Ukuqaliswa kokufakwa kwe-vacuum vapour, i-sputtering kunye ne-ion coating

Vacuum ukutyabeka ikakhulu ibandakanya vacuum umphunga deposition, sputtering ukutyabeka kunye ion ukutyabeka, zonke ezisetyenziselwa ukufaka iifilim ezahlukeneyo zetsimbi kunye non-metal phezu komhlaba iinxalenye zeplastiki nge distillation okanye sputtering phantsi kweemeko vacuum, nto leyo enokufumana umphezulu obhityileyo ukutyabeka ngenzuzo ebalaseleyo yokuncamathela ngokukhawuleza, kodwa ixabiso likwasetyenziswa kakhulu, kwaye ixabiso likwasetyenziswa kakhulu, kwaye ixabiso linokusetyenziswa kakhulu, kwaye ixabiso lisetyenziswa kakhulu, kwaye ixabiso lisetyenziswa kakhulu, kwaye ixabiso lisetyenziswa kakhulu. ukutyabeka okusebenzayo kweemveliso zodidi oluphezulu.
I-vacuum vapor deposition yindlela yokufudumeza isinyithi phantsi kwe-vacuum ephezulu, iyenze inyibilike, ikhuphe, kwaye yenze ifilimu yentsimbi ebhityileyo kumphezulu wesampuli emva kokupholisa, kunye nobukhulu be-0.8-1.2 um. Izalisa i-concave encinci kunye ne-convex iinxalenye kumphezulu wemveliso eyenziweyo ukufumana indawo efana nesibuko.

Ukutshiza ngokuqhelekileyo kubhekisa kwi-magnetron sputtering, indlela yokutshiza enesantya esiphezulu sobushushu obuphantsi. Inkqubo ifuna vacuum malunga 1 × 10-3 Torr, oko kukuthi 1.3 × 10-3Pa vacuum karhulumente ezaliswe argon gas inert (Ar), naphakathi substrate yeplastiki (anode) kunye nethagethi metal (cathode) plus high-voltage ngqo lwangoku, ngenxa excitation electron yerhasi engasebenziyo eveliswa yi-producing iplasma ephumayo, i-producing ye-plasma ephumayo, i-producing plasma. yethagethi yesinyithi kwaye ifakwe kwi-substrate yeplastiki. Uninzi lwezigqubuthelo zesinyithi ngokubanzi zisebenzisa i-DC sputtering, ngelixa izixhobo ze-ceramic ezingaqhubekiyo zisebenzisa i-RF AC sputtering.

Ukwaleka kwe-Ion yindlela apho ukukhutshwa kwerhasi kusetyenziswa ngokuyinxenye i-ionize igesi okanye into engumphunga phantsi kweemeko ze-vacuum, kwaye into ekhutshwa ngumphunga okanye i-reactants yayo ifakwe kwi-substrate ngokuqhushumba kweeyoni zegesi okanye iiyoni zento engumphunga. Ezi ziquka i-magnetron sputtering ion coating, i-ion ye-ion esebenzayo, i-cathode yokukhupha i-ion coating (indlela yokubeka umphunga we-cathode engenanto), kunye ne-multi-arc ion ion (i-cathode arc ion coating).

Imagnetron ethe nkqo emacaleni amabini etshiza icoat eqhubekayo emgceni
Ukusebenziseka okubanzi, kunokusetyenziselwa iimveliso zombane ezifana neqokobhe le-EMI elikhuselayo, iimveliso ezisicaba, kunye nazo zonke iimveliso zekomityi yesibane ngaphakathi kobude obuthile bunokuveliswa. Umthamo omkhulu wokulayisha, ukudibanisa okubambeneyo kunye nokubambene ngokugxagxamisayo kweekomityi ezikhanyayo zotyalo-macala amabini, ezinokuthi zibe nomthamo omkhulu wokulayisha. Umgangatho ozinzileyo, ukuhambelana kakuhle komgangatho wefilimu ukusuka kwibhetshi ukuya kwibhetshi. Iqondo eliphezulu lokuzisebenzela kunye neendleko eziphantsi zokusebenza.

–Eli nqaku likhutshwa nguumenzi womatshini wokugqumaGuangdong Zhenhua