukwakheka kwefilimu kanye nobukhulu bayo kuvula izindlela ezintsha zokudala imikhiqizo emisha. Isibonelo, embonini ye-elekthronikhi, i-magnetron sputtering isetshenziselwa ukufaka amafilimu amancane kuma-wafer e-semiconductor, okuvumela ukukhiqizwa kwama-microchip athuthukile kanye namasekethe ahlanganisiwe.
Ngaphezu kwalokho, imboni yezokunakekelwa kwempilo ibone intuthuko enkulu ngokusebenzisa i-magnetron sputtering. Izembozo ezihambisana ne-biocompatible ezifakwe kwezokwelapha njenge-pacemakers kanye namadivayisi amathambo zandisa isikhathi eside nokuhambisana kwazo emzimbeni womuntu. Ngaphezu kwalokho, ubuchwepheshe be-magnetron sputtering bushintshe kakhulu ukukhiqizwa kwamaseli elanga, ingilazi eyonga amandla kanye nezembozo ezibonakalayo, okuyisa lezi zimboni ekusaseni eliqhubekayo.
Ekuphetheni, i-magnetron sputtering inikeza ikhambi elithembisayo lokufakwa kwefilimu encane ngokusebenzisa isimiso sayo esiyingqayizivele sokusebenza. Amandla ayo okudala izembozo eziqondile neziguquguqukayo yenze kwaba ithuluzi elibalulekile ezimbonini eziningana. Njengoba siqhubekela phambili enkathini yokusungula izinto ezintsha kwezobuchwepheshe, i-magnetron sputtering izodlala indima ebaluleke kakhulu. Ngokuqonda ukuthi isebenza kanjani, singaqhubeka nokucindezela imingcele yalokho okungenzeka futhi sivule amathuba amasha okukhula nentuthuko.
Isikhathi sokuthunyelwe: Julayi-18-2023