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What is the gas sources of high vacuum coating equipment​?

What is the gas sources of high vacuum coating equipment​?

2021-01-17

What is the gas sources of high vacuum coating equipment

 

PVD vacuum coating machine


In the field of high vacuum coating, the interaction of gas and solid surface, as well as the gas generated by the chemical reaction between the dissolved gas inside the solid and the solid surface, is an important gas source. The carbon in stainless steel diffuses to the metal surface and chemically reacts with oxygen to produce carbon monoxide.

 

In the vacuum system of high vacuum coating equipment, after heating the metal filament, the partial pressures of water vapor, carbon monoxide and methane increase. The increase in these gases is related to the presence of hydrogen. After reducing the partial pressure of hydrogen, the partial pressure of these gases also decreases. Since hydrogen is decomposed into an atomic state and diffuses into the metal, it is chemically active and easily reacts in the metal and on the surface. In the vacuum system, a variety of chemical reactions can be carried out simultaneously on the metal wall and the glass wall. The history and use conditions of various materials are different, and the gases generated by chemical reactions are also different. Under extremely high vacuum conditions, gases other than hydrogen are related to the presence of hydrogen. Therefore, reducing the partial pressure of hydrogen is still the main thing.

 

Someone used thermochemical equilibrium theory to deal with the interaction of the residual gas in the vacuum system, and established the equilibrium pressure equation caused by them to find the equilibrium partial pressure of the gas produced by these reactions. This is a new attempt to deal with the residual gas in the vacuum system. .

 

The fact that chemical reactions occur in or on the vacuum system of the high-vacuum coating equipment can be used to reduce difficult-to-exclude gases, that is, to convert difficult-to-exclude gases into easily-excluded gases through chemical reactions. Yoshio Murakami proposed to oxidize the remaining hydrogen into water vapor, and then extract the water vapor with a liquid nitrogen cold trap, which is an effort in this regard.



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