Umshini wokuhlanganisa i-vacuum ohlelweni lokumpompa unezidingo eziyisisekelo ezilandelayo:
(1) Uhlelo lwe-vacuum yokumboza kufanele lube nesilinganiso sokumpompa esikhulu ngokwanele, okungafanele nje sikhiphe ngokushesha amagesi akhishwe ku-substrate nezinto ezihwamukile kanye nezingxenye ezisegunjini le-vacuum ngesikhathi senqubo yokumboza, kodwa futhi likwazi ukupompa ngokushesha amagesi akhishwe enqubweni ye-sputtering ne-ion coating, kanye nokuvuza kwegesi nokuvuza kwesistimu ye-ion.
Ukuvuza kwegesi phakathi nenqubo ye-sputtering kanye ne-ion coating kungabuye kukhishwe ngokushesha. Ukuze kuthuthukiswe ukukhiqizwa komshini wokumboza, kufanele ukwazi ukusebenza ngokushesha.
(2) I-vacuum yokugcina yomshini wokupompa umshini wokuhlanganisa kufanele ihluke ngokuvumelana nezidingo zamafilimu ahlukene. Ithebula 7-9 ububanzi bezinga le-vacuum elidingwa inqubo yokumboza yamafilimu ahlukene.
(3) Empompini yokusabalalisa uwoyela njengoba isistimu yokumpompa iphampu eyinhloko idinga izinga lokubuyisela uwoyela wepompo lincane ngangokunokwenzeka, ngoba umhwamuko kawoyela obuyayo uzongcolisa ingaphezulu lengxenye yokusebenza futhi wenze ikhwalithi yefilimu yehle. Ezidingweni zekhwalithi yefilimu ziphezulu kakhulu enqubweni yokugqoka, kungcono ukusebenzisa uhlelo lokupompa olungenawo uwoyela. Uma usebenzisa i-oil diffusion pump pumping system, kufanele isethwe ku-pump inlet adsorption trap, i-cold trap nezinye izingxenye, futhi kufanele inake ukuqhutshwa kwezingxenye ukuze kuqinisekiswe ukuthi isistimu ye-vacuum igcina isivinini esikhulu sokupompa.
(4) Izinga lokuvuza kwegumbi lokumboza i-vacuum kanye nesistimu yokumpompa kufanele kube kuncane, okungukuthi, ngisho noma kuwukuvuza kwegesi elandelanayo, kuzothinta ikhwalithi yefilimu. Ngakho-ke, ukuze kuqinisekiswe ukusebenza kokuvala kwesistimu, inani lokuvuza eliphelele lesistimu kufanele likhawulelwe ebangeni elivumelekile.
(5) Ukusebenza kwesistimu ye-vacuum, ukusetshenziswa nokugcinwa kufanele kube lula, ukusebenza okuzinzile futhi okuthembekile.
-Le ndatshana ikhishwe nguumenzi womshini we-vacuum coatingI-Guangdong Zhenhua
Isikhathi sokuthumela: Dec-14-2023