What is the suction measures for the vacuum chamber of the coating machine?
Under the condition of ensuring the vacuum life of the vacuum chamber of the PVD coating machine, increasing the suction means and improving the suction capacity is a main technical measure to increase the allowable gas release. At present, the most commonly used inhalation methods in the industry are:
1. Fill carbon paper.
2. Use the adsorption of condensable gas at low temperature, such as carbon dioxide filling.
3. Room temperature adsorbent for metals, such as palladium.
4. Solid low-temperature adsorbent (such as molecular sieve, activated carbon, silica gel, etc.).
The inhalation principles and effects of these four inhalation methods are different, and the best results can be achieved if they are used correctly and properly matched in the application.
For example, in a 200L liquid nitrogen container, in addition to the effective activated carbon and activation process combined with a new extraction process, a new process of filling carbon dioxide gas at the end of the extraction process is also used. As a result, only the vacuum chamber of the PVD vacuum coating machine is used. The diffusion pump was pumped for 12 hours. After 10 months of use, the vacuum in the vacuum chamber of the coating machine was still 9x10⁻³Pa, and the daily evaporation rate did not increase. The other only uses a mechanical pump to pump air for 12 hours. After 10 months of use, the vacuum is still 1.2X10⁻²Pa, and the daily evaporation in the vacuum chamber of the coating machine does not change much.
Therefore, the vacuum chamber of the multi-layer insulated medium and small PVD vacuum coating equipment uses low-temperature adsorbents while adopting new technology to extract air and increase the use of room temperature adsorbents, carbon-filled paper, or filling with carbon dioxide gas after exhausting. The exhausting time is complete. It can be shortened within 24 hours, and it can meet the long-life requirements of the vacuum chamber of the coating machine with only a mechanical pump without a diffusion pump.
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