Ubuchwepheshe be-CVD busekelwe ekuphenduleni kwamakhemikhali. Ukusabela lapho ama-reactants esesimweni segesi futhi omunye wemikhiqizo usesimweni esiqinile ngokuvamile ubizwa ngokuthi ukusabela kwe-CVD, ngakho-ke uhlelo lwayo lokusabela kwamakhemikhali kufanele lufeze lezi zimo ezintathu ezilandelayo.
(1) Ezingeni lokushisa lokubeka, izinto ezisabelayo kufanele zibe nomfutho womoya ophakeme ngokwanele. Uma ama-reactants wonke enegesi ezingeni lokushisa legumbi, idivayisi yokubeka ilula uma kuqhathaniswa, uma ama-reactants eguquguquka ekamelweni lokushisa incane kakhulu, idinga ukushiswa ukuze iguquke, futhi ngezinye izikhathi idinga ukusebenzisa igesi yenethiwekhi ukuyiletha ekamelweni lokusabela.
(2) Emikhiqizweni yokusabela, zonke izinto kufanele zibe sesimweni segesi ngaphandle kwediphozi oyifunayo, esesimweni esiqinile.
(3) Ukucindezela komhwamuko wefilimu ediphozithiwe kufanele kube phansi ngokwanele ukuze kuqinisekiswe ukuthi ifilimu ediphozithiwe ixhunywe ngokuqinile ku-substrate enezinga elithile lokushisa lokubeka ngesikhathi sokusabela kokubeka. Ukucindezela komhwamuko we-substrate emazingeni okushisa okubekwa nawo kumele kube phansi ngokwanele.
Ama-reactants e-deposition ahlukaniswe abe yizifunda ezintathu eziyinhloko ezilandelayo.
(1) Isimo segesi. Izinto zomthombo ezinegesi ezingeni lokushisa lasekamelweni, njenge-methane, i-carbon dioxide, i-ammonia, i-chlorine, njll., ezisiza kakhulu ekufakweni komhwamuko wamakhemikhali, futhi izinga lokugeleza kwawo lilawulwa kalula.
(2) Uketshezi. Ezinye izinto ezisabelayo ekamelweni lokushisa noma izinga lokushisa eliphakeme kakhulu, kukhona umfutho womoya ophezulu, njenge-TiCI4, SiCl4, CH3SiCl3, njll., ingasetshenziswa ukuthwala igesi (efana ne-H2, N2, Ar) igeleze ebusweni boketshezi noma uketshezi olungaphakathi kwebhamuza, bese uthwala umhwamuko ogcwele wento uwuyise esitudiyo.
(3) Isimo esiqinile. Uma ungekho umthombo ofanele wegesi noma we-liquid, kungasetshenziswa kuphela i-solid-state feedstocks. Ezinye izakhi noma izinhlanganisela zazo kumakhulu amadigri anokucindezela komhwamuko okukhulu, okufana ne-TaCl5, Nbcl5, ZrCl4, njll., kungathwalwa kusitudiyo kusetshenziswa igesi yokuthwala efakwe kungqimba lwefilimu.
Isimo esivame kakhulu uhlobo ngegesi ethile kanye nokusabela okuqinile kwegesi okuqinile noma okuwuketshezi lwegesi, ukwakheka kwezingxenye ezifanele zegesi ekulethweni kwesitudiyo. Isibonelo, igesi ye-HCl ne-metal Ga isabela ukwenza ingxenye yegesi i-GaCl, ethuthelwa esitudiyo ngendlela ye-GaCl.
-Le ndatshana ikhishwe nguumenzi womshini we-vacuum coatingI-Guangdong Zhenhua
Isikhathi sokuthumela: Nov-16-2023