Oomatshini bokubeka i-sputter, abakwabizwa ngokuba ziinkqubo zokutshiza, zizixhobo ezikhethekileyo ezisetyenziswa kwinkqubo yokubeka ifilim. Isebenza kumgaqo wokutshiza, obandakanya ukubhobhoza imathiriyeli ekujoliswe kuyo ngee-ion zamandla aphezulu okanye iiathomu. Inkqubo ikhupha umjelo weeathom kwizinto ekujoliswe kuzo, ezithi ke zifakwe kwi-substrate ukuze zenze ifilim ebhityileyo.
Ukusetyenziswa koomatshini be-sputter deposition kwande kakhulu ngenxa yokukwazi ukuvelisa iifilimu ezicocekileyo, ukufana okugqwesileyo kunye nobukhulu obulawulwayo. Iifilimu ezinjalo zinezicelo ezibanzi kwi-microelectronics, optics, iiseli zelanga, imidiya yokugcina imagnethi kunye nezinye iinkalo.
Uphuhliso lwakutsha nje kwicandelo loomatshini be-sputter lubangele ukusebenza okuphuculweyo kunye neempawu eziphuculweyo. Ukuqhubela phambili okuphawulekayo kukudityaniswa kweteknoloji ye-magnetron sputtering, evumela amazinga aphezulu okubeka kunye nokuphuculwa komgangatho wefilimu. Olu lutsha luvumela ukubekwa kwezinto ezahlukeneyo, kubandakanywa isinyithi, i-oxides yesinyithi kunye ne-semiconductors.
Ukongeza, oomatshini bokubeka i-sputter ngoku baxhotyiswe ngeenkqubo zolawulo oluphezulu eziqinisekisa ulawulo oluchanekileyo lweeparamitha zokubeka ezifana noxinzelelo lwegesi, ubuninzi bamandla, ukubunjwa okujoliswe kuyo kunye nobushushu be-substrate. Le nkqubela phambili iphucula ukusebenza kwefilimu kwaye yenza ukuba ukuveliswa kweefilimu ezineepropati ezilungiselelwe izicelo ezithile.
Ukongeza, uphuhliso oluqhubekayo kwinkalo ye-nanotechnology nayo ixhamla kakhulu kumatshini wokubeka i-sputter. Abaphandi basebenzisa aba matshini ukwenza i-nanostructures kunye ne-nanostructured coatings ngokuchaneka okuphezulu kakhulu. Oomatshini bokubeka i-sputter bayakwazi ukubeka iifilimu ezibhityileyo kwiimilo ezintsonkothileyo kunye neendawo ezinkulu, zibenza zilungele usetyenziso lwe-nanoscale eyahlukeneyo.
Kutshanje kuye kwanikelwa ingxelo yokuba iqela lezazinzulu ezisuka kwiziko elaziwayo lophando liye lavelisa ngempumelelo umatshini omtsha wokufaka i-sputter onokufaka iifilimu ezicekethekileyo ngokuchane ngendlela engazange ibonwe ngaphambili. Lo matshini wokusika udibanisa i-algorithms yolawulo lwe-state-of-art kunye noyilo lwe-magnetron yenoveli ukufezekisa ukufana kwefilimu ephezulu kunye nokulawula ubukhulu. Iqela lophando licinga ukuba umatshini walo uya kuguqula inkqubo yokwenziwa kwezixhobo zombane zesizukulwana esilandelayo kunye neenkqubo zokugcina amandla.
Ukuphuhlisa imathiriyeli emitsha ngokusebenza okuphuculweyo kukuzisukela ngokungapheliyo kuluntu lwenzululwazi. Oomatshini bokubeka i-sputter baye baba sisixhobo esiyimfuneko kolu phononongo, ukuququzelela ukufunyanwa kunye nokuhlanganiswa kwezinto ezintsha ezineempawu ezizodwa. Abaphandi basebenzisa aba matshini ukufunda iindlela zokukhula kwefilimu, izixhobo zokufunda ezineempawu ezilungiselelweyo, kunye nokufumanisa izinto ezintsha ezinokubumba ikamva lobuchwepheshe.
–Eli nqaku likhutshwa nguumenzi womatshini wokugqumaGuangdong Zhenhua
Ixesha lokuposa: Oct-30-2023
