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What is the technology of electron beam evaporation coating machine?

What is the technology of electron beam evaporation coating machine?

2021-03-13

What is the technology of electron beam evaporation coating machine?

The electron beam evaporation coating machine is a vacuum evaporation coating technology that relies on electron beam bombardment evaporation. Through different electron beam evaporation coating types, it can be divided into straight guns (Pierce guns), ring guns, hollow cathode electron guns and e-guns. Types of.


evaporation coationg machine



In order to achieve the above purpose, the present utility model adopts the following technical solutions:


A vacuum coating machine with high stability, comprising a shell, the upper end of the shell is fixedly connected with a motor, the shell is provided with a vertically arranged baffle, and the inner bottom surface of the shell is provided with a gasket, The gasket is made of silicone rubber material, the upper end of the baffle is fixedly connected with the inner side wall of the housing, the baffle divides the inside of the housing into a vacuum chamber and a heat treatment chamber, and the baffle is provided with a lower end A sliding groove provided with an opening, a sliding plate is slidably connected in the sliding groove, a threaded rod is connected to the internal thread of the sliding plate, and the upper end of the threaded rod sequentially penetrates the sliding plate, the baffle and the casing and extends to the outside of the casing. , The output shaft of the upper motor of the threaded rod is fixedly connected, the upper side wall of the vacuum chamber is provided with an opening, and the side wall of the opening is provided with a sealing mechanism for sealing the opening, and the sealing mechanism includes The cover plate above the opening, one end of the cover plate is hinged with the side wall of the opening through a hinge, the side wall of the opening is provided with a step matching the sealing plate, the vacuum chamber is provided with a working plate, so The working plate is fixedly connected to the side wall of the vacuum chamber through a pushing mechanism, the pushing mechanism includes a cylindrical shell fixedly connected to the side wall of the vacuum chamber, and an air bag is fixedly connected to the inner side wall of the cylindrical shell. One end of the airbag is fixedly connected with a push rod, the push rod is slidably connected with the inner side wall of the cylindrical shell, and the end of the push rod away from the airbag extends to the outside of the cylindrical shell and is fixedly connected with the working plate. A cooling water pipe is provided, and the cooling water pipe sequentially penetrates the cylindrical shell and the shell and extends to the outside of the shell.



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