1. Ithagethi ye-Chromium i-Chromium njengento yefilimu e-sputtering akulula nje kuphela ukuhlanganisa ne-substrate ene-adhesion ephezulu, kodwa futhi i-chromium ne-oxide ukuze ikhiqize ifilimu ye-CrO3, izici zayo zomshini, ukumelana ne-asidi, ukuzinza kokushisa kungcono. Ngaphezu kwalokho, i-chromium esesimweni se-oxidation esingaphelele ingase futhi ikhiqize ifilimu ebuthakathaka yokumuncwa. I-Chromium enobumsulwa obungaphezu kuka-98% kubikwe ukuthi yenziwe okuqondiwe okungunxande noma okuqondiwe kwe-cylindrical chromium. Ngaphezu kwalokho, ubuchwepheshe bokusebenzisa indlela ye-sintering ukwenza ithagethi kanxande ye-chromium nabo buvuthiwe.
2. Ithagethi ye-ITO Ukulungiswa kwezinto ezihlosiwe zefilimu ye-ITO eyayisetshenziswa esikhathini esidlule, ngokuvamile kusetshenziswa izinto zengxubevange ye-In-Sn ukuze kwenziwe amathagethi, bese kuba senqubweni yokwemboza ngomoya, bese kukhiqizwa ifilimu ye-ITO. Le ndlela inzima ukulawula igesi yokusabela futhi ayinakho ukukhiqiza kabusha okungekuhle. Ngakho-ke, eminyakeni yamuva ithathelwe indawo yi-ITO sintering target. I-ITO target material inqubo ejwayelekile ihambisana nesilinganiso sekhwalithi, ngokusebenzisa indlela yokugaya ibhola izoxutshwa ngokugcwele, bese wengeza i-organic powder composite ejenti ekhethekile izoxubene nesimo esidingekayo, futhi ngokusebenzisa ukuhlanganisa okucindezelwe, bese ipuleti emoyeni ku-100 ℃ / h izinga lokushisa libe ngu-1600 ℃ ngemva kokubamba izinga lokushisa elingu-1h kuya ku-10 futhi lenziwe 10 kuya ku-10 ℃. Izinga lokupholisa lika-100 ℃ / h phansi ekamelweni lokushisa futhi lenziwe. Lapho wenza okuhlosiwe, indiza okuqondiswe kuyo kudingeka ukuba iphucuziwe, ukuze kugwenywe izindawo ezishisayo lapho kuqhunyiswa ama-sputtering.
I-3.Igolide ne-alloy yegolide okuqondiswe kuyo igolide, ukucwebezela okukhazimulayo, okumelana nokugqwala okuhle, kuyizinto zokuhlobisa ezingaphezulu zokuhlobisa. Indlela yokunamathisela emanzi esetshenziswe esikhathini esidlule sokunamathela kwefilimu incane, amandla aphansi, ukumelana nokuhuzuka okungekuhle, kanye nezinkinga zokungcoliswa koketshezi okumoshayo, ngakho-ke, kuthathelwe indawo ngokungenakugwenywa yi-plating eyomile. Uhlobo oluqondiwe lunethagethi yendiza, ithagethi yendawo eyinhlanganisela, ithagethi yeshubhu, ithagethi yendawo eyinhlanganisela yamashubhu nokunye. Indlela yawo yokuwulungiselela iwukusebenzisa umthamo wokuncibilika kwevacuum, ukucotshwa, ukugoqa okubandayo, ukugoqa, ukugoqa kahle, ukugunda, ukuhlanza indawo engaphezulu, iphakheji eyinhlanganisela egoqayo ebandayo kanye nochungechunge lwezinqubo ezifana nokulungiswa kwenqubo. Lobu buchwepheshe budlulise ukuhlolwa eChina, ukusetshenziswa kwemiphumela emihle.
4. Ithagethi yezinto zikaZibuthe Ithagethi ye-Magnetic material isetshenziselwa kakhulu ukunamathisela amakhanda kazibuthe efilimu emincane, amadiski efilimu amancanyana kanye namanye amadivaysi efilimu ayizibuthe azacile. Ngenxa yokusetshenziswa kwe-DC magnetron sputtering method for magnetic materials magnetron sputtering kunzima kakhulu. Ngakho-ke, okuhlosiwe kwe-CT okubizwa ngokuthi "uhlobo lwe-gap target" kusetshenziselwa ukulungiswa kwalezi zinhloso. Umgomo ukusika izikhala eziningi ebusweni bento eqondiwe ukuze uhlelo lukazibuthe lukwazi ukukhiqizwa phezu kwethagethi yamagnetic evuza insimu kazibuthe, ukuze indawo okuhloswe ngayo ikwazi ukwakha inkambu kazibuthe ye-orthogonal futhi ifinyelele inhloso yefilimu ye-magnetron sputtering. Kuthiwa ukushuba kwalokhu okuhlosiwe kungafinyelela ku-20mm.
-Le ndatshana ikhishwe nguumenzi womshini we-vacuum coatingI-Guangdong Zhenhua
Isikhathi sokuthumela: Jan-24-2024