Umatshini wokugquma ivacuum kwinkqubo yokumpompa unezi mfuno zilandelayo:
(1) Inkqubo ye-coating vacuum kufuneka ibe nesantya sokupompa esikhulu ngokwaneleyo, esingafuneki nje ukupompa ngokukhawuleza iigesi ezikhutshwe kwi-substrate kunye nezixhobo ezikhukhulayo kunye namacandelo akwigumbi lokuhlambela ngexesha lenkqubo yokugquma, kodwa kwakhona ikwazi ukupompa ngokukhawuleza iigesi ezikhutshwe kwi-sputtering kunye ne-ion inkqubo yokwambathisa, kunye nokuvuza kwegesi kunye nenkqubo yokuvuza kunye nenkqubo yokuvuza kwegesi kunye nenkqubo yokucoca.
Ukuvuza kwegesi ngexesha lokutshiza kunye nenkqubo yokwambathisa i-ion nako kunokukhutshwa ngokukhawuleza. Ukuze kuphuculwe imveliso yomatshini wokugquma, kufuneka ikwazi ukusebenza ngokukhawuleza.
(2) I-vacuum yokugqibela yenkqubo yokupompa umatshini wokugubungela kufuneka ihluke ngokweemfuno zeefilimu ezahlukeneyo. Itheyibhile 7-9 luhlu lwe-vacuum degree olufunwa yinkqubo yokugqoka iifilimu ezahlukeneyo.
(3) Kwimpompo yokusasazwa kwe-oyile njengoko eyona nkqubo yokumpompa impompo ifuna izinga lokubuyiswa kwe-oyile yempompo lincinci kangangoko, kuba umphunga we-oyile obuyayo uya kungcolisa umphezulu wesixhobo sokusebenza kwaye ubangele umgangatho wefilimu wehle. Kwiimfuno zekhwalithi zefilimu ziphezulu kakhulu kwinkqubo yokugqoka, kungcono ukusebenzisa inkqubo yokupompa i-oyile engenawo. Xa usebenzisa i-oyile diffusion pump pumping system, kufuneka ibekwe kwi-pump inlet adsorption trap, i-cold trap kunye namanye amacandelo, kwaye kufuneka ihlawule ingqalelo kwi-conductivity yamacandelo ukuqinisekisa ukuba inkqubo yokucoca i-vacuum yokugcina isantya esiphezulu sokupompa.
4 Ngoko ke, ukwenzela ukuba kuqinisekiswe ukusebenza kokutywinwa kwenkqubo, izinga lokuvuza lilonke lenkqubo kufuneka likhawulelwe kuluhlu oluvumelekileyo.
(5) Ukusebenza kwenkqubo ye-vacuum, ukusetyenziswa kunye nokugcinwa kufuneka kube lula, ukuzinza kunye nokusebenza okuthembekileyo.
–Eli nqaku likhutshwa nguumenzi womatshini wokugqumaGuangdong Zhenhua
Ixesha lokuposa: Dec-14-2023